Deposition of coatings from vaporized reactants
First Claim
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1. In a method for coating a substrate with a film by deposition from a vaporous reactant composition comprising the steps of:
- fluidizing a mass of particulate solid reactant with a gas at a first temperature substantially below the reaction, vaporization or decomposition temperature of the reactant;
drawing a volume of fluidizing gas and suspended particulate solid reactant from the fluidized mass as a particulate reactant-gas composition;
mixing the withdrawn volume of fluidizing gas and suspended particulate reactant with an additional volume of gas which is at a second temperature, also below the decomposition temperature for the reactant to dilute the particulate reactant-gas composition;
heating the diluted particulate reactant-gas composition to a temperature above the vaporization temperature of the reactant; and
conveying the heated reactant-gas composition into contact with the substrate to be coated;
the improvement which comprises maintaining the substrate at a temperature below said reaction temperature but sufficient to cause the reactant in the composition to deposit a film thereon.
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Abstract
A method is provided for fluidizing and vaporizing particulate solid coating reactants by first establishing a fluidized bed of dispersed particulate solid coating reactants and thereafter drawing a volume of fluidizing gas and suspended particulate solid coating reactant to a vaporizer while mixing an additional volume of gas therewith and then vaporizing the dispersed particulate solid coating reactant in the reactant-gas mixture. The reactant-gas mixture is then directed into contact with a substrate to be coated in order to deposit a film thereon.
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7 Claims
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1. In a method for coating a substrate with a film by deposition from a vaporous reactant composition comprising the steps of:
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fluidizing a mass of particulate solid reactant with a gas at a first temperature substantially below the reaction, vaporization or decomposition temperature of the reactant; drawing a volume of fluidizing gas and suspended particulate solid reactant from the fluidized mass as a particulate reactant-gas composition; mixing the withdrawn volume of fluidizing gas and suspended particulate reactant with an additional volume of gas which is at a second temperature, also below the decomposition temperature for the reactant to dilute the particulate reactant-gas composition; heating the diluted particulate reactant-gas composition to a temperature above the vaporization temperature of the reactant; and conveying the heated reactant-gas composition into contact with the substrate to be coated; the improvement which comprises maintaining the substrate at a temperature below said reaction temperature but sufficient to cause the reactant in the composition to deposit a film thereon. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification