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Silicon diaphragm capacitive pressure transducer

  • US 4,424,713 A
  • Filed: 06/11/1982
  • Issued: 01/10/1984
  • Est. Priority Date: 06/11/1982
  • Status: Expired due to Term
First Claim
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1. In a pressure transducer of the capacitor type in which a plate of electrically conductive semi-conductor material is sandwiched between a pair of plates of inorganic electrical insulating material electrostatically bonded thereto, wherein a pair of concentric circular recesses are etched in said plates to form cavities on opposing sides of said conductive plate to define a diaphragm area on said conductive plate, apertures are drilled through said insulating plates, and the surfaces of one of said insulating plates in said cavities has deposited thereon an electrically conductive film forming a capacitor with the diaphragm area of said conductive plate, the improvement comprising:

  • a stress relief area surrounding said diaphragm area so that deflection of said conductive plate is unrestrained by the adjacent insulating plate on the high pressure side for prevention of overpressure failure of said transducer.

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  • 10 Assignments
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