Mask positioning carriage assembly

• US 4,373,470 A
• Filed: 02/09/1981
• Issued: 02/15/1983
• Est. Priority Date: 02/09/1981
• Status: Expired due to Fees

• Current Assignee: Applied Magnetics Corporation (Innovative Micro Technology Incorporated)
• Original Assignee: Applied Magnetics Corporation (Innovative Micro Technology Incorporated)
• Inventors: Martin, Richard T.
• Primary Examiner(s): Smith, John D.
• Assistant Examiner(s): Plantz, Bernard F.
• Application Number:
  US06/232,842
• Time in Patent Office: 736 Days
• Field of Search: 118/715, 118/720, 118/721, 118/729, 118/504, 118/505, 204/298, 204/192 M, 427/282
• US Class Current: 118/720
• CPC Class Codes: C23C 14/042 using masks

Abstract

A carriage assembly for positioning a selected mask from a plurality of masks between a substrate and a source wherein an elongated mask support means having an elongated mask supporting frame and including means for defining elements for guiding and supporting the elongated mask supporting frame, a plurality of apertures formed in the elongated mask supporting frame and which extends from the upper surface to the lower surface and wherein each aperture has a predetermined diameter and a preselected spacing between the centers thereof and which support a plurality of masks therein, a support roller having a bearing surface for engaging, guiding and dynamically supporting the elongated mask supporting frame through the guiding and supporting elements; a pair of central guide rollers each of which have an outer grooved recessed receiving surface for engaging, guiding and dynamically supporting the elongated mask supporting frame through the guiding and supporting elements and a loaded clamping roller having an outer side wall bearing surface for engaging and dynamically clamping the elongated mask supporting frame and which is in parallel alignment with the axis of the central guide rollers and permits the elongated mask supporting frame to be transported while the guiding and support elements engage the surfaces of the central guide rollers and clamping roller to provide the equivalent of a three point suspension and support system for the elongated mask support means wherein the clamping roller cooperates with the guide rollers to hold the elongated mask support means between the guide rollers and support roller is shown.

Claims

1. A carriage assembly for positioning a selected mask from a plurality of masks adapted to be supported thereon between a substrate and a source comprising

an elongated mask support means including

means adapted for positioning each of said masks in a predetermined position relative to each other in a selected plane;

means defining a guiding element and a supporting element;

means operatively coupled to and for transporting the elongated mask support means and masks supported thereby along a predetermined path and being adapted to position a selected mask at a working station between a substrate located in a plane substantially parallel to said selected plane and a source located in an opposed relation to a said substrate; and

means positioned along said predetermined path for movably engaging at a said working station said means for defining said guiding element and for directing movement thereof along a line of reference within said predetermined path, at least one of said means for defining said guiding element and said movably engaging means including means defining a recessed groove and the other of which defines a protruding lip which movably engage said recessed groove along said line of reference, said guiding element defining means and said movably engaging means being operative to confine movement of the guiding element to movement thereof along said line of reference; and

means for movably engaging at a said working station said means for defining said supporting element on a surface which affords unconstrained thermal expansion and contraction and distortion of said elongated mask support means in all directions including along said line of reference to minimize lateral variations in position of a said selected mask at a said working station, said transporting means being adapted to move said elongated mask support means including masks supported thereby along said predetermined path relative to a said substrate and a said source independent of unconstrained thermal expansion and contraction and distortion of said elongated mask support means while confining movement of the guiding element along said line of reference.

2. The carriage assembly of claim 1 wherein said elongated mask support means includes

an elongated member operatively coupled to said supporting means and having a plurality of spaced teeth located along one edge thereof and substantially parallel to said predetermined path, said elongated member being formed of a material having a coefficient of thermal expansion along said line of reference substantially equal to the coefficient of thermal expansion of the material forming said support means to maintain the number of teeth between the center line of each mask substantially the same independent of the amount of thermal expansion and contraction of the elongated mask support means;

and

said transporting means includes

a rotatable driving member positioned at a said working station having a predetermined number of teeth formed around the periphery thereof and positioned to moveably engage the teeth on said elongated member, said rotatable driving member and said elongated member being adapted to maintain driving engagement therebetween independent of the amount of thermal expansion and contraction of the elongated mask supporting means and of said elongated member along said line of reference to enable a predetermined number of turns of said rotatable driving means to transport said support means a predetermined number of mask positions along said line of reference.

3. The carriage assembly of claim 1 wherein said means for guiding and supporting said elongated supporting means include

a support roller for defining said linear surface for slideably rotatably supporting said supporting means as said elongated mask supporting means is conveyed along said predetermined path;

and

a pair of central guide rollers for engaging, guiding and dynamically supporting said supporting means as said elongated mask supporting means is conveyed along said predetermined path which is substantially parallel to the direction of elongation of said elongated mask supporting means.

