Capacitor pressure transducer with housing

• US 4,380,041 A
• Filed: 10/26/1981
• Issued: 04/12/1983
• Est. Priority Date: 09/25/1978
• Status: Expired due to Fees

• Current Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Ho, Roland K.
• Primary Examiner(s): Goldberg, Elliot A.
• Application Number:
  US06/314,811
• Time in Patent Office: 533 Days
• Field of Search: 361/283, 361/718, 361/724
• US Class Current: 361/283.4
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence

Abstract

An improved ceramic capacitive pressure transducer adaptable for use in automobiles is disclosed. The pressure transducer comprises a thin flexible diaphragm disc having a capacitor electrode deposited on it. A thick cylindrical base substrate has a top surface with a second capacitor electrode deposited thereon and the diaphragm is bonded to the top surface of the base substrate by an annular glass ring such that the first and second electrodes are separated from each other and face each other directly across an air gap. The diaphragm, the top surface of the base substrate and the annular glass ring form an internal cavity in which a reference vacuum is stored. In response to pressure changes outside of this cavity, the diaphragm will flex and thereby change the capacitance created by the first and second electrodes. The base substrate has an integral annular flange laterally extending with respect to and beyond the top surface of the base and located below the top surface and between the top and bottom surfaces. A sealing rubber O-ring is mounted on the flange and is used to sealingly mount the transducer to a housing wall without applying stress to the diaphram.

Claims

1. A pressure transducer assembly comprising:

a pressure transducer including,

base substrate means having a top surface with a peripheral portion and a bottom surface,

flexible diaphram means having a planar central portion and a surrounding peripheral portion along the perimeter of the diaphragm means,

mounting means for mounting said peripheral portion of said diaphragm means to said base substrate top surface peripheral portion, said mounting means, said diaphragm planar central portion and said substrate top surface generally forming an internal cavity, said diaphragm central portion being displaceable with respect to said top surface in response to pressure changes, wherein said internal cavity maintains a reference pressure and pressures applied exterior to said internal cavity cause said diaphragm means to flex and thereby alter electrical characteristics of said transducer in response to pressure changes, and

a flange means attached to said base substrate means and extending laterally with respect to and beyond said top surface peripheral portion and said peripheral portion of said diaphragm means, whereby said flange means forms a mounting ledge by which said transducer can be mounted without applying stress to said diaphragm means;

housing means for providing a substantially closed package for housing said pressure transducer within said housing means, said housing means having a wall to which said pressure transducer is to be mounted;

annular sealing means mounted on said flange means and positioned laterally beyond the perimeter of said diaphragm means; and

means mounting said annular sealing means and said pressure transducer to said wall, said annular sealing means contacting an interior surface of said wall and said flange means and sealing and forming an external cavity between said interior surface of said wall and said diaphragm means, said annular sealing means determining the spacing between said interior surface of said wall and said diaphragm means,

said wall having a hole therethrough extending into said internal cavity through which pressures are applied exterior to said interior cavity to cause said diaphragm means to flex and thereby alter electrical characteristics of said pressure transducer in response to pressure changes, said hole being substantially smaller than the lateral dimensions of said diaphragm means,

wherein said top surface peripheral portion of said base substrate means is planar, and

wherein said flange means is located below said plane of said peripheral portion of said base substrate means top surface and between said top and bottom surfaces of said base substrate means.

2. A pressure transducer assembly according to claim 1 wherein said flange means is an integral part of said base substrate means.

3. A pressure transducer assembly according to claim 1 wherein said peripheral portion of said base substrate top surface means is annular, said diaphragm means comprises a disc-shaped plate and said base substrate means, without said flange means, comprises a generally cylindrical substrate.

4. A pressure transducer assembly according to claim 3 wherein said flange means is an annular projection of said base substrate means.

5. A pressure transducer assembly according to claim 4 wherein said annular sealing means comprises an O-ring of elastic material.

6. A pressure transducer assembly according to claim 5 wherein said base substrate means has at least two through holes, an electrical lead passing through each of said through holes, and wherein said mounting means mounting said transducer and O-ring to said wall is mounted flush with said bottom surface and has through holes corresponding to said base substrate means holes for passing said leads therethrough, said same mounting means comprising a disc-shaped plate having lateral dimensions extending to at least the lateral dimensions of said flange means, and wherein said flange means has an upper surface portion on which said annular sealing means rests and a lower surface portion coplanar with said base substrate means bottom surface.

7. A pressure transducer according to claim 2 wherein said base substrate means and integral flange means are ceramic.

8. A pressure transducer assembly according to claim 7 wherein said housing wall is non-conductive plastic material.

9. A pressure transducer assembly according to claim 6 wherein said flange means is an integral part of said base substrate means.

10. A pressure transducer assembly according to claims 1, 2, 5, or 7 wherein said pressure transducer is a capacitive transducer having a first electrode on said top surface of said base substrate means and a second electrode on said diaphragm means, said second electrode separated from said first electrode by a gap forming a portion of said internal cavity.

11. A pressure transducer according to claim 5 wherein said O-ring, when resting on said flange means, extends from said flange means above and beyond said base substrate means top surface and said diaphragm means mounted on said base substrate means top surface.

12. A pressure transducer assembly according to claim 11 wherein said interior surface of said wall has substantially annular shoulders formed thereon and wherein said O-ring is received with these shoulders.