Measuring device for capacitive determination of the relative position of two with respect to one another moveable parts

• US 4,420,754 A
• Filed: 06/09/1981
• Issued: 12/13/1983
• Est. Priority Date: 12/09/1977
• Status: Expired due to Term

• Current Assignee: C.E. Johansson AB (MKS Instruments Incorporated)
• Original Assignee: Stiftelsen Institutet For Mikrovagsteknik Vid Tekniska Hogskolan I Stockholm
• Inventors: Andermo, Nils I.
• Primary Examiner(s): Groody, James J.
• Application Number:
  US06/272,072
• Time in Patent Office: 917 Days
• Field of Search: 340/870.37, 340/562, 340/347 M, 340/870.01, 324/61 R, 324/60 R, 324/60 C, 318/662
• US Class Current: 324/660
• CPC Class Codes: G01D 5/2415 adapted for encoders

Abstract

A system for measuring the relative movement between two elements, such as the scale and slide of a hand-held measuring instrument includes the provision of a number of groups of supply electrodes on the slide, each of the electrodes in each group being supplied from a respective one of a multiple number of output signals from a signal generator so that all of the supply electrodes are furnished with voltages according to a cyclic pattern, the slide also having at least one receiving electrode which feeds a signal processing unit. The scale is provided with an electronic pattern comprising internally galvanically connected parts, one being a detecting part, located close to the area where the supply electrodes of the slide are moved, the other of the two parts being a transferring part which is located close to the area where the receiving electrode of the slide is moved. The movement of the slide along the scale generates a signal from the receiving electrode which is derived from the signals from at least two adjacent supply electrodes and the position of the slide is determined by a signal processing unit which identifies the amplitude ratio of the received signals.

Claims

1. A measuring device for capacitative determination of the relative position of two relatively movable parts with respect to one another, such as the scale and a slide of a hand manipulated measuring device comprising a slide provided with a number of groups of supply electrodes distributed along the direction of relative movement, each of the groups having n number of supply electrodes, n being an integer greater than 2, signal generator means having n number of signal outputs, each of the supply electrodes in each group being connected to a respective one of said signal outputs whereby all supply electrodes are supplied with voltages according to a cyclic pattern, the slide also being provided with at least one receiving electrode, a signal processing unit connected to at least one receiving electrode, the scale being provided with a single electronic pattern comprising internally galvanically isolated scale electrodes, each scale electrode comprising two mutually galvanically connected parts, one being a detecting part and being located close to the area of the scale over which the supply electrodes of the slide can be moved, the other of the two parts being a transferring part and being located close to the area over which the at least one receiving electrode of the slide can be moved, whereby the position of the slide along the scale generates a signal from the at least one receiving electrode which is derived from at least two adjacent supply electrode signals and the position of the slide with respect to the scale can be determined by the identification in the signal processing unit of the signals and their amplitude ratio.

2. Measuring device according to claim 1, wherein said n signal generator means generates n periodical signals of the same amplitude and frequency whereby the signals are phase displaced with respect to each other by N·

(360/n) degrees, where N is an integer.

3. Measuring device according to claim 2, wherein the n phase generator means includes means to supply electrodes with a rectangular voltage and the signal from said at least one receiving electrode is subject to an average value determination during a time period of the length G whereby the received voltage is a function of the phase position of the time period with respect to the rectangular voltage and of the position of the slide with respect to the scale.