Mode coupled tuning fork type quartz crystal vibrator and method of tuning

• US 4,377,765 A
• Filed: 03/03/1981
• Issued: 03/22/1983
• Est. Priority Date: 03/04/1980
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Suwa Seikosha
• Original Assignee: Kabushiki Kaisha Suwa Seikosha
• Inventors: Momosaki, Eishi, Kogure, Shigeru, Inoue, Minoru
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US06/240,045
• Time in Patent Office: 749 Days
• Field of Search: 310/312, 310/370, 310/366, 310/365, 310/361, 29/25.35
• US Class Current: 310/312
• CPC Class Codes: H03H 9/215 consisting of quartz
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A mode coupled tuning fork type quartz crystal vibrator utilizing two different vibrational modes is provided. The vibrator includes at least one electrode on each tuning fork arm for adjusting the resonant frequency of the main vibration and an electrode for adjusting the frequency-temperature characteristic of the vibrator. The main vibration is in the flexural mode (F₁) and the sub-vibration is in the torsional mode (T₀). The resonant frequency of the first overtone in the flextural mode is designated by f_F and the resonant frequency of the fundamental vibration in the torsional mode is denoted by f_T. The difference between f_F and f_T defined as Δf=f_F -f_T determines the frequency-temperature characteristics of the mode coupled vibrator.

The electrodes for adjusting f_F are substantially triangular in shape and the electrodes for adjusting f_T are substantially rectangular in shape. These electrodes are disposed at positions near the top of each tuning fork arm and on both principal surfaces of the vibrators. The resonant frequencies are adjusted by removing a portion of electrode material or adding a strip of metal to the electrode. Preselected oscillation frequency and frequency-temperature characteristics in the form of a cubic curve at ambient temperatures are obtained by first adjusting Δf to a preselected value Δf_O and then adjusting f_F to a preselected value f_F0 at the same time maintaining Δf at the value Δf₀.

Claims

1. A mode coupled quartz crystal vibrator coupling two different modes of vibration, comprising:

a quartz crystal plate cut in the shape of a tuning fork having a base region, two coplanar tuning fork arms extending from the base for vibrating in a main vibrational mode and a different second vibrational mode and having excitation electrodes on the principal surfaces of said plate;

first adjust electrode means for adjusting the resonant frequency of the main vibration; and

second adjust electrode means for adjusting the difference (Δ

f) between the resonant frequency of the main vibration and the resonant frequency of the sub-vibration for adjusting the frequency-temperature characteristics of the vibrator,

said first adjust and second adjust electrode means formed on the surface of the arms in the region near the top of the arms.

2. The mode coupled vibrator of claim 1, wherein the main vibrational mode is the flexural mode with the resonant frequency of the first overtone of the flexural mode designated f_F, and the secondary vibrational mode is the torsional mode with the resonant frequency of the fundamental vibration of the torsional mode is designated f_T.

3. The mode coupled vibrator of claim 2, wherein the first adjust electrode means for adjusting the resonant frequency of the main vibration includes a first electrode film which does not extend across the full width of the tuning fork arms along the length of the vibrator and is disposed on both principal planar surfaces of each arm.

4. The mode coupled vibrator of claim 3, wherein the first adjust electrode film is an inverted substantially triangular electrode with the vertex of the triangle facing the vibrator base and is disposed at the top of each arm.

5. The mode coupled vibrator of claim 2, wherein the second adjust electrode means for adjusting Δ

f is substantially rectangular electrode and is disposed on both principal planar surfaces of each arm.

6. The mode coupled vibrator of claim 2, wherein the first adjust electrode means is an inverted substantially triangular electrode disposed at a position from 0 to 0.2 from the top of the tuning fork arms and the second adjust electrode means includes rectangular electrodes disposed at a position from 0.1 to 0.4 from the top of the tuning fork arms, said arms having a length of 1.0 and said electrodes disposed on both principal surfaces of each arm.

7. The mode coupled vibrator of claim 6, wherein a portion of each triangular electrode is removed for adjusting the frequency-temperature characteristics and the oscillation frequency of the vibrator.

8. The mode coupled vibrator of claim 7, wherein the electrode portions are removed by applying a laser beam to the electrode.

9. The mode coupled vibrator of claim 6, further including an additional strip of metal film deposited on each triangular electrode and each rectangular electrode for adjusting the frequency-temperature characteristics and the oscillation frequency of the vibrator.

10. The mode coupled vibrator of claim 6, wherein a portion of one of eah triangular electrode and each rectangular electrode have been removed by a applying a laser beam to the electrodes for adjusting the frequency-temperature characteristics and the oscillation frequency of the vibrator.

11. The mode coupled vibrator of claim 6, wherein one of each triangular electrode and each rectangular electrode are a thick deposit of metal film with a portion of said one of the electrodes having been removed by applying a laser beam thereto, and further including an additional strip of metal film deposited on the other electrodes for adjusting the frequency-temperature characteristics and the oscillation frequency of the vibrator.

