Scanning contaminant and defect detector

• US 4,378,159 A
• Filed: 03/30/1981
• Issued: 03/29/1983
• Est. Priority Date: 03/30/1981
• Status: Expired due to Term

• Current Assignee: Tencor Instruments (KLA Corporation)
• Original Assignee: Tencor Instruments (KLA Corporation)
• Inventors: Galbraith, Lee K.
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): Koren, Matthew W.
• Application Number:
  US06/249,226
• Time in Patent Office: 729 Days
• Field of Search: 356/236, 356/237, 356/430, 356/431, 356/446, 250/562, 250/563, 250/571, 250/572
• US Class Current: 356/237.3
• CPC Class Codes: G01N 21/8901 Optical details; Scanning details per se G02B
• CPC Class Codes: G01N 21/94 Investigating contamination, e.g. dust G01N21/85 takes precedence

Abstract

A scanning laser contaminant and defect detector for reflective surfaces, having a light collector for increasing sensitivity to scattered light. The collector is preferably one quadrant of a spherical shell cradled between V-shaped reflective side walls. The collector has beam entrance and exit ports, as well as a detector port where a light detector resides. The collector is placed in proximity to a surface to be inspected. Light scattered from the test surface is directed to the reflective crown surface, then to the reflective side walls and ultimately to the detector.

Claims

1. Apparatus for detecting contaminants and defects on a reflective test surface comprising,

a light source capable of generating a narrow beam,

optical means for directing the beam toward a test surface to be inspected,

a support holding the surface,

scanning means for sweeping the beam in a path across the test surface,

a light collector disposed over the test surface and having a beam entrance port, means for directing the beam onto the test surface and a detector port spaced apart from the beam entrance port, said collector comprising a sector of an internally diffusely reflecting spherical shell, said shell cradled between specularly reflective, flat converging side walls, said shell having a crown region, and

light detection means mounted in the detector port for detecting increases in light scattering gathered by the light collector.

2. Apparatus for detecting contaminants and defects on a reflective test surface comprising,

a light source capable of generating a narrow beam,

optical means for directing the beam toward a test surface to be inspected,

a support holding the surface,

scanning means for sweeping the beam in a path across the test surface,

a light collector disposed over the test surface and having a beam entrance port, a beam exit port over the test surface and a detector port making an acute angle with the beam entrance port relative to the test surface, said collector comprising a sector of an internally diffusely reflecting spherical shell, said shell cradled between specularly reflective, flat converging side walls, said shell having a crown region wherein said beam entrance port is defined, the beam exit port being defined in a gap between the converging side walls with the beam exit port optically aligned with the beam entrance port along the beam path, and

light detection means mounted in the detector port for detecting increases in light scattering gathered by the light collector.

3. The apparatus of claim 2 wherein said side walls are V-shaped.

4. The apparatus of claim 3 wherein said V-shaped side walls are flat mirrors.

5. The apparatus of claim 2 wherein said support is a wafer conveyor belt.

6. The apparatus of claim 2 wherein the side of said shell facing said side walls has a reflective coating.

7. Apparatus for detecting contaminants and defects on a reflective test surface comprising,

a lower compartment housing a laser beam source, said lower compartment having a roof supporting an article conveyor belt for test surfaces, and

an upper compartment directly over the lower compartment, the upper compartment communicating with the lower compartment through a passage for receiving the laser beam, the upper compartment having:

(i) optical means for directing the beam to be normally incident to a reflective test surface on the article conveyor belt,

(ii) scanning means for sweeping the beam in a path across the test surface,

(iii) an internally reflecting light collector disposed over the test surface, the light collector comprising a sector of an internally reflecting spherical shell, said shell cradled between reflective, flat converging side walls, said shell having a crown region defining a beam entrance port and a detector port making an acute angle with the beam entrance port relative to the test surface, the converging side walls of the shell having a linear gap at their region of convergence defining a beam exit port optically aligned with the beam entrance port along the beam path, and

(iv) light detection means mounted in the detector port at an acute angle relative to the beam for detecting increases in light scattering from the test surface, whereby the article conveyor advances a test surface as the beam sweeps across the test surface so that dirt on test surface will scatter light toward said light detection means.

8. The apparatus of claim 7 wherein said side walls are V-shaped.

9. The apparatus of claim 8 wherein said V-shaped side walls are flat mirrors.

10. The apparatus of claim 7 wherein said support is a wafer conveyor belt.

11. The apparatus of claim 7 wherein the side of said shell facing said side walls has a diffusely reflective coating.

12. The apparatus of claim 7 wherein said laser beam source is mounted transversely in said lower compartment.