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Light exposure device and method

  • US 4,391,511 A
  • Filed: 03/18/1981
  • Issued: 07/05/1983
  • Est. Priority Date: 03/19/1980
  • Status: Expired due to Term
First Claim
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1. A device for exposing and printing a predetermined pattern on an exposure surface of a substrate, the device comprising:

  • measuring means for measuring a curvature of the exposed surface of said substrate,a chuck including a suction and holding means having a deformable member for drawing and holding a back surface of said substrate opposite to said exposure surface of said substrate, and deforming means for imparting a force to said deformable member and said back surface of said substrate to deform said substrate,control means for controlling said deforming means of said chuck in accordance with the curvature of said exposure surface of said substrate measured by said measuring means such that said exposure surface of said substrate conforms to an image surface of said pattern over an entire exposure area within a predetermined allowable error, andmeans for carrying and transporting said chuck in a substantially horizontal direction from a substrate deformation correcting station to an exposure station.

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