Capacitive pressure sensor
First Claim
Patent Images
1. A capacitive pressure sensor comprising:
- A. a diaphragm having an electrically conductive central portion,B. a rigid concave base member extending about a first central axis, and having rim lying in a first plane, said first plane being perpendicular to said central axis, said base member including a flange extending from its rim,C. means for securing the periphery of said diaphragm to said flange whereby said diaphragm periphery lies substantially in said plane,D. base support member extending along said central axis through and coupled to the center of said base member substantially at said center axis,E. first electrode fixedly coupled to said base support member and including a substantially planar conductive surface substantially parallel to and separated by a gap, d, from said diaphragm.
1 Assignment
0 Petitions
Accused Products
Abstract
A capacitive pressure sensor including a concave base member coupled to a central base support. The base member has a flange extending from its rim having a substantially planar surface. A conductive, deformable diaphragm is stretched across the flange and held by a clamping ring having a surface complementary to the flange. A substantially planar electrode is positioned substantially parallel to and displaced by a predetermined distance from the diaphragm by an electrode support member coupled to the central base support.
-
Citations
35 Claims
-
1. A capacitive pressure sensor comprising:
-
A. a diaphragm having an electrically conductive central portion, B. a rigid concave base member extending about a first central axis, and having rim lying in a first plane, said first plane being perpendicular to said central axis, said base member including a flange extending from its rim, C. means for securing the periphery of said diaphragm to said flange whereby said diaphragm periphery lies substantially in said plane, D. base support member extending along said central axis through and coupled to the center of said base member substantially at said center axis, E. first electrode fixedly coupled to said base support member and including a substantially planar conductive surface substantially parallel to and separated by a gap, d, from said diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
-
-
24. A capacitive pressure sensor comprising:
-
diaphragm responsive to pressure and including a central electrically conductive portion, means for supporting said diaphragm, said supporting means being rigid and generally concave and including means adapted at its periphery for holding said diaphragm to create an enclosed volume, an elelectrode member having a substantially planar conductive portion and an insulating means for support, said electrode member disposed within said volume and fixedly positioned with respect to said supporting means, means for coupling said electrode support means to said concave member substantially at the center of said concave supporting member, whereby said conductive portion of said electrode member is substantially parallel to and spaced from said conductive portion of said diaphragm in capacitive relationship so that the capacitance associated with said conductive portions of said electrode and said diaphragm is substantially inversely proportional to the pressure differential across said diaphragm. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
-
Specification