Apparatus for automatic lapping control
First Claim
1. Control apparatus for a machine for precision machining, having at least one reference surface, one machining surface, and at least one piezoelectric resonator between said surfaces, comprising:
- a. at least one electrode able to be inserted in and insulated from one of said surfaces;
b. automatic control means for sensing the resonance frequency of said piezoelectric resonator and for terminating the machining process when said resonance frequency reaches a target frequency;
c. impedance sensing means for sensing the presence and absence of a piezoelectric resonator at the electrode face and for;
deactivating said automatic control means in the absence of a piezoelectric resonator at the electrode face, andactivating said automatic control means in the presence of a piezoelectric resonator at the electrode face.
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Accused Products
Abstract
Apparatus for automatic lapping control, based on imbedding an electrode in a lap plate of a lap machine and including at least one piezoelectric wafer in the lap load. Connected with the electrode is an automatic control circuit used for sensing the resonance frequency of the piezoelectric wafer and for terminating lapping when the resonance frequency reaches a presetable target frequency. Also connected with the electrode is an impedance comparator circuit used for sensing the presence and absence of a piezoelectric wafer at the electrode face and for activating the automatic control circuit in the presence of a wafer and deactivating the control circuit in the absence of a wafer.
34 Citations
8 Claims
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1. Control apparatus for a machine for precision machining, having at least one reference surface, one machining surface, and at least one piezoelectric resonator between said surfaces, comprising:
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a. at least one electrode able to be inserted in and insulated from one of said surfaces; b. automatic control means for sensing the resonance frequency of said piezoelectric resonator and for terminating the machining process when said resonance frequency reaches a target frequency; c. impedance sensing means for sensing the presence and absence of a piezoelectric resonator at the electrode face and for; deactivating said automatic control means in the absence of a piezoelectric resonator at the electrode face, and activating said automatic control means in the presence of a piezoelectric resonator at the electrode face. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification