Mask positioning carriage assembly
First Claim
1. A carriage assembly for positioning a selected mask from a plurality of masks adapted to be supported thereon between a substrate and a source comprisingan elongated mask support means includingmeans adapted for positioning each of said masks in a predetermined position relative to each other in a selected plane;
- means defining a guiding element and a supporting element;
means operatively coupled to and for transporting the elongated mask support means and masks supported thereby along a predetermined path and being adapted to position a selected mask at a working station between a substrate located in a plane substantially parallel to said selected plane and a source located in an opposed relation to a said substrate; and
means positioned along said predetermined path for movably engaging at a said working station said means for defining said guiding element and for directing movement thereof along a line of reference within said predetermined path, at least one of said means for defining said guiding element and said movably engaging means including means defining a recessed groove and the other of which defines a protruding lip which movably engage said recessed groove along said line of reference, said guiding element defining means and said movably engaging means being operative to confine movement of the guiding element to movement thereof along said line of reference; and
means for movably engaging at a said working station said means for defining said supporting element on a surface which affords unconstrained thermal expansion and contraction and distortion of said elongated mask support means in all directions including along said line of reference to minimize lateral variations in position of a said selected mask at a said working station, said transporting means being adapted to move said elongated mask support means including masks supported thereby along said predetermined path relative to a said substrate and a said source independent of unconstrained thermal expansion and contraction and distortion of said elongated mask support means while confining movement of the guiding element along said line of reference.
4 Assignments
0 Petitions
Accused Products
Abstract
A carriage assembly for positioning a selected mask from a plurality of masks between a substrate and a source wherein an elongated mask support means having an elongated mask supporting frame and including means for defining elements for guiding and supporting the elongated mask supporting frame, a plurality of apertures formed in the elongated mask supporting frame and which extends from the upper surface to the lower surface and wherein each aperture has a predetermined diameter and a preselected spacing between the centers thereof and which support a plurality of masks therein, a support roller having a bearing surface for engaging, guiding and dynamically supporting the elongated mask supporting frame through the guiding and supporting elements; a pair of central guide rollers each of which have an outer grooved recessed receiving surface for engaging, guiding and dynamically supporting the elongated mask supporting frame through the guiding and supporting elements and a loaded clamping roller having an outer side wall bearing surface for engaging and dynamically clamping the elongated mask supporting frame and which is in parallel alignment with the axis of the central guide rollers and permits the elongated mask supporting frame to be transported while the guiding and support elements engage the surfaces of the central guide rollers and clamping roller to provide the equivalent of a three point suspension and support system for the elongated mask support means wherein the clamping roller cooperates with the guide rollers to hold the elongated mask support means between the guide rollers and support roller is shown.
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Citations
22 Claims
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1. A carriage assembly for positioning a selected mask from a plurality of masks adapted to be supported thereon between a substrate and a source comprising
an elongated mask support means including means adapted for positioning each of said masks in a predetermined position relative to each other in a selected plane; -
means defining a guiding element and a supporting element; means operatively coupled to and for transporting the elongated mask support means and masks supported thereby along a predetermined path and being adapted to position a selected mask at a working station between a substrate located in a plane substantially parallel to said selected plane and a source located in an opposed relation to a said substrate; and means positioned along said predetermined path for movably engaging at a said working station said means for defining said guiding element and for directing movement thereof along a line of reference within said predetermined path, at least one of said means for defining said guiding element and said movably engaging means including means defining a recessed groove and the other of which defines a protruding lip which movably engage said recessed groove along said line of reference, said guiding element defining means and said movably engaging means being operative to confine movement of the guiding element to movement thereof along said line of reference; and means for movably engaging at a said working station said means for defining said supporting element on a surface which affords unconstrained thermal expansion and contraction and distortion of said elongated mask support means in all directions including along said line of reference to minimize lateral variations in position of a said selected mask at a said working station, said transporting means being adapted to move said elongated mask support means including masks supported thereby along said predetermined path relative to a said substrate and a said source independent of unconstrained thermal expansion and contraction and distortion of said elongated mask support means while confining movement of the guiding element along said line of reference. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A carriage assembly for positioning a selected mask from a plurality of masks adapted to be supported thereon between a substrate and a source comprising
an elongated mask supporting frame having an upper surface and a lower surface, a pair of spaced, parallel generally elongated sidewalls extending along the periphery of the upper surface of said elongated mask supporting frame to define a mask supporting upper surface and a pair of spaced, parallel generally elongated support rails extending along the periphery of the lower surface of said elongated mask supporting frame and in opposed alignment with said elongated sidewalls, said elongated mask supporting frame including means defining a plurality of apertures extending through the upper surface and lower surface thereof wherein each aperture has a predetermined diameter and a preselected spacing between the centers thereof, each of said apertures being adapted to have a said mask positioned therein; -
a support roller having an outer cylindrical rail bearing surface and selected axial length for engaging and dynamically rotatably supporting one of said pair of rails as said elongated mask supporting frame is conveyed along a path which is substantially parallel to the direction of elongation thereto, said support roller rotating about an axis which is substantially normal to the direction of elongation of said elongated mask supporting frame; and a pair of central guide rollers each of which have an outer grooved recessed rail receiving surface for engaging, guiding and dynamically supporting the other of said pair of rails as said elongated mask supporting frame is conveyed along a path which is substantially parallel to the direction of elongation of said elongated mask supporting frame, each of said central guide rollers rotating about an axis which is substantially normal to the direction of elongation of said elongated mask supporting frame and each of which is parallel to the axis of said support roller, each of said central guide rollers grooved recessed rail bearing surface being adapted to rotatably engage the other of said pair of rails to maintain the same in the recessed groove during conveyance of said elongated mask supporting frame. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification