Multilayer photoresist process utilizing an absorbant dye

• US 4,370,405 A
• Filed: 03/30/1981
• Issued: 01/25/1983
• Est. Priority Date: 03/30/1981
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Company (HP Inc.)
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Liu, En-Den D., Chang, Mark S., O'Toole, Michael M.
• Primary Examiner(s): Downey, Mary F.
• Application Number:
  US06/248,927
• Time in Patent Office: 666 Days
• Field of Search: 430/311, 430/312, 430/313, 430/316, 430/326, 430/396, 156/643, 156/668, 156/661
• US Class Current: 430/312
• CPC Class Codes: G03F 7/094 Multilayer resist systems, e.g. planarising layers
• CPC Class Codes: H01L 21/30 Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 manufacture of electrodes thereon H01L21/28

Abstract

An improved photoetch technique is presented of the multilayer resist type wherein a thin top layer of resist and a thick planarizing layer are deposited on a substrate and the thin layer is exposed and developed to produce a patterned resist layer. The improvement involves dissolving a suitable dye in a layer between the thin top layer and the substrate. The dye is preferably selected to absorb light of the wavelengths used to expose the top layer but does not interfere with processing of the other layers.

Claims

1. An improved process of photoetching a substrate having surface topography, of the type wherein a first material is deposited over the substrate to produce a planarizing layer which is thick enough that it has a substantially planar top surface in spite of the underlying topography, a resist is deposited above the planarizing layer to form a resist layer thereby producing a multilayer substrate coating having the planarizing layer sandwiched between the substrate and the resist layer, the resist layer is exposed to light in a range in which the resist is sensitive, said light having been passed through a mask to expose only selected portions of the resist layer, the resist layer is developed to produce a pattern, and the layers of the substrate coating between the resist layer and the substrate are processed to replicate the pattern in such layers, the improvement comprising:

selecting a dye which strongly absorbs light at the wavelengths used to expose the resist layer; and

dissolving the dye in a layer which is sandwiched between the substrate and the resist layer.

2. A process as recited in claim 1 wherein the pattern of the resist layer is replicated in the layers between the resist layer and the substrate by plasma etch processing.

3. A process as recited in claim 1 or claim 2 wherein the layer in which the dye is absorbed is the planarizing layer.