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Capacitive pressure transducer

  • US 4,388,668 A
  • Filed: 12/03/1979
  • Issued: 06/14/1983
  • Est. Priority Date: 03/12/1976
  • Status: Expired due to Term
First Claim
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1. A pressure sensor for use over a predetermined pressure measurement range in environments subject to periodic high overload pressure comprising:

  • first and second ceramic insulating members having flat opposed surfaces, one of said members being relatively thin with respect to the other member and being flexible when exposed to pressure;

    a thin electrically conductive plate deposited on each of said insulating members flat opposed surfaces facing one another;

    means for establishing an open gap between said electrically conductive plates, said open gap ranging between 0.1 and 20 milinches, said means consisting of fused glass frit positioned around the marginal edge portion between said two members, said fused glass frit also hermetically sealing the space between said members to form a chamber;

    said frit and insulative members being substantially similar materials from the standpoint of coefficient of thermal expansion; and

    means including said members and said fused glass frit for permitting said electrically conductive plates to deflect toward one another without touching throughout said predetermined measurement range while allowing said plates to engage one another and bottom out under high overload pressure conditions, so that said pressure sensor is protected against impairment.

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