Method of making p-doped silicon films

• US 4,400,409 A
• Filed: 05/19/1980
• Issued: 08/23/1983
• Est. Priority Date: 05/19/1980
• Status: Expired due to Term

• Current Assignee: United Solar Systems Corp.
• Original Assignee: Energy Conversion Devices
• Inventors: Ovshinsky, Stanford R., Izu, Masatsugu, Cannella, Vincent D.
• Primary Examiner(s): Smith, John D.
• Application Number:
  US06/151,301
• Time in Patent Office: 1,191 Days
• Field of Search: 427/39.85, 427/74, 427/86, 427/255.5, 148/174, 148/1.5, 29/572
• US Class Current: 438/62
• CPC Class Codes: C23C 16/517 using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: H01L 31/046 PV modules composed of a plurality of thin film solar cells deposited on the same substrate
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

The production of improved photovoltaic solar cells and the like comprising both p and n type deposited silicon film regions is made possible by a process which provides more efficient p-doped silicon films with higher acceptor concentrations. The process utilizes previously known p-dopant metal or boron gaseous materials in unique forms and conditions in a glow discharge silicon preferably hydrogen and fluorine compensated deposition process. Thus, p-dopant metals like aluminum may be used in an elemental evaporated form, rather than in a gaseous compound form heretofore ineffectively used and deposited with the glow discharge deposited silicon on substrates kept at lower temperatures where fluorine and hydrogen compensation is most effective. Preferably boron in a gaseous compound form like diborane and other p-dopant metals in a gaseous form are used uniquely during the glow discharge deposition of silicon by heating the substrate to heretofore believed undesirably higher temperatures, like at least about 450° C. to 800° C. where at least fluorine compensation, if desired, is still effective. The improved devices, such as solar cells, can be manufactured in a continuous process on a web type substrate moved through a plurality of film deposition chambers. Each of the chambers is dedicated to depositing a particular type of film layer (p, i or n) and is isolated from the other chambers.

Claims

1. A method of making a p-type silicon semiconductor film, said method comprising the step of depositing on a substrate a semiconductor host matrix film including at least silicon by glow discharge of a compound containing at least silicon in a partial vacuum atmosphere and during glow discharge deposition of the film, introducing an evaporated metal p-dopant modifier element into the silicon depositing glow discharge region which metal modifier element is deposited with the glow discharge deposited silicon film to modify the same to produce a p-type film.

2. The method as defined in claim 1 wherein said evaporated metal modifier element is at least one of the group consisting of aluminum, gallium, indium, zinc or thallium.

7. The method as defined in claim 1 wherein said method forms one step in a multi-step process for forming successively by glow discharge deposited silicon-containing films of opposite (p and n) conductivity type, the n-type silicon-containing film being formed by introducing into the glow discharge region a compound containing at least silicon in a partial vacuum atmosphere and during the glow discharge deposition of the film introducing an n-dopant modifier element which is deposited with the glow discharge deposited film to modify the same to produce an n-type film.

9. The method as defined in claim 1 wherein said method forms one step in a multi-step process for forming successively deposited silicon-containing films of opposite (p and n) conductivity type.

12. The method as defined in claim 7 wherein said n-type silicon-containing film is formed in the presence of at least one density of states reducing element which combines with the depositing silicon-containing film most efficiently at a temperature well below 500°

C., said n-type silicon-containing film being applied over said p-type silicon-containing film while the substrate is held at said temperature well below said 500°

C.

13. The method as defined in claim 7 wherein there is deposited between said p and n doped silicon films an intrinsic amorphous silicon-containing film by the glow discharge thereof without a p or n dopant modifying element present therein.

14. The method as defined in claim 9 wherein there is deposited between said p and n doped silicon films an intrinsic amorphous silicon-containing film by the glow discharge thereof without a p or n dopant modifying element present therein.

