Apparatus for maintaining adjustment of coincidence and relative phase relationship of light beams in an interferometer

• US 4,379,633 A
• Filed: 07/10/1981
• Issued: 04/12/1983
• Est. Priority Date: 08/06/1980
• Status: Expired due to Fees

• Current Assignee: Krautkramer-Branson Incorporated
• Original Assignee: Krautkramer-Branson Incorporated
• Inventors: Primbsch, Erik, Bickel, Wolf, Kaule, Walter
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): Koren, Matthew W.
• Application Number:
  US06/282,036
• Time in Patent Office: 641 Days
• Field of Search: 356/349, 356/359, 356/360, 73/653, 73/655, 73/656, 73/657
• US Class Current: 356/502
• CPC Class Codes: G01H 9/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
• CPC Class Codes: G01J 9/02 by interferometric methods using interferometers for measuring optically the linear dimensions of objects G01B9/02

Abstract

An apparatus for maintaining the adjustment of coincidence and relative phase relationship of light beams in an optical interferometer comprises the passing of a measuring light beam and of a control beam through substantially the same paths of the interferometer. Any change in optical alignment of interferometer components from a set condition is manifest as a change of the electrical signal produced by photoelectric sensing means which receive the control beam. The change of the electrical signal is processed by an electrical circuit and fed to one or more positioning means supporting an optical component of the interferometer for causing a repositioning of such component to thereby restore the set condition. In a typical embodiment, the component is a reflective surface mounted on a set of piezoelectric positioning means.

Claims

1. The method for automatically maintaining an adjustment of the coincidence and of the relative phase relationship of beams of light in the field of view of an interferometer in which beams of laser light are so delayed in time relative to one another over the different optical paths as to satisfy the interference condition required for producing an amplitude modulated signal from a measuring beam which has been frequency modulated by ultrasonic deformations manifest on a workpiece surface comprising:

illuminating the workpiece surface on which ultrasonic wave deformations are manifest with a beam of laser light and passing the light reflected at said workpiece surface as a measuring beam, frequency modulated by said deformations, to an optical interferometer;

separating a portion of said laser light from said laser beam before it is incident on the workpiece surface and passing said non-incident portion as a control beam to said interferometer;

causing said measuring beam and said control beam to traverse said interferometer through substantially the same optical paths;

sensing by means of first photoelectric means said measuring beam after it has traversed said interferometer and providing a corresponding amplitude modulated electrical signal;

disposing in the field of view plane of the control beam second photoelectric means which responsive to the control beam illumination thereupon provide an electrical control signal adapted to indicate a change of the alignment of the optical paths of the interferometer from a set condition, and

applying said control signal from said second photoelectric means to electromechanical positioning means supporting an optical component of the interferometer to cause a positioning adjustment of said optical component for restoring said set condition responsive to said control signal being indicative of such change.

2. The method as set forth in claim 1, said optical component comprising a light reflective surface disposed for reflecting said measuring beam and said control beam along their paths through said interferometer.

3. The method for automatically maintaining an adjustment of the coincidence and of the relative phase relationship of beams of light in the field of view of an interferometer in which beams of laser light are so delayed in time relative to one another over the different optical paths as to satisfy the interference condition required for producing an amplitude modulated signal from a beam which has been frequency modulated by ultrasonic deformations manifest on a workpiece surface comprising:

illuminating the workpiece surface on which ultrasonic wave deformations are manifest with a beam of laser light and passing the light reflected at said workpiece surface as a measuring beam, frequency modulated by said deformations, to an optical interferometer;

separating a portion of said laser light from said laser beam before it is incident on the workpiece surface and passing said non-incident portion as a control beam during control time intervals to said interferometer superposed on said measuring beam;

causing said measuring beam and said control beam to traverse said interferometer through substantially the same optical paths in the same direction;

sensing by means of first photoelectric means said measuring beam after it has traversed said interferometer and providing a corresponding amplitude modulated electrical signal;

disposing in the field of view plane of the control beam second photoelectric means which responsive to the control beam illumination thereupon provide an electrical control signal adapted to indicate a change of the alignment of the optical paths of the interferometer from a set condition, and

applying said control signal from said second photoelectric means to electromechanical positioning means supporting an optical component of the interferometer to cause a positioning adjustment of said optical component for restoring said set condition responsive to said control signal being indicative of such change.

