Automatic detector for microscopic dust on large-area, optically unpolished surfaces

• US 4,402,607 A
• Filed: 05/16/1980
• Issued: 09/06/1983
• Est. Priority Date: 05/16/1980
• Status: Expired due to Term

• Current Assignee: The Thermo Environmental Instruments Incorporated
• Original Assignee: GCA Corp. (SPX Corporation)
• Inventors: Lilienfeld, Pedro, McVay, Lance
• Primary Examiner(s): ARNOLD, BRUCE
• Application Number:
  US06/150,363
• Time in Patent Office: 1,208 Days
• Field of Search: 356/337-340, 356/336, 356/343, 356/430, 356/431, 356/429, 356/445-448, 356/335, 250/563, 250/572, 250/224
• US Class Current: 356/338
• CPC Class Codes: G01N 21/94 Investigating contamination, e.g. dust G01N21/85 takes precedence

Abstract

A system for automatically detecting dust or other minute particles on a large-area, optically unpolished surface such as a face of a glass reticle plate used in the production of microelectronic circuits. The system irradiates the surface with a narrow, high intensity beam of monochromatic radiation at a grazing angle, typically 1/2 degree with respect to the surface. An oscillating mirror scans the beam across the moving surface in a direction generally perpendicular to the direction of plate advance. A beam splitter provides separate inspecting beams for each surface of the plate. Optical systems characterized by a high numerical aperture are positioned on opposite sides of the plate to collect radiation which is scattered from the particles. The optical systems are oriented to accept scattered radiation, and typically have their optical axes at an angle in the range of 60° to 160° measured from the direction of advance. They each utilize a multiplet of cylindrical lenses characterized by excellent resolution and a large numerical aperture, preferably in the range of 0.15 to 0.20. A fiber optic concentrator transmits the scattered radiation from the image plane of the lenses to a detector which generates an electrical signal proportional to the size of the particle. In the preferred form, a comparator circuit with an adjustable threshold level generates a digital signal only when the size of the particle exceeds a predetermined value. Also, the oscillation of the scanning mirror and the advance of the plate provide a timing reference for the particle detection signal to locate the particle on the plate.

Claims

1. A system for detecting the presence of microscopic particulate matter on a generally flat, large area and optically unpolished surface with randomly oriented surface irregularities, said surface advancing in a first direction that is generally coplanar with the surface, comprising,

means for generating a narrow beam of high intensity monochromatic radiation,

means for directing the radiation onto said surface at a highly acute angle measured from said surface, said radiation being scattered by said particulate matter and said optically unpolished surface, said surface scattered radiation having a random orientation with respect to said radiation generating means and a frequency spectrum similar to the frequency spectrum generated by said radiation scattered by said particulate matter to thereby create a background noise,

optical means angularly oriented with respect to said surface to collect radiation from said beam that is scattered by said particulate matter and from said optically unpolished surface, said optical means having high resolution in the field of view on said surface and a large numerical aperture,

said particle scattered radiation received by said optical means being generally proportional to the size of said particulate matter,

electronic means operatively coupled to said optical means for converting said particulate matter scattered radiation into an analog electrical signal whose amplitude corresponds to the intensity of said collected radiation, and

electronic means for filtering out from said signal noise due to scattering of said radiation from said surface.

2. The system of claim 1 further comprising means for scanning said beam laterally across said field of view in a direction generally transverse to said first direction.

3. The system of claim 2 wherein said optical means includes a multiplet of cylindrical lenses with their longitudinal axes generally aligned with said scanning direction.

4. The system of claim 3 wherein said eletronic means for inverting comprises a photomultiplier tube.

5. The system of claim 4 wherein said optical means further includes a fiber optic light guide that transmits light from the image plane of said lenses to said photomultiplier tube.

6. The system of claim 2 further comprising means for coordinating said scanning means and said electronic means for converting to determine the location of said particulate matter on said surface.

7. The system of claim 6 wherein said means for coordinating includes electronic means for interpreting an increased intensity of the scattered radiation from an edge of the surface in a single scan as the leading or trailing edge of the surface.

8. The system of claim 1 wherein said electronic means for filtering comprises means for converting said analog signal into a digital signal.

9. The system of claim 8 wherein said analog-to-digital converting means comprises a comparator.

10. The system of claim 1 wherein said optical means can resolve particulate matter in said field of view having a diameter in the range of 1 to 5 micrometers and said optical means has a numerical aperture in the range of 0.15 to 0.20.

11. The system of claim 1 wherein said said optical means is angled to collect radiation emanating in the directions of from 60°

to 160°

measured from said first direction.

12. The system of claim 1 wherein said highly acute angle is approximately 1/2 degree.

13. The system of claim 1 further comprising means for splitting said radiation beam into two separate scanning beams which are each directed at opposite sides of said surface at said highly acute angle.

14. The system of claim 1 wherein said narrow beam of high intensity monochromatic radiation is polarized to enhance the signal-to-noise ratio of said particle scattered radiation to said surface scattered radiation.

15. A system for automatically detecting very small particles of at least a predetermined size on either of two generally parallel faces of a reticle that is advancing in a first direction that is generally coplanar with the faces comprising:

a laser light source that generates a narrow beam of high intensity monochromatic light having a small angular divergence,

means for splitting said beam into two beams of generally equal intensity,

means for directing each of said split beams onto a scanning region of an associated one of said faces at a highly acute angle measured from said faces,

means for scanning each of said split beams laterally across said scanning region in a direction generally transverse to said first direction, and

optical means angularly oriented with respect to said faces to collect light from said split beams that is scattered from said particles lying in a field of view within said scanning regions, said optical means having high resolution for said fields of view and a large numerical aperture,

said particle scattered light received by said optical means being generally proportional to the size of said particulate matter.

16. The system of claim 15 wherein the angular orientation of said optical means is in the range of 60°

to 160°

measured from said first direction.

17. The system of claim 15 wherein said numerical aperture is in the range of 0.15 to 0.20 and said optical means can resolve adjacent particles in said fields of view having a diameter in the range of 1 to 5 micrometers.

18. The system of claim 15 further comprising means operatively coupled to said optical means for converting said particulate matter scattered light into an electrical signal whose amplitude corresponds to the intensity of said collected light.

19. The system of claim 18 wherein said converting means comprises a photomultiplier tube.

20. The system of claim 19 wherein said optical means includes a multiplet of cylindrical lenses with their longitudinal axes generally aligned with said scanning direction.

21. The system of claim 20 wherein said optical means further includes a fiber optic light guide that transmits light from the image plane of said lenses to said photomultiplier.

22. The system of claim 18 further comprising electronic comparator means responsive to said electrical signal.

23. The system of claim 18 further comprising means for coordinating said scanning means and said converting means to locate said particulate matter on said surface.

24. The system of claim 15 wherein said light is polarized.

25. The system of claim 15 wherein said optical means includes means for detecting scattered radiation having a predetermined polarization.

26. The system of claim 15 wherein said optical means has a large field of view in said scanning direction.

27. The system of claim 15 wherein said narrow beam of high intensity monochromatic light is polarized to enhance the signal-to-noise ratio of said particle scattered light to light scattered from said reticle.