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Photoelectric incremental measuring apparatus

  • US 4,403,859 A
  • Filed: 12/11/1980
  • Issued: 09/13/1983
  • Est. Priority Date: 12/22/1979
  • Status: Expired due to Term
First Claim
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1. In a photoelectric incremental measuring apparatus for measuring the relative displacement of two objects, the apparatus including a measuring scale and a scanning unit for scanning the scale having a reticle, the scale and reticle each carrying a measuring grid, the improvement comprising:

  • the scale having at least two nonidentical reference marks, each of which reference marks comprises a line group with an irregular line spacing pattern;

    the reticle having at least two reading fields, each of which reading fields comprises a line group with an irregular line spacing pattern that is substantially identical to the line spacing pattern of a selected one of the reference marks, the reading fields positioned on the reticle such that each reading field aligns simultaneously with its corresponding reference mark at only one relative position between the scale and the scanning unit as the scanning unit moves relative to the scale;

    the scanning unit having at least two reference mark reading positions, each reference mark reading position comprising a respective detection means for detecting the alignment of the respective reading field with its corresponding reference mark and for generating respective individual detection signals in response thereto; and

    means for combining the individual detection signals to generate a composite detection signal of higher accuracy than the individual detection signals.

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