Laser heterodyne surface profiler

• US 4,353,650 A
• Filed: 06/16/1980
• Issued: 10/12/1982
• Est. Priority Date: 06/16/1980
• Status: Expired due to Term

• Current Assignee: United States Department of Energy
• Original Assignee: United States Department of Energy
• Inventors: Sommargren, Gary E.
• Primary Examiner(s): Punter, William H.
• Application Number:
  US06/159,893
• Time in Patent Office: 848 Days
• Field of Search: 356/371, 356/375-376, 356/349, 356/351, 356/353, 356/364, 356/368, 356/359-360, 356/5, 356/369, 250/225, 350/403, 350/407
• US Class Current: 356/600
• CPC Class Codes: G01B 11/303 using photoelectric detection means
• CPC Class Codes: G01B 9/02003 using beat frequencies
• CPC Class Codes: G01J 9/04 by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained

Abstract

A method and apparatus is disclosed for testing the deviation of the face of an object from a flat smooth surface using a beam of coherent light of two plane-polarized components, one of a frequency constantly greater than the other by a fixed amount to produce a difference frequency with a constant phase to be used as a reference. The beam also is split into its two components with the separate components directed onto spaced apart points onthe face of the object to be tested for smoothness. The object is rotated on an axis coincident with one component which is directed to the face of the object at the center which constitutes a virtual fixed point. This component also is used as a reference. The other component follows a circular track on the face of the object as the object is rotated. The two components are recombined after reflection to produce a reflected frequency difference of a phase proportional to the difference in path length which is compared with the reference phase to produce a signal proportional to the deviation of the height of the surface along the circular track with respect to the fixed point at the center.

Claims

1. A method for testing the deviation of the face of an object from a flat smooth surface comprising the steps of

generating a dual frequency beam of coherent light having a stable frequency difference with a constant reference phase,

splitting said beam into first and second frequency components,

directing said separating components onto spaced apart points on the face of said object,

recombining said components into a single beam after reflection from said points,

rotating said object about an axis normal to said face with respect to said first of said split components so as to have said second one of said components reflected from points along a circular track on said face while the first component is continually reflected from a stationary point on said axis at the center of rotation of said object, and

measuring the phase shift of the difference frequency of said components in the recombined beam as a measure of the variation of said face from a flat smooth surface.

2. A method as defined in claim 1 including the steps of monitoring the position of said object, and recording said measured variation as a function of object position.

4. A method as defined by claim 1, 2 or 3, including the step of initially adjusting the phase of said reflected frequency difference to coincide with said instant reference phase.

5. A method as defined by claim 4, wherein the step of initially adjusting the phase of said reflected frequency difference to coincide with said constant phase includes the steps of converting said components into fixed circularly and oppositely polarized forms, directing said circularly polarized components through a half-wave plate capable of having its optic axis rotated through an angle for shifting the phase of said circularly polarized components as a function of said angle, passing said circularly polarized and phase shifted components through a first polarizer, and detecting the light passed by said first polarizer to produce a signal having a phase that depends on the orientation of said half-wave plate, passing said reflected components through a second polarizer, detecting the light passed by said second polarizer to produce a signal having a phase that depends upon the phase of the frequency difference of said reflected components, comparing the phase of the two signals thus produced, and rotating said half-wave plate to bring said two signals into phase.

6. A method as defined in claim 5 wherein said half-wave plate may be rotated through 360°

, whereby said constant phase may be shifted through 360°

to bring it into phase with the phase of the frequency difference of said reflected components.

3. A method for testing the deviation of the face of an object from a flat smooth surface comprising the steps of

generating a beam of coherent light of two components, one of a frequency constantly greater than the other by a fixed amount to produce a difference frequency with a constant reference phase,

splitting said beam into its two components and directing said separate components onto spaced apart reflecting points, at least one of which is on said face to be tested for smoothness,

moving the face of said object to pass under at least said one component,

recombining said two components after reflection from said points to produce a reflected frequency difference of a phase changed in proportion to the difference to path length of one component reflected from one point to the other component reflected from the other point, and

comparing the phase of said reflected frequency difference with said constant reference phase to produce a signal proportional to the change of phase of said reflected frequency difference from said constant reference phase as said face is moved, and

wherein the other of said points is selected to reflect light from a fixed position, thereby to produce a signal that is a measurement of the profile of said surface along a track over which said one component passes, and further

wherein said fixed position is on said face, and movement of said face is rotational to pass said one component over a circular track on said face while the other component is reflected from a fixed position at the center of rotation, thereby to produce a phase which, upon being detected, provides a signal that is an absolute measurement of the profile of said surface along said circular track.