4. The method as set forth in claim 3, said optical component comprising a light reflective surface disposed for reflecting said measuring beam and said control beam along their paths through said interferometer.

5. The method as set forth in claim 4, said control time intervals being produced by providing a first optical control means in the light path of said control beam before said beam is passed to said interferometer and controlling said optical control means to selectively block or pass said control beam to said interferometer, and providing a second optical control means in the light path of said control beam to said second photoelectric means for causing said second photoelectric means to receive illumination only when said first optical control means passes said control beam to said interferometer.

6. The method as set forth in claim 4, and providing respective optical control means in the path of said measuring beam and in the path of said control beam before said beams enter said interferometer, and providing additional optical control means in front of said first and of said second photoelectric means;

said control time intervals being established by controlling said respective optical control means in a manner inhibiting the measuring beam from entering said interferometer and inhibiting said first photoelectric means from receiving light responsive to said control beam while causing said control beam to enter said interferometer and causing said second photoelectric means to be responsive to the illumination from said control beam; and

establishing measuring time intervals, alternating with said control time intervals, during which said respective optical control means are controlled in a manner inhibiting the control beam from entering said interferometer and inhibiting said second photoelectric means from receiving light responsive to said measuring beam while causing said measuring beam to enter said interferometer and causing said first photoelectric means to be responsive to the illumination from said measuring beam.

7. The method for automatically maintaining an adjustment of the coincidence and of the relative phase relationship of beams of light in the field of view of an interferometer in which beams of laser light are so delayed in time relative to one another over the different optical paths as to satisfy the interference condition required for producing an amplitude modulated signal from a measuring beam which has been frequency modulated by ultrasonic deformations manifest on a workpiece surface comprising:

illuminating the workpiece surface on which ultrasonic wave deformations are manifest with a beam of laser light and passing the light reflected at said workpiece surface as a measuring beam, frequency modulated by said deformations, to an optical interferometer;

separating a portion of said laser light from said laser beam before it is incident on the workpiece surface and passing said non-incident portion as a control beam to said interferometer;

causing said measuring beam and said control beam to traverse said interferometer through substantially the same optical paths but in opposite directions;

sensing by means of first photoelectric means said measuring beam after it has traversed said interferometer and providing a corresponding amplitude modulated electrical signal;

disposing in the field of view plane of the control beam second photoelectric means which responsive to the control beam illumination thereupon provide an electrical control signal adapted to indicate a change of the alignment of the optical paths of the interferometer from a set condition, and

applying said control signal from said second photoelectric means to electromechanical positioning means supporting an optical component of the interferometer to cause a positioning adjustment of said optical component for restoring said set condition responsive to said control signal being indicative of such change.

8. The method as set forth in claim 7, said interferometer being of the Mach-Zehnder type, said optical component comprising a light reflective surface disposed in said interferometer and reflecting said measuring beam and said control beam along their paths through said interferometer, and said positioning means comprising piezoelectric means supporting said optical component.

9. The method for automatically maintaining an adjustment of the coincidence and of the relative phase relationship of beams of light in the field of view of an interferometer in which beams of laser light are so delayed in time relative to one another over the different optical paths as to satisfy the interference condition required for producing an amplitude modulated signal from a measuring beam which has been frequency modulated by ultrasonic deformations manifest on a workpiece surface comprising:

illuminating the workpiece surface on which ultrasonic deformations are manifest with a beam of laser light;

providing a focussing lens for receiving the light reflected at the workpiece surface and passing the reflected light as a measuring beam, frequency modulated by said deformations, to an optical interferometer which includes focussing optical elements for processing divergent light rays, said focussing lens causing an intermediate image of the illuminated workpiece surface on a reflective surface disposed in said interferometer;

separating a portion of said laser beam before it is incident on the workpiece surface;

focussing said non-incident beam portion to cause it to have a focal point disposed in or in proximity to the principal plane of the focussing lens focussing said light reflected at said workpiece surface and causing said non-incident beam portion to become superposed on said measuring beam as a control beam at or in proximity to the focal point of said control beam;