17. The method as defined in claims 1 or 3 wherein there is deposited adjacent to said p-type silicon film an intrinsic amorphous silicon-containing film by the glow discharge thereof without a p or n dopant modifying element present therein.

18. The method as defined in claims 7 or 8 wherein each of said doped silicon-containing film is a substantially amorphous film.

19. The method as defined in claims 7 or 8 wherein said p and n doped silicon-containing films are deposited one immediately on top of the other to form a p-n junction.

20. The method as defined in claims 7 or 8 wherein at least part of said p and n dopant materials are deposited in amounts which form p⁺ and n⁺ silicon films.

21. The method as defined in claims 7 or 8 wherein at least one of said silicon-containing films is a substantially amorphous film, and there is included in said silicon compound forming each such film one density of states reducing element and at least one separate density of states reducing element not derived from the compound is introduced into said glow discharge region so that these elements are incorporated in each said substantially amorphous silicon-containing film deposited on said substrate to alter the electronic configurations and produce a reduced density of localized states in the energy gap thereof.

22. The method as defined in claim 7 wherein said substrate is formed in a substantially continuous web, and each of said silicon films is deposited at a separate glow discharge region past which said web is moved to form a substantially continuous deposition process.

24. The method as defined in claims 7 or 8 wherein said p-doped containing film is deposited to a thickness of less than 1000 angstroms.

25. The method as defined in claims 7 or 8 including forming each of said semiconducting layers in a continuous process.

26. The method as defined in claims 7 or 8 wherein at least one of said silicon-containing films is a substantially amorphous film and there is included in the glow discharge region forming each such film at least one density of states reducing element so that the element is incorporated in each said substantially amorphous silicon film deposited on said substrate to alter the electronic configurations thereof to produce a reduced density of localized states in the energy gap thereof.

27. The method as defined in claims 1 or 3 wherein said compound includes hydrogen.

28. The method as defined in claims 1 or 3 wherein said compound includes fluorine.

29. The method as defined in claims 1 or 3 wherein said compound includes fluorine and hydrogen.

30. The method as defined in claims 1 or 3 wherein said compound is at least a mixture of SiF₄ and H₂.

3. A method of making a p-type silicon film, said method comprising the step of depositing on a substrate heated to at least above a temperature of 500°

C. a semiconductor host matrix film including at least silicon by glow discharge of a compound containing at least silicon in a partial vacuum atmosphere and during glow discharge deposition of the film introducing a p-dopant gaseous compound into the silicon depositing glow discharge region, said p-dopant gaseous compound including at least a p-dopant modifier element and a non-p-dopant substituent and which gaseous compound disassociates into said p-dopant modifier element and said non-p-dopant substituent at said substrate temperature of at least about 500°

C., the p-dopant modifier element then combining with the depositing silicon to modify the silicon semiconductor material to produce a p-type film.

4. The method of claim 3 wherein said p-dopant modifier element is at least one of the group consisting of aluminum, gallium, indium, zinc or thallium.

5. The method of claim 3 wherein said p-dopant modifier element is boron.

6. The method of claim 5 wherein said gaseous compound is diborane.

8. The method as defined in claim 3 wherein said method forms one step in a multi-step process for forming successively by glow discharge deposited silicon-containing films of opposite (p and n) conductivity type, the n-type silicon-containing film being formed by introducing into the glow discharge region a compound containing at least silicon in a partial vacuum atmosphere and during the glow discharge deposition of the film introducing an n-dopant modifier element which is deposited with the glow discharge deposited film to modify the same to produce an n-type film.

10. The method as defined in claim 3 wherein said method forms one step in a multi-step process for forming successively deposited silicon-containing films of opposite (p and n) conductivity type.

11. The method as defined in claim 8 wherein said n-type silicon-containing film is formed in the presence of at least one density of states reducing element which combines with the depositing silicon-containing film most efficiently at a temperature well below 500°

C., said n-type silicon-containing film being applied over said p-type silicon-containing film while the substrate is held at said temperature well below said 500°

C.

