Transparent conductive film

• US 4,399,194 A
• Filed: 12/30/1981
• Issued: 08/16/1983
• Est. Priority Date: 12/30/1981
• Status: Expired due to Term

• Current Assignee: Intersil Corporation (Renesas Electronics Corporation)
• Original Assignee: RCA Corporation
• Inventors: Zelez, Joseph, Vossen, John L. Jr.
• Primary Examiner(s): HERBERT JR, THOMAS
• Application Number:
  US06/335,708
• Time in Patent Office: 594 Days
• Field of Search: 428/697, 428/702, 428/1, 428/433, 428/457, 428/450, 428/701, 428/469, 427/62, 427/87, 427/126.3
• US Class Current: 428/457
• CPC Class Codes: C03C 17/23 Oxides C03C17/02 takes precedence
• CPC Class Codes: C03C 17/245 by deposition from the vapour phase
• CPC Class Codes: C03C 2217/23 Mixtures
• CPC Class Codes: C03C 2218/152 by cvd
• CPC Class Codes: C03C 2218/154 by sputtering
• CPC Class Codes: C03C 2218/32 After-treatment
• CPC Class Codes: G02F 1/13439 characterised by their electrical, optical, physical properties; materials therefor; method of making
• CPC Class Codes: H01B 1/08 oxides
• CPC Class Codes: H01L 31/1884 Manufacture of transparent electrodes, e.g. TCO, ITO
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy
• CPC Class Codes: Y10T 428/31678 Of metal

Abstract

Transparent conductive films of indium oxide and zirconium oxide, methodology for annealing them and an etchant therefor are disclosed.

Claims

1. An article comprising a transparent conductive film comprised of indium oxide and zirconium oxide on a suitable substrate.

2. An article in accordance with claim 1, wherein the film is comprised of from about 40 percent to about 60 percent by weight of indium oxide and from about 40 percent to about 60 percent by weight of zirconium oxide.