12. The mode coupled vibrator of claim 6, wherein both the triangular electrodes and rectangular electrodes are thick deposits of metal film and a portion of each of the triangular electrodes and each of the rectangular electrodes have been removed by applying a laser beam thereto for adjusting the frequency-temperature characteristics and the oscillation frequency of a vibrator.

13. A mode coupled vibrator of claims 7, 9, 10, 11 or 12, wherein each of the electrode portions removed and the additional strips of metal film added to the adjust electrodes are traverse to the length of the tuning fork arm and extend across the width of the electrode.

14. The mode coupled vibrator of claim 3, wherein the first adjust electrode means is in the form of a circle formed in a position between 0.1 and 0.2 from the top of a tuning fork arm, said arm having a length of 1.0, said circle not extending across the full width of the tuning fork arms.

15. The mode coupled vibrator of claim 2, wherein the first adjust electrode means for adjusting f_F includes electrodes for roughly adjusting f_F disposed at a position from 0.3 to 0.5 from the top of the tuning fork arms and substantially triangular electrodes for finely adjusting f_F disposed at a position from 0 to 0.2 from the top of the tuning fork arms, and the second adjust electrode means includes rectangular electrodes disposed at a position from 0.1 to 0.4 from the top of the tuning fork arms, said arms having a length of 1.0 and said electrodes disposition both principal surfaces of each arm.

16. The mode coupled vibrator of claim 15, wherein said rectangular electrodes for roughly adjusting f_F extend across the full width of the tuning fork and the vertex of said triangular electrodes face the turning fork arms.

17. A mode coupled quartz crystal vibrator coupling two different modes of vibration, comprising:

a quartz crystal plate cut in the shape of a tuning fork having a base region and two coplanar tuning fork arms extending from the base for vibrating in a first flexural mode of vibration (F₁) and a secondary torsional mode of vibration (T₀), said vibrator utilizing the first overtone of the flexural mode and the fundamental vibration of the torsional mode and having excitation electrodes on both principal surfaces of said plate;

first adjust electrode means for adjusting f_F, the resonant frequency of the main vibration; and

one of second adjust electrode means for adjuting Δ

f, the difference between the resonant frequency of the main vibration f_F and the resonant frequency of the secondary vibration f_T designated Δ

f=f_F -f_T and third adjust electrode means for adjusting R=f_T /f_F, wherein f_F and f_T are the resonant frequencies at 20°

C., for adjusting the frequency-temperature characteristics of the vibrator,

said first electrode means and one of said second and third adjust electrode means are formed in the region near the top of the tuning fork arms.

18. The mode coupled vibrator of claim 17, wherein the first electrode means for adjusting f_F includes substantially triangular electrodes for finely adjusting f_F disposed in the region from 0 to 0.2 from the top of the tuning fork arm and electrodes for roughly adjusting f_F in the region f 0.3 to 0.5 from the top of the tuning fork arm, the second adjust electrode means for adjusting Δ

f and the third adjust electrode means for adjusting R include electrodes disposed in the region of from 0.1 to 0.4 from the top of the tuning fork arm, said arms having a length of 1.0 and said electrodes being disposed on both principal surfaces of each arm.

19. The mode coupled vibrator of claim 18, wherein each triangular electrode is formed with the vertex facing the vibrator base.

20. The mode coupled vibrator of claim 17, wherein the first adjust electrode means for adjusting f_F includes electrodes for roughly adjusting f_F disposed on the turning fork arm in the region from 0 to 0.2 from the top of the tuning fork arm and substantially triangular electrodes for finely adjusting f_F in the region from 0.2 to 0.5 from the top of the tuning fork arm and the second adjust electrode means for adjusting Δ

f and the third electrode means for adjusting R includes electrodes in the region of from 0.1 to 0.4 from the top of the tuning fork arms, said arm having a length of 1.0 and said electrodes disposed on both principal surfaces of each arm.

21. The mode coupled vibrator of claim 20, wherein each triangular electrode is formed with the vertex facing the top of the vibrator arms.

22. The mode coupled vibrator of claim 17, wherein the first adjust electrode means for adjusting f_F includes substantially triangular electrodes for finely adjusting f_F disposed in the region of from 0 to 0.2 from the top of the tuning fork arm, and the second adjust electrode means for adjusting Δ

f and the third adjust electrode means for adjusting R include electrodes disposed in the region of 0.1 to 0.5 from the top of the tuning fork arm, said arms having a length of 1.0 and said electrodes being disposed on both principal surfaces of each arm.

23. The mode coupled vibrator of claim 21, wherein each triangular electrode is formed with the vertex facing the vibrator base.

24. The mode coupled vibrator of claim 17, wherein the first adjust electrode means for adjusting f_F includes substantially triangular electrodes for finely adjusting f_F disposed in the region of from 0.2 to 0.5 from the top of the tuning fork arms, and the second adjust electrode means for adjusting Δ

f and the third adjust electrode means for adjusting R including electrodes disposed in the region of from 0.1 to 0.4 from the top of the tuning fork arms, said arms having a length of 1.0 and said electrodes being disposed on both principal surfaces of each arm.