causing said measuring beam and said control beam to traverse said interferometer through substantially the same optical paths;

sensing by means of first photoelectric means said measuring beam after it has traversed said interferometer and providing a corresponding amplitude modulated electrical signal usable for measuring said deformations;

disposing in front of said first photoelectric means an optical element for separating said control beam from said measuring beam;

transmitting said separated control beam to second photoelectric means disposed in the field of view plane of the control beam and said second photoelectric means responsive to the illumination thereupon by said control beam providing an electrical control signal adapted to indicate a change of the alignment of the optical paths of the interferometer from a set condition, and

applying said control signal from said second photoelectric means to electromechanical positioning means supporting an optical component of the interferometer to cause a positioning adjustment of said optical component for restoring said set condition responsive to said control signal being indicative of such change.

10. The method as set forth in claim 9, said intermediate image being formed on a plane reflective surface disposed in said interferometer.

11. The method as set forth in claim 9, said intermediate image being formed on a concave reflective surface disposed in said interferometer.

12. An apparatus for automatically maintaining an adjustment of the coincidence and of the relative phase relationship of beams of light in the first of view of an interferometer in which beams of laser light are so delayed in time relative to one another over different optical paths as to satisfy the interference condition required for producing an amplitude modulated signal from a measuring beam which has been frequency modulated by ultrasonic deformations manifest on a workpiece surface comprising:

a laser disposed for illuminating with a beam of laser light the workpiece surface on which ultrasonic wave deformations are manifest;

beam splitting means disposed in said beam of laser light for separating a portion of said laser light before it is incident upon said workpiece surface;

an optical interferometer disposed for receiving the laser light reflected on said workpiece surface as a measuring beam;

means disposed for receiving said separated laser light portion and superimposing it as a control beam on said measuring beam for causing said measuring beam and said control beam to traverse said interferometer along substantially the same paths;

first photoelectric means disposed for receiving said measuring beam after it has traversed said interferometer for providing a corresponding amplitude modulated electrical signal usable for measuring said deformations;

second photoelectric means disposed in the field of view plane of said control beam after said control beam has traversed said interferometer for providing an electrical control signal adapted to indicate a change of the alignment of the optical paths of the interferometer from a set condition;

electromechanical positioning means supporting at least one optical component forming a part of the optical paths of said interferometer, and

means for causing said control signal to be effective upon said positioning means for providing a positioning adjustment of said optical component responsive to said control signal being indicative of a change of the optical paths from a set condition.

13. An apparatus as set forth in claim 12, said optical component forming a part of the optical paths of said interferometer comprising a light reflective surface disposed for reflecting said measuring beam and said control beam along their paths through said interferometer.

14. An apparatus as set forth in claim 13, said electromechanical positioning means comprising three piezoelectric elements supporting said reflective surface, and said control signal adapted to act upon one or more of said piezoelectric elements for causing a change of the length of the respective piezoelectric element controlled.

15. An apparatus as set forth in claim 13, said interferometer being of Michelson type and said means disposed for receiving said separated laser light causing said control beam to traverse said interferometer paths in the same direction as said measuring beam, and optical control means disposed in the path of said control beam for causing said control beam to be received by said interferometer only during predetermined control time intervals and said second photoelectric means receiving light only during said control time intervals.

16. An apparatus as set forth in claim 13, said interferometer being of the Michelson type and said means disposed for receiving said separated laser light causing said control beam to traverse said interferometer paths in the same direction as said measuring beam, and respective optical control means disposed in the path of said measuring beam and of said control beam for providing alternate measuring and control time intervals by causing during a measuring time interval said measuring beam to be received by said interferometer and said first photoelectric means to be responsive to the light from the measuring beam after traversing said interferometer while said control beam is blocked from being received by said interferometer and by said second photoelectric means being blocked from receiving light, and by causing during a control time interval said control beam to be received by said interferometer and said second photoelectric means to be responsive to the light from the control beam after traversing said interferometer while said measuring beam is blocked from being received by said interferometer and said first photoelectric means is blocked from receiving light.

