×

Piezoresistive accelerometer

  • US 4,430,895 A
  • Filed: 02/02/1982
  • Issued: 02/14/1984
  • Est. Priority Date: 02/02/1982
  • Status: Expired due to Term
First Claim
Patent Images

1. An acceleration transducer comprising:

  • a mounting substrate;

    a central pedestal support portion coupled to said substrate;

    an elastic semiconductor diaphragm portion coupled to and peripherally surrounding said central pedestal support portion and extending generally parallel to said substrate;

    a mass ring portion coupled to and peripherally surrounding said diaphragm portion and spaced from said substrate, said mass ring portion being movable in response to acceleration to cause bending movement of said diaphragm portion; and

    means coupled to said diaphragm portion for detecting strain induced in said diaphragm portion in response to bending movement of said diaphragm portion for providing an output signal representing acceleration.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×