15. The method as defined in claim 8 wherein there is deposited between said p and n doped silicon films an intrinsic amorphous silicon-containing film by the glow discharge thereof without a p or n dopant modifying element present therein.

16. The method as defined in claim 10 wherein there is deposited between said p and n doped silicon films an intrinsic amorphous silicon-containing film by the glow discharge thereof without a p or n dopant modifying element present therein.

23. The method as defined in claim 8 wherein said substrate is formed in a substantially continuous web, and each of said silicon films is deposited at a separate glow discharge region past which said web is moved to form a substantially continuous deposition process.

31. A method of making a photovoltaic panel comprising forming a roll of a web of a flexible substrate material with one or more electrode-forming regions thereon, unrolling said substrate roll substantially continuously into a partially evacuated space including at least one silicon depositing region therein where there is deposited over at least some of said one or more electrode-forming regions at least two thin, flexible silicon films which are of opposite conductivity (p and n) type, one or more of said films forming a photovoltaic depletion region, said substrate is formed in a substantially continuous web, and each of said silicon films is deposited at a separate glow discharge region past which said web is moved to form a substantially continuous deposition process, and subsequently applying on said silicon films a thin flexible electrode-forming layer, separately as to each of said electrode-forming regions.

32. The method as defined in claim 31 wherein depositing said p-type film includes depositing a semiconductor host matrix film including at least silicon by glow discharge of a compound containing at least silicon in said partial vacuum atmosphere and during the glow discharge deposition of the film introducing an evaporated metal p-dopant modifier element into the silicon depositing glow discharge station which metal modifier element is deposited with the glow discharge deposited silicon film to modify same to form the p-type film.

33. The method as defined in claim 32 wherein said evaporated metal modifier element is at least one of the group consisting of aluminum, gallium, indium, zinc or thallium.

34. The method as defined in claim 31 wherein depositing said p-type film includes depositing on said substrate heated to at least above a temperature of 500°

C. and below 800°

C. a semiconductor host matrix film including at least silicon by glow discharge of a compound containing at least silicon in said partial vacuum atmosphere and during the glow discharge deposition of the film introducing a p-dopant gaseous compound into the silicon depositing glow discharge region, said p-dopant gaseous compound including at least a p-dopant modifier element and a non-p-dopant substituent and which gaseous compound disassociates into said p-dopant modifier element and said non-p-dopant substituent at said substrate temperature of at least above 500°

C., the p-dopant modifier element then combining with the depositing silicon to modify the silicon semiconductor material to form the p-type film.

35. The method as defined in claim 34 wherein said p-dopant modifier element is at least one of the group consisting of aluminum, gallium, indium, zinc or thallium.

36. The method as defined in claim 34 wherein said p-dopant modifier element is boron.

37. The method as defined in claim 36 wherein said gaseous compound is diborane.

38. The method as defined in claim 31 wherein there is deposited between said p and n doped silicon films an intrinsic amorphous silicon-containing film by the glow discharge thereof without a p or n dopant modifying element present therein.

39. The method as defined in claim 31 wherein at least one of said silicon-containing films is a substantially amorphous film, and there is included in said silicon compound forming each such film one density of states reducing element and at least one separate density of states reducing element not derived from the compound is introduced into said glow discharge region so that these elements are incorporated in each said substantially amorphous silicon-containing film deposited on said substrate to alter the electronic configurations and produce a reduced density of localized states in the energy gap thereof.

40. The method as defined in claim 31 wherein said p-doped silicon-containing film is deposited to a thickness of less than 1000 angstroms.

41. The method as defined in claim 31 wherein said compound includes fluorine.

42. The method as defined in claim 31 wherein said compound is at least a mixture of SiF₄ and H₂.

43. The method as defined in claim 31 wherein said compound is at least a mixture of SiF₄ and H₂ in the ratio of 4 to 1 to 10 to 1.