17. An apparatus for automatically maintaining an adjustment of the coincidence and of the relative phase relationship of beams of light in the field of view of an interferometer in which beams of laser light are so delayed in time relative to one another over different optical paths as to satisfy the interference condition required for producing an amplitude modulated signal from a measuring beam which has been frequency modulated by ultrasonic deformations manifest on a workpiece surface comprising:

a laser disposed for illuminating with a beam of laser light the workpiece surface on which ultrasonic wave deformations are manifest;

beam splitting means disposed in said beam of laser light for separating a portion of said laser light before it is incident upon said workpiece surface;

an optical interferometer disposed for receiving the laser light reflected on said workpiece surface as a measuring beam;

means disposed for receiving said separated laser light portion and transmitting it as a control beam to said interferometer and causing said control beam to traverse said interferometer along substantially the same paths as said measuring beam but in opposite direction;

first photoelectric means disposed for receiving said measuring beam after it has traversed said interferometer for providing a corresponding amplitude modulated electrical signal usable for measuring said deformations;

second photoelectric means disposed in the field of view plane of said control beam after said control beam has traversed said interferometer for providing an electrical control signal adapted to indicate a change of the alignment of the optical paths of the interferometer from a set condition;

electromechanical positioning means supporting at least one optical component forming a part of the optical paths of said interferometer, and

means causing said control signal to be effective upon said positioning means for providing a positioning adjustment of said optical component responsive to said control signal being indicative of a change of the optical paths from a set condition.

18. An apparatus as set forth in claim 17, said interferometer being of the Mach-Zehnder type and including optical means for causing said measuring beam after traversing said interferometer to be transmitted only to said first photoelectric means and for causing said control beam after traversing said interferometer to be transmitted only to said second photoelectric means, and said optical component forming a part of the optical paths of said interferometer comprising a light reflective surface disposed for reflecting said measuring beam and said control beam along their respective paths through said interferometer.

19. An apparatus for automatically maintaining an adjustment of the coincidence and of the relative phase relationship of beams of light in the field of view of an interferometer in which beams of laser light are so delayed in time relative to one another over different optical paths as to satisfy the interference condition required for producing an amplitude modulated signal from a measuring beam which has been frequency modulated by ultrasonic deformations manifest on a workpiece surface comprising:

a laser disposed for illuminating with a beam of laser light the workpiece surface on which ultrasonic wave deformations are manifest;

beam splitting means disposed in said beam of laser light for separating a portion of said laser light before said light is incident upon said workpiece surface;

a first converging lens disposed for receiving the laser light reflected at the workpiece surface and transmitting said reflected light as a measuring beam to an interferometer;

optical means disposed for receiving said non-incident portion of laser light and bringing it to a focus at a focal point disposed in or in proximity to the principal plane of said first converging lens and transmitting said non-incident laser light portion as a control beam to said interferometer for causing said control beam to traverse said interferometer along substantially the same paths as said measuring beam;

intermediate image forming means disposed in said interferometer for receiving and reflecting said measuring beam and said control beam;

a second converging lens disposed in said interferometer for receiving said images from said intermediate image forming means;

first photoelectric means disposed for receiving said measuring beam after traversing said interferometer and said second converging lens for providing a corresponding amplitude modulated electrical signal usable for measuring said deformations;

said second converging lens causing said control beam to be focussed at a focal point disposed in front of said first photoelectric means;

beam deflecting means disposed substantially at said focal point in front of said first photoelectric means for separating said control beam from said measuring beam;

second photoelectric means disposed in the field of view plane of said control beam for receiving said control beam from said beam deflecting means and for providing an electrical control signal adapted to indicate a change of the alignment of the optical paths of the interferometer from a set condition;

electromechanical positioning means supporting at least one optical component forming a part of the optical paths of said interferometer, and

means causing said electrical control signal to be effective upon said positioning means for providing a positioning adjustment of said optical component responsive to said electrical control signal being indicative of a change of the optical paths of said interferometer from a set condition.

20. An apparatus as set forth in claim 19, said intermediate image forming means comprising a plane reflective surface.

21. An apparatus as set forth in claim 19, said intermediate image forming means comprising a concave reflective surface.