Optical guided wave devices employing semiconductor-insulator structures

• US 4,420,873 A
• Filed: 01/25/1980
• Issued: 12/20/1983
• Est. Priority Date: 01/25/1980
• Status: Expired due to Term

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Bozler, Carl O., McClelland, Robert W., Melngailis, Ivars, Leonberger, Frederick J.
• Primary Examiner(s): Bernstein, Hiram H.
• Application Number:
  US06/115,420
• Time in Patent Office: 1,425 Days
• Field of Search: 350/96.12, 29/576 E, 148/175, 156/613, 156/610, 156/DIG. 70, 156/624, 156/662
• US Class Current: 438/31
• CPC Class Codes: G02B 6/122 Basic optical elements, e.g. light-guiding paths
• CPC Class Codes: G02B 6/131 by using epitaxial growth epitaxial growth for semiconductors H01L21/02365
• CPC Class Codes: Y10S 117/918 Single-crystal waveguide

Abstract

A method for fabricating three-dimensional optical waveguides is disclosed. In this method, a single crystal semiconductor layer is grown upon an insulator which has an index of refraction lower than the semiconductor. The semiconductor layer is deposited to a thickness which provides confinement of light propagating in the semiconductor layer in the vertical direction. An effective larger index of refraction over a cross-sectional region of the semiconductor layer is then formed to provide confinement of light in the lateral direction. In the preferred method, the growth of single crystal semiconductor upon the insulator is achieved by a vapor-phase lateral epitaxial overgrowth technique.

Devices fabricated according to the method are also disclosed.

Claims

1. A method of fabricating a three-dimensional optical waveguide, comprising:

a. forming a single crystal semiconductor substrate;

b. forming an insulator layer on said substrate;

c. forming a single crystal semiconductor layer upon the insulator layer;

said insulator layer having an index of refraction lower than that of said semiconductor layer, said semiconductor layer being formed to a thickness sufficient to provide confinement of light in the lower vertical direction by the boundary between the insulator layer and the semiconductor layer above and in the upper vertical direction by the boundary between the semiconductor layer and an insulator; and

,

d. removing portions of said semiconductor layer to leave a three-dimensional waveguide region of single crystal semiconductor between the insulator layer on the bottom and the semiconductor layer on the top and creating an effective larger index of refraction on two sides of said three-dimensional waveguide region to thereby provide confinement of said light in said region in the lateral direction.

2. A method of claim 1 wherein said insulator layer comprises an amorphous oxide and said insulator in (c) is air.

3. A method of claim 2 wherein said single crystal semiconductor layer comprises gallium arsenide.

4. A method of claim 3 wherein said oxide insulator comprises silicon dioxide.

5. A method of claim 1, 2, 3 or 4 wherein said single crystal semiconductor layer is formed by lateral epitaxial overgrowth through openings in said insulator layer.