25. The mode coupled vibrator of claim 23, wherein each triangular electrode is formed with the vertex facing the top of the vibrator arms.

26. The mode coupled vibrator of claim 17, wherein the first adjust electrode means for adjusting f_F includes substantially triangular electrodes for finely adjusting f_F disposed in the region of from 0 to 0.2 and in the region from 0.2 to 0.5 from the top of the tuning fork arms, and the second adjust electrode means for adjusting Δ

f and the third adjust electrode means for adjusting R are disposed in the range of from 0.1 to 0.4 from the top of the tuning fork arm, said arms having the length of 1.0 and said electrodes being disposed on both principal surfaces of each said arm.

27. The mode coupled vibrator of claim 26, wherein each triangular electrode disposed in the region from 0 to 0.2 is formed with the vertex facing the vibrator base and each triangular electrode disposed in the region from 0.2 to 0.5 is formed with the vertex facing the top of the vibrator arms.

28. The mode coupled vibrators of claims 17, 18, 22 and 26 wherein the triangular electrode for finely adjusting f_F disposed in the range of from 0 to 0.2 from the top of the tuning fork arm include oblique lines intersecting a line across the width direction of the tuning fork arm between about 30°

and 80°

.

29. The mode coupled vibrator of claims 17, 20, 24 or 26, wherein the triangular electrodes for finely adjusting f_F disposed in the range of from 0.2 to 0.5 from the top of the tuning fork arm include oblique lines which intersect a line drawn across the width direction of the tuning fork arm at an angle between about 30°

and 80°

.

30. A method for forming a mode coupled tuning fork type quartz crystal vibration having two opposed principal planar surfaces, said vibrator coupling two different modes of vibration, the main vibration mode being the flexural mode (f₁) with the resonant frequency of the first overtone of the flexural mode being designated f_F, and the sub-vibrational mode being the torsional mode (T₀), the resonant frequency of the fundamental vibration of the torsional mode being designated f_T, comprising:

forming first adjust electrode means for adjusting f_F, by disposing first adjust electrodes at the region at the top of the tuning form arms and on both principal surfaces of the vibrator, said electrodes formed so as not to extend across the full width of the arms along the length of the electrode; and

forming second adjust electrode means for adjusting Δ

f=f_F -f_T for adjusting the frequency-temperature characteristics of the vibrator, by disposing second adjust electrodes at the region of the top of the tuning fork arms, and electrodes formed on both principal surfaces of the vibrator.

31. The method of claim 30, including the step of forming the first adjust electrode in the shape of an substantially triangular electrode with the vertex of the triangle facing the vibrator base and disposing the triangular electrode at the top of the tuning fork arms.

32. The method of claim 31, including the steps of:

adjusting the frequency-temperature characteristics and the oscillation frequency of the vibrator by one of the steps of removing a strip of electrode material and depositing a strip of metal from each second adjust electrode so that Δ

f is adjusted to a preselected value Δ

f₀ ; and

adjusting f_F to a preselected value f_F0 at the same time maintaining Δ

f at the preselected value Δ

f₀ by one of the steps of removing a strip of electrode material from and depositing a metal strip on the first adjust electrodes for adjusting f_F.

33. A method for forming a mode coupled tuning fork type quartz crystal vibrator having two opposed principal planar surfaces, said vibrator coupling two different modes of vibration, the main vibration being the flexural mode (F₁) with the resonant frequency of the first overtone of the flexural mode being designated f_F, and the sub-vibrational mode being the torsional mode (T₀), the resonant frequency of the fundamental vibration of the torsional mode being designated f_T, comprising:

forming first adjust electrode means for adjusting f_F by disposing electrodes having a substantially triangular shape for finely adjusting f_F and substantially rectangular electrodes roughly adjusting f_F at the region of the top of the tuning fork arms on both principal surfaces of each arm;

forming second adjust electrode means for adjusting one of Δ

f=f_F -f_T and R=f_F /f_T, (f_F and f_T being the resonant frequencies at 20°

C.), by disposing substantially rectangular electrodes at the region of the top of the tuning fork arms on both principal surfaces of each arm,

roughly adjusting f_F by one of the steps of removing a strip of electrode material from and adding a strip of metal to each rectangular electrode for roughly adjusting f_F to a value of about 100 ppm lower than a preselected frequency f_F0 ;

adjusting one of Δ

f and R by one of the steps of removing a strip of electrode material from and adding a strip of metal to each rectangular electrode for adjusting Δ

f so that Δ

f is adjusted to a preselected value Δ

f₀ ; and

finely adjusting f_F to the preselected value f_F0 and at the same time maintaining Δ

f at the preselected value Δ

f₀ by one of the steps of removing a strip of electrode material from and adding a strip of electrode material to each triangular electrode for finely adjusting f_F.