Metal/metal oxide coatings
First Claim
1. An article comprising a substrate having on at least one surface thereof a coating comprising at least two components of (a) metal and (b) metal oxide or metal sulfide or combinations thereof of between 15 A and 5×
- 104 A in thickness, said coating being characterized by having a composition which varies its proportions of said at least two components through a thickness of at least 15 A in a continuous manner, said variation in proportions being further characterized by the ratio of said components only increasing or only decreasing through the thickness of the coating.
1 Assignment
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Accused Products
Abstract
Most processes for the generation of metal oxide or metal sulfide films involved oxidation of existing metal layers or direct vapor deposition of the oxide or sulfide layer. These processes do not provide efficient control of film integrity, optical properties, and bonding. The use of a metal vapor deposition process in which a controlled amount of oxygen or sulfur containing gas or vapor is introduced into the metal vapor stream or portions enables formation of metal oxide or metal sulfide films with excellent control over the film properties.
47 Citations
12 Claims
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1. An article comprising a substrate having on at least one surface thereof a coating comprising at least two components of (a) metal and (b) metal oxide or metal sulfide or combinations thereof of between 15 A and 5×
- 104 A in thickness, said coating being characterized by having a composition which varies its proportions of said at least two components through a thickness of at least 15 A in a continuous manner, said variation in proportions being further characterized by the ratio of said components only increasing or only decreasing through the thickness of the coating.
- View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An article comprising a substrate having on at least one surface thereof a coating comprising at least two components of (a) metal and (b) metal oxide or metal sulfide or combinations thereof of between 15 A and 5×
- 104 A in thickness, said coating being characterized by having a composition which varies its proportions of said at least two components through a thickness of at least 15 A in a continuous manner, and said metal is selected from the group consisting of aluminum, nickel, titanium, zinc, tin, and mixtures thereof.
- View Dependent Claims (9, 10, 11, 12)
Specification