4. The carriage assembly of claim 3 wherein said pair of central guide rollers includes means for defining a recessed groove in the periphery thereof.

5. The carriage assembly of claim 3 wherein said rotatable driving member is located in opposed alignment to the position of a said mask indexed to a working station between a substrate and a source and on the lateral center line of a said working station to insure that the lateral center line of a said mask will be indexed substantially at the lateral center of a said working station regardless of the dimensional variation in length of the elongated mask supporting frame due to thermal expansion and contraction and distortion.

6. The carriage assembly of claim 5 wherein the number of teeth on the periphery of said rotatable driving member and number of teeth on the elongated member are selected such that the ratio thereby between makes an integer number of rotations of the rotating member move the carriage assembly a predetermined number of mask positions.

7. The carriage assembly of claim 3 further comprising

a pair of remote guide rollers positioned one on each side of said central guide rollers and located along said line of reference and for engaging, guiding and dynamically supporting said elongated mask supporting means when it is located at a position other than its centered position, at least one of said central guide rollers, one of said remote guide rollers and said support roller cooperating with each other to form an equivalent three point support and suspension for said elongated mask supporting means as it is transported along said predetermined path.

8. The carriage assembly of claim 7 wherein said pair of remote rollers include means for defining a recessed groove in the periphery thereof.

9. The carriage assembly of claim 3 further comprising

a loaded clamping roller positioned to movably engage said elongated mask support means for providing a clamping force which urges said elongated mask supporting means towards said central guide rollers to form an equivalent three point support and suspension for said elongated mask supporting means as it is transported along said predetermined path.

10. The carriage assembly of claim 2 wherein said elongated mask supporting means mask positioning means includes

an elongated mask supporting frame having

an upper surface and a lower surface and a pair of spaced, parallel generally elongated sidewalls extending along the periphery of the upper surface of said elongated mask supporting frame to define a mask supporting upper surface

means defining a plurality of apertures extending through the upper surface and lower surface of said elongated mask supporting frame wherein each aperture has a predetermined diameter and the elongated member positions a predetermined number of teeth between the centers thereof, each of said apertures being adapted to have a said mask positioned therein;

and

wherein said means for defining the guiding surface and the supporting surface include

a pair of spaced, parallel generally elongated support rails extending along the periphery of the lower surface of said elongated mask supporting frame and in opposed alignment with said elongated sidewalls.

11. The carriage assembly for claim 3 further comprising

gantry means for withdrawing and positioning a said substrate relative to said elongated mask supporting means as the same is supported by said support roller and each of said guide rollers, said gantry means being adapted to withdraw a said substrate from an accurate aligned position relative to a selected mask in a working area and to withdraw a said substrate away from said elongated mask supporting means a sufficient distance to enable said teeth on the elongated member and teeth on said rotatable driving member to move said elongated mask supporting means to index a different one of said apertures having a said mask therein and to reposition said gantry means and said substrate at termination of the indexing of said elongated mask supporting means in accurate alignment with a different selected mask of said plurality of masks.

12. A carriage assembly for positioning a selected mask from a plurality of masks adapted to be supported thereon between a substrate and a source comprising

an elongated mask supporting frame having an upper surface and a lower surface, a pair of spaced, parallel generally elongated sidewalls extending along the periphery of the upper surface of said elongated mask supporting frame to define a mask supporting upper surface and a pair of spaced, parallel generally elongated support rails extending along the periphery of the lower surface of said elongated mask supporting frame and in opposed alignment with said elongated sidewalls, said elongated mask supporting frame including means defining a plurality of apertures extending through the upper surface and lower surface thereof wherein each aperture has a predetermined diameter and a preselected spacing between the centers thereof, each of said apertures being adapted to have a said mask positioned therein;

a support roller having an outer cylindrical rail bearing surface and selected axial length for engaging and dynamically rotatably supporting one of said pair of rails as said elongated mask supporting frame is conveyed along a path which is substantially parallel to the direction of elongation thereto, said support roller rotating about an axis which is substantially normal to the direction of elongation of said elongated mask supporting frame; and

a pair of central guide rollers each of which have an outer grooved recessed rail receiving surface for engaging, guiding and dynamically supporting the other of said pair of rails as said elongated mask supporting frame is conveyed along a path which is substantially parallel to the direction of elongation of said elongated mask supporting frame, each of said central guide rollers rotating about an axis which is substantially normal to the direction of elongation of said elongated mask supporting frame and each of which is parallel to the axis of said support roller, each of said central guide rollers grooved recessed rail bearing surface being adapted to rotatably engage the other of said pair of rails to maintain the same in the recessed groove during conveyance of said elongated mask supporting frame.

