Elastic surface wave pressure gauge and pressure sensor for such a gauge

• US 4,382,386 A
• Filed: 09/25/1980
• Issued: 05/10/1983
• Est. Priority Date: 09/28/1979
• Status: Expired due to Term

• Current Assignee: Thomson-CSF (Thales SA)
• Original Assignee: Thomson-CSF (Thales SA)
• Inventors: Coussot, Gerard, Texier, Pierre
• Primary Examiner(s): Ciarlante, Anthony V.
• Assistant Examiner(s): Carlson, David U.
• Application Number:
  US06/190,893
• Time in Patent Office: 957 Days
• Field of Search: 29/833, 29/834, 310/313 R, 310/313 A, 310/313 B, 310/353, 310/348, 73/703, 73/654, 73/DIG. 4
• US Class Current: 73/703
• CPC Class Codes: G01L 19/0007 Fluidic connecting means
• CPC Class Codes: G01L 9/0025 with acoustic surface waves
• CPC Class Codes: Y10S 73/04 Piezoelectric

Abstract

The invention relates to elastic surface wave pressure gauges.

The gauge comprises a plate on which are located the electronic components of the gauge and a pressure sensor grouping the electromechanical elements on a header having connecting pins. The header is provided with a pressure inlet which traverses the plate.

The invention is also applicable to the measurement of the pressures of fluids in order to optimize the supply to internal combustion engines. The pressure inlet is made of a rigid metal header and separately grounded for shielding of the surface acoustic wave electrodes to prevent "pull-in" where the oscillators inadvertantly lock on the same frequency.

Claims

1. An elastic surface wave pressure gauge comprising:

a plug-in unit including two delay lines formed by interdigitated comb shaped transducer electrodes placed on a first main face of a piezoelectric wafer, the wafer resting by its second main face on the periphery of a chamber communicating with a pressure inlet, and

two amplifier circuits oscillating at two different frequencies, one amplifier being connected to each delay line, the difference between these two frequencies being detected by a mixer stage which supplies a measuring signal indicative of a pressure within said chamber,

the amplifier circuits and the mixture stage being mounted on a circuit board having a ground plane and provided with connections surrounding an orifice providing a passage for the pressure inlet,

the pressure inlet being being formed as part of the plug-in unit and being constituted by a metal pipe fixed to a rigid metal header, whose periphery is provided with pins which are inserted in said connections, the pins and metal pipe extending outwardly from the piezoelectric wafer, said header having a support for the piezoelectric wafer between the pins, this support having a central depression communicating with the pipe, the metal pipe and header being electrically connected with the ground plane of the board to provide electrical shielding for minimizing pull-in between the two amplifier circuits oscillating at different frequencies.

2. A gauge according to claim 1, wherein the circuit board is formed from a double faced laminate, the copper-coated face on the side for installing the components serving as said ground plane, while the other copper-coated face is etched so as to form the interconnections and also a connecting system permitting the board to be plugged on to a flat multipole connector.

3. A gauge according to claim 1, wherein the connections surrounding the board orifice are bushings permitting a disconnectable connection with the pins.

4. An elastic surface wave pressure sensor comprising:

a pressure inlet, a piezoelectric wafer provided with interdigitated comb-shaped transducer electrodes forming on one of its main faces two delay lines which are sensitive to deformations of the wafer and a wafer support having a cavity linking the other face of the wafer and the pressure inlet, wherein the support is a rigid metal header which is peripherally provided with connecting pins having extensions surrounding a central metal pipe fixed to the header by one of its faces, the metal pipe and pins extending outwardly from the piezoelectric wafer the other face of the header having a depression which is connected to the pipe, the wafer resting on the edge of the depression and between the extensions of the connecting pins the central metal pipe and header being adapted to provide, when interconnected with a circuit board including oscillator circuits for measuring the deformation of the wafer, electrical shielding for inhibiting a pull-in of said oscillator circuits.

5. A sensor according to claim 4, wherein the face of the wafer carrying the interdigitated comb transducer electrodes has positioning marks which must be positioned directly above the contour of the depression made in the header.

6. A sensor according to claim 4, wherein the piezoelectric wafer forms a quadrilateral and wherein the connecting pins of the header are arranged so as to be tangential thereto.

7. A sensor according to claim 4, wherein the header is a JEDEC TO 8 header.

8. A sensor according to claim 4, wherein the transducer comb electrodes form two parallel alignments oriented in an oblique manner relative to the edges of the piezoelectric wafer for dispersing spurious reflected waves to edges of the wafer rather than to an electrode.

9. A sensor according to claim 8, wherein the edges of the transducer electrodes defining the separation between the two alignments are interconnected and are connected to the header, a connecting pin of the header being electrically connected to the edges, the other pins which are insulated from the header are respectively connected to the other edges of the transducers.

10. A sensor according to claim 4, wherein the header has a peripheral shoulder, a protective cap being mounted and fixed to the shoulder.

11. A sensor according to claim 10, wherein the cap is sealed to the header.

12. A sensor according to claim 11, wherein a vacuum is formed beneath the cap, the piezoelectric wafer and the connecting pins being sealingly fixed to the header.

13. A sensor according to claim 10, wherein the cap is provided with a pressure balancing orifice.