Structure with a silicon body having through openings

• US 4,393,127 A
• Filed: 07/17/1981
• Issued: 07/12/1983
• Est. Priority Date: 09/19/1980
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Greschner, Johann, Kraus, Georg, Schmid, Gerhard E.
• Primary Examiner(s): Brammer, Jack P.
• Application Number:
  US06/284,268
• Time in Patent Office: 725 Days
• Field of Search: 430/5, 430/966, 430/967, 526/644, 526/659.1, 428/138, 428/466, 250/503, 250/505
• US Class Current: 430/5
• CPC Class Codes: G03F 1/20 Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
• CPC Class Codes: H01L 29/0657 characterised by the shape of the body
• CPC Class Codes: Y10S 430/167 X-ray
• CPC Class Codes: Y10S 430/168 X-ray exposure process
• CPC Class Codes: Y10T 428/24331 including nonapertured component
• CPC Class Codes: Y10T 428/3171 With natural rubber next to second layer of natural rubber

Abstract

A structure for shaping or masking energetic radiation is described. The structure comprises a shallow silicon body having at least one through opening, and a metal silicide layer covering the surface of the structure. The structure characterized by having a high mechanical, and thermal stability may be used particularly in electron and X-ray lithography. More specifically, the structure may be used as an aperture for electron beams, or as a mask for X-rays. The production of the structure includes the steps of making through openings in the silicon body, and the forming of the silicide layer by vapor depositing a metal on the surface of the silicon body and by subsequent annealing.

Claims

1. A structure for modifying energetic radiation comprising a silicon body having a through hole defining a passage for said energetic radiation;

and a layer of heavy metal silicide covering the surface of said silicon body, whereby said metal silicide layer maintains good adherence to said silicon body under thermal stress, and said metal silicide layer absorbs said energetic radiation except in said defined passage by way of said through hole.

2. A structure for masking energetic radiation comprising:

a silicon body having a through hole defining a passage for said energetic radiation by way of said through hole; and

a layer of heavy metal silicide covering the surface of said silicon body;

whereby said metal silicide layer maintains good adherence to said silicon body under thermal stress, and said metal silicide layer absorbs said energetic radiation except in said defined passage by way of said through hole.

3. A structure as set forth in claim 2 wherein said silicon body has an array of through holes;

said structure is exposed to, and serves as a focusing grid for said energetic radiation.

4. A structure for masking energetic radiation as set forth in claim 2 wherein the metallic component of said layer of metal silicide has a high atomic number, and the metal silicide is of a high density.

5. A structure for masking energetic radiation as set forth in claim 2 wherein the metallic component of said metal silicide is selected from the group consisting of tungsten, molybdenum, tantalum, rhenium, niobium, eridium, platinum and palladium.

6. A structure for masking energetic radiation as set forth in claim 2 wherein said silicon body is a monocrystalline silicon wafer with (100) orientation.

7. A structure for masking energetic radiation as set forth in claim 6 wherein said through hole of said silicon body includes a square cross-section parallel to the surface of said silicon wafer, each of the sidewalls of said through hole forms an angle of approximately 54.7°

with the surface of said silicon wafer; and

said metal silicide layer covers the upper surface, and the lower surface of said silicon wafer, and the sidewalls of said through hole.

8. A structure as set forth in claim 7 wherein said silicon body has an array of through holes;

said structure is exposed to, and serves as a focusing grid for said energetic radiation.

9. A structure for masking energetic radiation comprising:

a silicon body having a tub-shaped through opening;

a thin layer being supported by one surface of said silicon body, said thin layer having a through hole within the region of said tub-shaped through opening of said silicon body and defining a passage for said energetic radiation by way of said through hole; and

a heavy silicide layer covering said thin layers;

whereby said metal silicide layer maintains good adherence to said silicon body under thermal stress, and said metal silicide layer absorbs said energetic radiation except in said defined passage by way of said through hole.

10. A structure as set forth in claim 9 wherein said thin layer is heavily doped, and said silicon body has a relatively low doping, each of the sidewalls of said tub-shaped through opening forms with the surface of said thin layer an angle of approximately 54.7°

, and said silicide layer covers both said thin layer and the sidewalls of said through hole.

11. A structure as set forth in claim 10 wherein a first layer transparent to X-rays is formed on the opposite surface of said silicon body covering also said through opening and said through hole.

12. A structure as set forth in claim 11 wherein a second layer transparent to X-ray is formed covering said first layer.

13. A structure as set forth in claim 12 wherein said first layer is silicon dioxide and said second layer is silicon nitride.