Differential pressure measuring transducer assembly

• US 4,364,276 A
• Filed: 12/16/1980
• Issued: 12/21/1982
• Est. Priority Date: 12/19/1979
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Tanabe, Masanori, Shimizu, Yasushi, Matsuoka, Yoshitaka, Nemoto, Hideyuki, Shimazoe, Michitaka, Akahane, Ryozo
• Primary Examiner(s): WOODIEL, DONALD
• Application Number:
  US06/217,023
• Time in Patent Office: 735 Days
• Field of Search: 73/721, 73/727, 73/720, 73/726, 73/706, 73/708, 73/716
• US Class Current: 73/721
• CPC Class Codes: G01L 13/025 using diaphragms
• CPC Class Codes: G01L 19/0038 being part of the housing other details about the housing G01L19/14
• CPC Class Codes: G01L 19/0084 to the outside of the housing other details about the housing see G01L19/14
• CPC Class Codes: G01L 19/0645 using isolation membranes, specially adapted for protection
• CPC Class Codes: G01L 19/147 Details about the mounting of the sensor to support or covering means
• CPC Class Codes: G01L 9/0054 integral with a semiconducting diaphragm

Abstract

A differential pressure measuring transducer assembly including a measuring diaphragm formed of semiconductor material having gauge resistance elements on one surface thereof and a central boss area of large thickness and a peripheral support flange on the other surface thereof defining therebetween an annular portion of small thickness. The measuring diaphragm is attached at the peripheral support flange to a glass support member and a metallic support member formed with pressure conducting bores respectively communicating with each other. The metallic support member is formed of material having a Young'"'"'s modulus substantially equal to that of the measuring diaphragm.

Claims

1. A differential pressure measuring transducer assembly comprising:

a differential pressure measuring body having introduced thereinto two fluids differing from each other in pressure;

a measuring diaphragm formed of semiconductor material including a center boss area of large thickness, a peripheral support flange of large thickness and an annular strain producing portion of small thickness defined between the center boss area and the peripheral support flange and having gauge resistance elements arranged thereon;

a glass support member attached to the peripheral support flange of the measuring diaphragm;

a metallic support member mounted between the glass support member and the differential pressure measuring body;

pressure conducting passage means communicating with the glass support member and the metallic support member; and

means for applying the two fluids introduced into the differential pressure measuring body differentially to different side surfaces of the measuring diaphragm.

2. A transducer assembly as set forth in claim 1, wherein said center boss area of large thickness is smaller in thickness than said peripheral support flange, and a surface of said glass support member facing the measuring diaphragm is planar, to define a clearance between the center boss area of large thickness and the glass support member.

3. A transducer assembly as set forth in claim 1, wherein said glass support member has a thickness which is less than three times as great as the thickness of the measuring diaphragm.

4. A transducer assembly as set forth in claim 3, wherein said metallic support member has a diameter which is increased as the thickness of said glass support member is reduced.

5. A transducer assembly as set forth in claim 4, wherein said glass support member is in the form of a thin film, and said metallic support member has a diameter equal to that of the measuring diaphragm.

6. A transducer assembly as set forth in claim 1, wherein said glass support member is formed of borosilicate glass, and said metallic support member is formed of one alloy selected from the group consisting of an iron-nickel alloy and an iron-nickel-cobalt alloy.

7. A transducer assembly as set forth in claim 1, wherein a crystal surface of said measuring diaphragm is a {110} surface and said gauge resistance elements are arranged parallel to a <

111>

axis.

8. A transducer assembly as set forth in claim 1, wherein a crystal surface of said measuring diaphragm is a {211} surface and said gauge resistance elements are arranged parallel to a <

111>

axis.

9. A differential pressure measuring transducer assembly comprising:

a pressure receiving body;

two sealing diaphragms each disposed on one of opposite sides of said pressure receiving body to define a pressure receiving chamber for a high pressure fluid and a pressure receiving chamber for a low pressure fluid on the opposite sides of the pressure receiving body;

a center diaphragm disposed in the pressure receiving body to define two isolated chambers each communicating with one of said two pressure receiving chambers;

a measuring diaphragm formed of semiconductor material having gauge resistance elements disposed on one surface thereof and having on the other surface thereof a center boss area of large thickness and a peripheral support flange of large thickness defining therebetween an annular portion of small thickness;

a glass support member attached at one end portion thereof to the peripheral support flange of the measuring diaphragm on the other surface thereof, said glass support member being formed with a pressure conducting bore;

a metallic support member attached at one end portion thereof to the other end portion of the glass support member, said metallic support member being formed of a pressure conducting bore communicating with the pressure conducting bore in the glass support member;

a differential pressure measuring body having connected thereto said metal support member at the other end portion thereof;

a metallic connector connecting said pressure receiving body to said differential pressure measuring body and formed with a first pressure conducting bore and a second pressure conducting bore, said first pressure conducting bore communicating said the other surface of the measuring diaphragm with said one pressure receiving chamber and said second pressure conducting bore communicating said one surface of the measuring diaphragm with said the other pressure receiving chamber, through said glass support member and said metallic support member; and

a noncompressive fluid contained in said pressure receiving chambers, said separated chambers and said first and second pressure conducting bores.

10. A transducer assembly as set forth in claim 9, wherein said measuring diaphragm has aluminum wires on the surface thereof for taking out an output therethrough from the gauge resistance elements.

11. A transducer assembly as set forth in claim 10, wherein said aluminum wires extend from said center boss area of large thickness of the measuring diaphragm to said annular portion of small thickness thereof.