Natural lithographic fabrication of microstructures over large areas
First Claim
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1. A method producing a lithographic mask on the surface of a substrate comprising coating said substrate with a monolayer of colloidal particles substantially over the entire surface such that said particles are fixed to said substrate in a predetermined way as to particle size distribution and mean distance between particles, said monolayer of colloidal particles serving as an etch mask for forming an etched pattern in said substrate.
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Abstract
Large area random and mosaic arrays of identical submicron microcolumnar structures can be produced on surfaces by directionally ion etching a monolayer film of spherical colloidal particles.
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Citations
27 Claims
- 1. A method producing a lithographic mask on the surface of a substrate comprising coating said substrate with a monolayer of colloidal particles substantially over the entire surface such that said particles are fixed to said substrate in a predetermined way as to particle size distribution and mean distance between particles, said monolayer of colloidal particles serving as an etch mask for forming an etched pattern in said substrate.
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6. A method of producing an ordered lithographic mask on the surface of a substrate comprising:
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(a) depositing a dispersion of colloidal particles of predetermined size onto said substrate such that a monolayer of colloidal particles are fixed to said substrate; and (b) dispelling any excess of said monolayer of said colloidal particles from said substrate such that said monolayer is ordered, said monolayer of colloidal particles serving as an etch mask for forming an etched pattern in said substrate. - View Dependent Claims (7, 8, 9, 10, 18, 19, 20, 21)
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22. A method for producing a spectrally selective absorbing surface comprising:
- coating said substrate with a monolayer of colloidal particle substantially over the entire surface such that said particles are fixed to said substrate in a predetermined way as to particle size distribution and mean distance between particles;
etching a pattern in said substrate of microcolumnar posts. - View Dependent Claims (23, 24, 25, 26, 27)
- coating said substrate with a monolayer of colloidal particle substantially over the entire surface such that said particles are fixed to said substrate in a predetermined way as to particle size distribution and mean distance between particles;
Specification