Encapsulated piezoelectric resonator device

• US 4,362,961 A
• Filed: 07/01/1980
• Issued: 12/07/1982
• Est. Priority Date: 07/06/1979
• Status: Expired due to Term

• Current Assignee: Ebauches SA A Republican Federation of Switzerland
• Original Assignee: Ebauches SA
• Inventors: Gerber, Karl-Heinz
• Primary Examiner(s): Grimley, A. T.
• Assistant Examiner(s): Rebsch, D. L.
• Application Number:
  US06/165,213
• Time in Patent Office: 889 Days
• Field of Search: 310/370, 310/367, 310/348, 310/344, 29/25.35
• US Class Current: 310/370
• CPC Class Codes: G04F 5/063 Constructional details
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/0595 the holder support and resonator being formed in one body
• CPC Class Codes: H03H 9/1035 the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

The invention relates to an encapsulated piezoelectric resonator device comprising an oscillating member having a quartz member and a frame integral with and surrounding the quartz member, the frame having two connecting faces, electrodes on the quartz member, and two cover members, each having a central depression defining a frame provided with a connecting face, each connecting face of the oscillating member being bonded with the connecting face of the cover member for sandwiching the oscillating member between the cover members.

The invention also relates to a method for manufacturing such an encapsulated piezoelectric resonator device comprising the steps of machining a quartz plate by photolithography for making at least one oscillating member, forming electrodes on the quartz member, making at least two cover members having central depressions defining their peripheral frames and bonding the oscillating member with two cover members by their frames.

Claims

1. An encapsulated piezoelectric resonator device comprising:

an oscillating member including a quartz member and a frame integral with and surrounding said quartz member, said frame having two connecting faces;

electrodes provided on said quartz member;

two cover members, each having a central depression defining a frame provided with a connecting face;

connecting layers covering said connecting faces for bonding and sandwiching said oscillating member between said cover members; and

conductor passages provided in at least one cover member and passing through said cover member;

said conductor passages being in electrical communication with said electrodes, said connecting layers having no contact with said electrodes and said conductor passages.

2. The device of claim 1, wherein at least one of the cover members is translucent.

3. The device according to claim 1, wherein at least one of the cover members is made of a material selected from the group consisting of glass, amorphous silica, quartz, sapphire and ceramic.

4. The device of claim 1, wherein the two cover members are substantially identical.

5. The device of claim 1, wherein said connecting layers are metal layers further comprising an intermediate layer of a metal with a low melting point interposed between said connecting layers.

6. The device of claim 1, wherein said connecting layers are made of fused glass.