Light exposure device and method

• US 4,391,511 A
• Filed: 03/18/1981
• Issued: 07/05/1983
• Est. Priority Date: 03/19/1980
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Kembo, Yukio, Nomoto, Mineo, Akiyama, Nobuyuki, Aiuchi, Susumu, Nakagawa, Yasuo
• Primary Examiner(s): WINTERCORN, RICHARD
• Application Number:
  US06/245,193
• Time in Patent Office: 839 Days
• Field of Search: 355/47-49, 355/52, 355/73, 355/87, 355/91, 279/3, 269/21, 248/362, 425/DIG. 60, 356/371
• US Class Current: 355/40
• CPC Class Codes: G03F 7/24 Curved surfaces G03F7/70 takes precedence
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: Y10T 279/11 Vacuum

Abstract

A light exposure device and method for exposing and printing a predetermined pattern on an exposure surface of a substrate comprises measuring means for measuring curvature of the exposure surface of the substrate, a chuck including suck and hold means for sucking and holding a back surface of the substrate opposite to the exposure surface and deforming means for imparting a force to the back surface of the substrate to deform the substrate, and control means for controlling the deforming means of the chuck in accordance with the curvature of the exposure surface of the substrate measured by the measuring means such that the exposure surface of the substrate conforms to an image surface of the pattern over an entire exposure area within a predetermined allowable error.

Claims

1. A device for exposing and printing a predetermined pattern on an exposure surface of a substrate, the device comprising:

measuring means for measuring a curvature of the exposed surface of said substrate,

a chuck including a suction and holding means having a deformable member for drawing and holding a back surface of said substrate opposite to said exposure surface of said substrate, and deforming means for imparting a force to said deformable member and said back surface of said substrate to deform said substrate,

control means for controlling said deforming means of said chuck in accordance with the curvature of said exposure surface of said substrate measured by said measuring means such that said exposure surface of said substrate conforms to an image surface of said pattern over an entire exposure area within a predetermined allowable error, and

means for carrying and transporting said chuck in a substantially horizontal direction from a substrate deformation correcting station to an exposure station.

2. A device according to claim 1, wherein a plurality of said deforming means are arranged on the back side of said substrate within said chuck in any one of a line, point and rotational symmetrical relationship to a center of said substrate.

19. A device according to one of claims 1, 4, 10, or 12, further comprising a magazine means for accommodating a plurality of chucks, the means for carrying and transporting includes a chuck handling mechanism for selectively transferring the respective chucks between the magazine means and the chuck base, and means for controlling the transferring of the respective chucks to and from the base in dependence upon a shape of the substrate.

20. A device according to claim 19, wherein the chuck handling mechanism includes a pair of arms for releasably holding the respective chucks, and means for positioning said arms so as to enable the respective chucks to be removed from and replaced in the magazine means.

3. A device for exposing and printing a predetermined pattern on an exposure surface of a substrate, the device comprising:

measuring means for measuring a curvature of the exposure surface of said substrate, said measuring means is arranged at a substrate deformation correcting station,

a chuck including a suction and holding means for drawing and holding a back surface of said substrate opposite to said exposure surface of said substrate, and deforming means for imparting a force to said back surface of said substrate to deform said substrate,

control means for controlling said deforming means of said chuck in accordance with the curvature of said exposure surface of said substrate measured by said measuring means such that said exposure surface of said substrate conforms to an image surface of said pattern over an entire exposure area within a predetermined allowable error, and

a carriage means for carrying said chuck thereon, said carriage means being movable in a horizontal direction from said substrate deformation correcting station to an exposure station.

4. A device for exposing and printing a predetermined pattern on an exposure surface of a substrate, the device comprising:

measuring means for measuring a curvature of said exposure surface of said substrate,

a chuck including suction and holding means having a flexible plate disposed on a chuck surface to oppose a back surface of said substrate opposite to said exposure surface of said substrate to draw and hold a back surface of an entire exposure to draw and hold a back surface of an entire exposure area of said substrate to said flexible plate, a chuck body for supporting a periphery of the flexible plate, and deformation means for imparting a force to said flexible plate to deform said flexible plate thereby deforming said substrate drawn to and held by said suction and holding means, and

control means for controlling said deformation means of said chuck in accordance with the curvature of said exposure surface of said substrate measured by said measuring means such that said exposure surface of said substrate conforms to an image surface of said pattern over the entire exposure area within a predetermined allowable error.

5. A device according to claim 4 wherein said flexible plate is circular and the periphery of said flexible plate is fixed to the chuck body to form said chuck surface.

6. A device according to claim 5 wherein said suction and holding means has regularly arranged grooves formed on a suction and holding surface of said flexible plate, said grooves being connected to a vacuum source.

