Integrated circuit wafer transport mechanism

• US 4,427,332 A
• Filed: 02/26/1982
• Issued: 01/24/1984
• Est. Priority Date: 02/26/1982
• Status: Expired due to Fees

• Current Assignee: Nanometrics Incorporated (Onto Innovation Inc.)
• Original Assignee: Nanometrics Incorporated (Onto Innovation Inc.)
• Inventors: Manriquez, Ralph F.
• Primary Examiner(s): Spar, Robert J.
• Assistant Examiner(s): KRIZEK, JANICE LEE
• Application Number:
  US06/352,752
• Time in Patent Office: 697 Days
• Field of Search: 211/41, 312/91, 312/306, 269/56, 269/229, 269/233, 269/903, 350/529, 350/530, 350/531, 414/305, 414/331, 414/416, 414/750, 414/267, 414/268, 414/592, 414/609, 118/236, 118/500, 118/719, 118/729, 118/731, 118/733, 118/724
• US Class Current: 414/331.18
• CPC Class Codes: G02B 21/26 Stages; Adjusting means therefor
• CPC Class Codes: H01L 21/67766 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: Y10S 269/903 Work holder for electrical circuit assemblages or wiring systems
• CPC Class Codes: Y10S 414/137 including means for charging or discharging wafer cassette

Abstract

A manually operable mechanism for attachment to the adjustable stage of an inspection microscope for lifting a selected printed circuit wafer from its slot in a conventional disc holder and positioning it under the microscope lens for inspection. After inspection the mechanism is operated to lift the wafer from its inspection position, to transport it back into the disc holder, and carefully lower it into its correct slot. There is no manual handling of the wafers and therefore the normal losses resulting from breakage and contamination is eliminated.

Claims

1. In the production of intergrated electronic circuits, a transport mechanism for transferring circuit wafers between a disc holder and a predetermined point, said transport mechanism comprising:

elevator means for supporting and vertically adjusting the height of the disc holder in steps corresponding to the spacing of adjacent horizontally placed wafers in said disc holder;

guide means linearly extending parallel with, but displaced from a line between said disc holder and the predetermined point;

a housing coupled to and slidably movable along said guide means, said housing having a vertically movable roof member;

lifting means within said housing for moving said roof member between first and second predetermined vertical positions; and

a transport arm having its first end attached to the top surface of said housing roof member, the second end of said arm being substantially centered along said line between said disc holder and said predetermined point, said second end being dimensioned for insertion into a disc holder on said elevator means and between adjacent wafers in said disc holder without contacting either of said wafers when said roof member is in its first vertical position, and for lifting the upper one of said adjacent wafers out of contact with said disc holder when said roof member is in its second vertical position, whereby said upper wafer may be transported to said predetermined point by movement of said housing along said guide means.

2. The transport mechanism claimed in claim 1 further including a stop member coupled to said guide means for limiting the movement of said housing along said guide means and for defining the position of said predetermined point.

3. The transport mechanism claimed in claim 2 further including elevator locking means for preventing vertical adjustment of said elevator means while the second end of said transport arm is inserted within said disc holder.

4. The transport mechanism claimed in claim 3 further including a substantially horizontal table having a top surface parallel with said guide means, said table supporting said guide means and said elevator means, said predetermined point being a point on the top surface of said table.

5. The transport mechanism claimed in claim 4 wherein said elevator locking means includes an index pin located on said elevator and a locking bar having a plurality of holes adapted to receive said index pin, said plurality of holes arranged in a vertical row with each hole in said plurality spaced from its adjacent hole by an amount corresponding to the spacing of adjacent wafers in a disc holder, said locking bar being connected to a lock actuating rod slidable through a stationary wall that houses said elevator whereby said locking bar is moved into and out of engagement with said index pin by horizontal movement of said lock actuating rod.

6. The transport mechanism claimed in claim 5 wherein said lock actuating rod is adjacent and parallel with said guide means and wherein said stop member coupled to said guide means includes a pivot member for cooperating with a first collar on said lock actuating rod for moving said rod and its attached locking member into locking engagement with said index pin when said housing is moved against said stop member.

7. The transport mechanism claimed in claim 6 further including a second collar on said lock actuating rod and a resilient stop member connected to said housing adapted to contact said second collar for moving said lock actuating rod in the direction said housing is moved along said guide means.

8. The transport mechanism claimed in claim 7 wherein said guide means includes at least two parallel rods connected to said table and parallel with the front edge of said table, and wherein said elevator means includes a stationary tower assembly coupled to said table and a vertically adjustable elevator platform slidable upon vertical tracks connected to said tower assembly.

9. The transport mechanism claimed in claim 8 further including means for adjusting said elevator platform in steps corresponding to the spacing of adjacent wafers in a disc holder, said means including a rack gear having a plurality of teeth pitched according to said spacing and vertically attached to said stationary tower assembly;

a spring-biased latch attached to said elevator means, said latch having at least one tooth adapted to engage the teeth in said rack; and

latch releasing means for disengaging said latch from said rack teeth.

10. The transport mechanism claimed in claim 9 further including a vertically adjustable horizontal steadyrest within said table and extending from the top surface thereof at a point near said predetermined point, said steadyrest providing a surface of a selected height above said table surface upon which the second end of said transport arm may be positioned.

11. The transport mechanism claimed in claim 10 wherein said table is adapted to be attached to the adjustable stage of an optical inspection microscope, wherein said predetermined point on the surface of said table is substantially on the optical axis of said microscope, and wherein said steadyrest positions said second end of said arm so that the surface of the wafer carried by said second end will be substantially at the point of focus of said microscope.