13. The carriage assembly of claim 12 further comprising

a loaded clamping roller having an outer cylindrical sidewall bearing surface for engaging and dynamically clamping the one sidewall opposite to said other of said pair of rails as said elongated mask supporting frame is conveyed along a path which is substantially parallel to the direction of elongation of said elongated mask supporting frame, said loaded clamping roller being adapted to rotate about an axis which is substantially normal to the direction of elongation of said elongated mask supporting frame and being spaced in parallel alignment with the axis of said central guide rollers and located above and intermediate the axis of each of said central guide rollers, said loaded clamping roller being spaced above the center of the recessed grooves formed in the periphery of each of said central guide rollers with said loaded clamping roller in moveable engagement with the edge of said one sidewall to hold said elongated mask supporting frame in fixed position within the said recessed groove and inhibit separation of the elongated mask supporting frame from the central guide roller during conveyance of said elongated mask supporting frame relative to said support rollers and guide rollers;

and

said support roller and said central guide rollers providing an equivalent three point suspension and support for said elongated mask supporting frame as the same is conveyed along the direction of its elongation and with said loaded clamping roller cooperating with said central guide rollers to hold the edge of said other of said pair of rails fixed within said recessed groove of each of said central guide rollers while enabling the edge of said one of said pair of rails to move laterally on the outer cylindrical bearing surface of the support roller during conveyance of said elongated mask supporting frame.

14. The carriage assembly of claim 12 further comprising

a pair of remote guide rollers positioned one on each side of said central guide rollers and located along said path and having recessed grooves for engaging, guiding and dynamically supporting said elongated mask supporting frame when it is located at a position other than its centered position, said central guide rollers, one or the other of said remote guide rollers and said support roller cooperating with each other to form an equivalent three point support and suspension for said elongated mask supporting frame as it is transported along said path.

15. The carriage assembly of claim 12 wherein said elongated mask supporting frame includes

a translatably supported tooth rack operatively coupled to said elongated mask supporting frame and havng a plurality of spaced teeth located along one edge thereof and substantially parallel to said predetermined path, said translatably supported tooth rack being formed of a material having a coefficient of thermal expansion along said line of reference substantially equal to the coefficient of thermal expansion of the material forming said elongated mask supporting frame to maintain the number of teeth between the center line of each mask, substantially the same independent of the amount of thermal expansion and contraction and distortion of the elongated mask supporting frame;

and

a rotatable driving member having a predetermined number of teeth formed around the periphery thereof and positioned to movably engage the teeth on said translatably supported tooth rack, said rotatable driving member and said translatably supported tooth rack being adapted to maintain driving engagement therebetween independent of the amount of thermal expansion and contraction and distortion of the elongated mask supporting frame and of said translateably supported tooth rack along said line of reference to enable a predetermined number of turns of said rotatable driving means to transport said support means a predetermined number of mask positions along said line of reference.

16. The carriage assembly of claim 15 wherein the translatably supported tooth rack has a preselected number of teeth between adjacent apertures and the number of teeth of the coupling gear is selected such that an integer number of revolutions or fraction of a revolution of the coupling gear transports the elongated mask supporting frame along its path a distance equal to the distance between the center lines of two adjacent apertures of the elongated mask supporting frame.

17. The carriage assembly for claim 15 further comprising

gantry means for withdrawing and positioning a said substrate relative to said elongated mask supporting frame as the same is supported by said support roller and each of said guide rollers, said gantry means being adapted to withdraw a said substrate from an accurate aligned position relative to a selected mask in a working area and to withdraw a said substrate away from said elongated mask supporting frame a sufficient distance to enable said translatably supported tooth rack and said coupling gear to move said elongated mask supporting frame to index a different one of said apertures having a said mask therein and to reposition said gantry means and said substrate at termination of the indexing of said elongated mask supporting frame in accurate alignment with a different selected mask of said plurality of the masks.

18. The carriage assembly of claim 13 further comprising

spring means operatively coupled to said loaded clamping rollers for urging said clamping rollers into contiguous engagement with said outer cylindrical sidewall bearing surface.

19. The carriage assembly of claim 13 further comprising

a pair of remote guide rollers positioned one on each side of said central guide rollers and located along said path and having recessed grooves for engaging, guiding and dynamically supporting said elongated mask supporting frame when it is located at a position other than its centered position, at least one of the said central guide rollers, one of said remote guide rollers and said support roller cooperating with each other to form an equivalent three point support and suspension for said elongated mask supporting frame as it is transported along said path.

20. The carriage assembly of claim 15 wherein said rotatable driving member is located in opposed alignment to the position of a said mask indexed to a working station between a substrate and a source and on the lateral center line of a said working station to insure that the lateral center line of a said mask will be indexed substantially at the lateral center of a said working station regardless of the dimensional variation in length of the elongated mask supporting frame due to thermal expansion and contraction and distortion.

21. The carriage assembly of claim 20 wherein the axes of said central guide rollers are located one on each side of and equidistantly to the lateral central line of a said working station.

22. The carriage assembly of claim 21 wherein the axis of the support roller is located on the lateral central line of a said working station and in a spaced opposed position relative to said rotatable driving member.