7. A device according to claim 4 wherein said flexible plate has a ring-shaped thin groove around a periphery thereof to increase a strain at the periphery of said flexible plate.

8. A device according to claim 4 or 5 wherein said deformation means includes a cylinder having a piston inserted therein, an end of an output shaft of said piston being fixed to the back surface of said flexible plate, and said control means has pressure control means for controlling fluid pressure supplied to said cylinder.

9. A device according to claim 8 wherein said piston is disposed at a center of said flexible plate.

11. A device according to claim 4 or 5, wherein said deforming means comprises a plurality of regularly arranged piezoelectric elements, a top end of said piezoelectric elements rotatably engaging with the back surface of said flexible plate through a point contact element, and means for urging said flexible plate into a close contact through the point contact element between the top end of the piezoelectric elements and the back surface of the flexible plate.

13. A device according to claim 4 or 5, wherein said deformation measuring device comprises a plurality of air micrometers.

17. A device according to claim 11, wherein said means for urging includes a tension spring arranged between the back surface of the thin plate and a lower end of said piezoelectric elements.

18. A device according to claim 4, further comprising chuck leveling means for rotating a base of the chuck to level a periphery of said exposure surface of said substrate to said image surface of said pattern.

22. A device according to claim 11, wherein said point contact element includes a ball.

23. A device according to claim 4, wherein said deformation means has an air chamber on a back surface of the flexible plate of said chuck body, and said control means includes a pressure controller means for controlling air pressure supplied to said air chamber.

10. A light exposure device for exposing and printing a predetermined pattern on an exposure surface of the substrate, comprising:

measuring means for measuring curvature of said exposure surface of said substrate,

a chuck including suck and hold means having a flexible thin film disposed on a chuck surface to oppose to a back surface of said substrate opposite to said exposure surface of said substrate to suck and hold said back surface of said substrate to said thin film and deformation means for imparting a force to said thin film to deform said thin film to thereby deform said substrate sucked to and held by said suck and hold means, said deformation means has a cylinder having a piston inserted therein, an end of an output shaft of said piston being fixed to the back surface of said thin film, said thin film having an air chamber on a back surface thereof, and

control means for controlling said deformation means of said chuck in accordance with the curvature of said exposure surface of said substrate measured by said measuring means such that said exposure surface of said substrate conforms to an image surface of said pattern over an entire exposure area within a predetermined allowable error, said control means has pressure control means for controlling fluid pressure supplied to said cylinder and a pressure controller for controlling air pressure supplied to said air chamber.

12. A device for exposing and printing a predetermined pattern on an exposure surface of a substrate, the device comprising:

measuring means for measuring a curvature of said exposure surface of said substrate, said measuring means is mounted on a base, at least three leveling pads are arranged on the base in opposition to the periphery of said exposure surface of said substrate,

a chuck including suction and holding means having a flexible plate disposed on a chuck surface to oppose a back surface of said substrate opposite to said exposure surface of said substrate to draw and hold said back surface of said substrate to said flexible plate, and deformation means for imparting a force to said flexible plate to deform said flexible plate thereby deforming said substrate drawn to and held by said suction and holding means, said chuck further includes a sphere or a spherical seat at a bottom thereof,

stage means for supporting said chuck, said stage means is adapted to be selectively raised and lowered and includes a spherical seat or a sphere at a top thereof, whereby when said stage means is raised, said stage means abuts against the periphery of said exposure surface of said substrate and said exposure surface of said substrate is rotated by said sphere of said spherical seat to level said exposure surface to said image surface of said pattern, and

control means for controlling said deformation means of said chuck in accordance with the curvature of said exposure surface of said substrate measured by said measuring means such that said exposure surface of said substrate conforms to an image surface of said pattern over an extire exposure area within a predetermined allowable error.

14. A device according to claim 12 wherein said deformation measuring means comprises a plurality of air micrometers with at least three of said air micrometers being disposed in close to said leveling pads.

21. A device according to one of claims 12 or 14, wherein said thin plate is circular and the periphery of said thin plate is fixed to the chuck body to form the chuck surface.

15. A method for exposing and printing a predetermined pattern on an exposure surface of a substrate, the method comprising the steps of:

interposing a thin flexible plate between a back surface of the substrate and a chuck means for holding the substrate,

drawing and holding the surface of the substrate to the thin flexible plate,

measuring a curvature of the exposure surface of the drawn and held substrate, and

imparting a force to the thin flexible plate so as to deform the thin flexible plate and substrate in accordance with the measured curvature of the exposure surface of the substrate, and

conforming the exposure surface of the substrate to an image surface of the pattern over an exposure area within a predetermined allowable error.

16. A method according to claim 15, further comprising the steps of moving the chuck means deformed into a desired shape to an exposure position, and

exposing and printing the predetermined pattern on the exposure surface of the substrate.