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Natural lithographic fabrication of microstructures over large areas

  • US 4,407,695 A
  • Filed: 03/29/1982
  • Issued: 10/04/1983
  • Est. Priority Date: 12/31/1981
  • Status: Expired due to Fees
First Claim
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1. A method producing a lithographic mask on the surface of a substrate comprising coating said substrate with a monolayer of colloidal particles substantially over the entire surface such that said particles are fixed to said substrate in a predetermined way as to particle size distribution and mean distance between particles, said monolayer of colloidal particles serving as an etch mask for forming an etched pattern in said substrate.

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