Means for the focusing and acceleration of parallel beams of charged particles
First Claim
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1. Apparatus for electrostatically focusing a beam of charged particles, comprising:
- (a) a first support plate, the first plate including a first plurality of holes, and(b) a first plurality of pairs of substantially identical projections to serve as electrostatic poles for focusing the beam located on one side of the first plate the poles of each of the pairs are on diametrically opposite sides of a corresponding one of the holes and spaced equidistant from the center of the hole, so that each hole corresponds with a single pair of poles.
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Abstract
Apparatus for focusing beams of charged particles comprising planar arrays of electrostatic quadrupoles. The array may be assembled from a single component which comprises a support plate containing uniform rows of poles. Each pole is separated by a hole through the plate designed to pass a beam. Two such plates may be positioned with their poles intermeshed to form a plurality of quadrupoles.
74 Citations
10 Claims
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1. Apparatus for electrostatically focusing a beam of charged particles, comprising:
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(a) a first support plate, the first plate including a first plurality of holes, and (b) a first plurality of pairs of substantially identical projections to serve as electrostatic poles for focusing the beam located on one side of the first plate the poles of each of the pairs are on diametrically opposite sides of a corresponding one of the holes and spaced equidistant from the center of the hole, so that each hole corresponds with a single pair of poles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 10)
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9. A method for electrostatically focusing a plurality of parallel beams comprising the steps of:
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(a) supplying a first conducting support plate having a plurality of conducting projections to serve as electrostatic focusing poles, the poles being located on one side of the plate, and being positioned in parallel rows spaced uniformly apart, the poles in the rows having the same spacing between poles as between rows, the plate having a hole centrally located between each pole in each row, (b) supplying a second plate identical to the first, (c) locating the plates parallel to one and other, (d) orienting the rows on the first plate orthogonal with respect to those on the second, (e) aligning the centers of each pair of corresponding holes on opposite plates on an axis lying perpendicular to the plates, (f) intermeshing the poles without making contact between the poles and the opposite plate and maintaining each of the hole pairs on the axis, and (g) applying DC potential to the poles by way of supplying opposite polarity to the first and second plate to produce a focusing field on beams passing through the hole pairs.
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Specification