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Capacitive pressure sensor

  • US 4,358,814 A
  • Filed: 10/27/1980
  • Issued: 11/09/1982
  • Est. Priority Date: 10/27/1980
  • Status: Expired due to Term
First Claim
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1. A capacitive pressure sensor comprising:

  • A. a diaphragm having an electrically conductive central portion,B. a rigid concave base member extending about a first central axis, and having rim lying in a first plane, said first plane being perpendicular to said central axis, said base member including a flange extending from its rim,C. means for securing the periphery of said diaphragm to said flange whereby said diaphragm periphery lies substantially in said plane,D. base support member extending along said central axis through and coupled to the center of said base member substantially at said center axis,E. first electrode fixedly coupled to said base support member and including a substantially planar conductive surface substantially parallel to and separated by a gap, d, from said diaphragm.

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