7. A system for testing the deviation of the face of an object from a flat smooth surface comprising

means for generating a dual frequency beam of coherent light having a stable frequency difference,

optical means for splitting said beam into first and second frequency components, for directing said separated components onto spaced apart points on the face of said object, and for recombining said components into a single beam after reflection from said points,

means for rotating said object about an axis normal to said face with respect to said first of said split components so as to have said second one of said components reflected from points along a circular track on said face while said first component is continually reflected from a single point on said axis at the center of rotation of said object, and

means for measuring the phase shift of the difference frequency of said components in the recombined beam as a measure of the variation of said face from a flat smooth surface.

8. A system as defined in claim 7 including means for monitoring position of said object, and means for recording said measured variation as a function of object position.

9. A system for testing the deviation of the face of an object from a flat smooth surface comprising

means for generating a beam of coherent light having two components of distinct frequencies which produce a constant frequency difference of fixed phase,

optical means for splitting said beam into a measurement beam and a reference beam each with two frequency components, said measurement beam being split into its two frequency components, and directing said components of said measurement beam on two spaced apart focus points on the face of said object, and for recombining said two measurement beam components upon reflection from said face,

means for rotating said object about an axis normal to said face at one of said focus points, thereby to vary the phase of the difference frequency of the recombined frequency components of the reference beam as a function of optical path length of said components, thereby to measure height deviation of said surface along a circular track reflecting one component with respect to the fixed point reflecting the other component, and

means for continually comparing the phase of the frequency difference in said reference beam with the changing phase of the frequency difference in said measurement beam, thereby to obtain a signal proportional to height deviation of said face from a flat smooth surface along said circular track.

10. A system as defined in claim 9 including means for continually computing from said signal the surface height deviations, means for monitoring angular position of said object, and means for recording the computed surface height deviation as a function of angular position of said object.

11. A system as defined in claim 9 or claim 10 including optical means for adjusting the phase of the frequency difference in said reference beam with respect to the phase of the frequency difference in said measurement beam for an initial condition, thereby providing zero adjustment for surface height measurement of said face.

12. A system as defined in claim 11 wherein said components of said beam from said generating means are orthogonal plane-polarized components, said optical phase adjusting means is comprised of a quarter-wave plate having its optic axis at 45°

with respect to said plane-polarized components, thereby to convert said plane-polarized components to left and right hand circularly polarized components, a half-wave plate capable of having its optic axis rotated, and a polarizer, said half-wave plate being positioned to transmit said circularly polarized components from said quarter-wave plate to said polarizer with a phase shift dependent upon the orientation of said half-wave plate.

13. Apparatus for testing the deviation of the face of an object from a flat smooth surface comprising

means for generating a beam of coherent light of two components, one of a frequency constantly greater than the other by a fixed amount to produce a difference frequency with a constant reference phase,

means for optically splitting said beam into its two frequency components and directing said separate components onto spaced apart reflecting points, at least one of which is on said face to be tested for smoothness, and for recombining said two components after reflection from said points to produce a reflected frequency difference of a phase changed in proportion to the difference in path length of one component reflected from one point to the other component reflected from the other point,

means for moving said object to pass said face under at least one component, and

means for comparing the phase of said reflected frequency difference with said constant frequency phase to produce a signal proportional to the deviation of the phase of said reflected frequency difference from said constant reference phase as said face is moved, and

wherein the other of said points is selected to reflect light from a fixed position, thereby to produce a signal that is a measurement of the profile of said surface along a track over which said one component passes, and further

wherein said fixed position is on said face, and means for moving said object rotates said object on an axis passing through said fixed position, and said fixed position is on the face of said object, thereby to pass said one component over a circular track on said face while the other component is reflected from a point at the center of the track, thereby to produce a signal that is an absolute measurement of the profile of said surface along said circular track.

14. Apparatus as defined in claims 13, including means for initially adjusting the phase of said reflected frequency difference to coincide with said reference phase.

15. Apparatus as defined by claim 14, wherein said means for initially adjusting the phase of said reflected frequency difference with said reference phase includes means for placing said components into a fixed circularly and oppositely polarized form, a half-wave plate in the path of said circularly polarized components, said half-wave plate being capable of having its optic axis rotated through an angle for shifting the phase of said circularly polarized components as a function of said angle, a first polarizer in the path of said circularly polarized and phase shifted components from said half-wave plate, means for detecting the light passed by said first polarizer to produce a signal having a phase that depends on the orientation of said half-wave plate, a second polarizer in the path of said reflected components, means for detecting the light passed by said second polarizer to produce a signal having a phase that depends upon the phase of the frequency difference of said reflected components, and means for comparing the phase of the two signals thus produced, whereby said half-wave plate may be rotated to a position required to bring said two signals into phase.