Acoustic microscope and method
First Claim
1. An acoustic microscope comprisingfirst means for heating an object of interest so that the object thermally expands responsive thereto,second means for heating the object of interest at the region of interest so that the object at the point of interest thermally expands responsive thereto, the thermal expansion by both sources provides output acoustic waves and means for sensing said acoustic waves and providing an output signal representative of the expansion due to the heating by said first and second heating means.
1 Assignment
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Accused Products
Abstract
An acoustic microscope and method are disclosed in which an object under investigation is excited by two energy sources. Acoustic waves are propagated from the heated area of the object and the waves are detected and analyzed.
58 Citations
31 Claims
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1. An acoustic microscope comprising
first means for heating an object of interest so that the object thermally expands responsive thereto, second means for heating the object of interest at the region of interest so that the object at the point of interest thermally expands responsive thereto, the thermal expansion by both sources provides output acoustic waves and means for sensing said acoustic waves and providing an output signal representative of the expansion due to the heating by said first and second heating means.
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19. An acoustic microscope comprising
first means for heating an object of interest at a first frequency so that the object thermally expands and generates acoustic waves at a first frequency, second means for heating the object of interest at a second frequency so that the object thermally expands and generates acoustic waves at a second frequency and means for receiving said generated acoustic waves and providing an output signal representative of the product of said acoustic waves.
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29. The method of acoustically inspecting an object of interest at a point of interest comprising heating the point of interest at two different frequencies to generate mixed acoustic waves and receiving said mixed acoustic waves and providing an output signal representative of their product.
- 30. The method of inspecting an object of interest at a point of interest comprising heating the point of interest with first background energy and heating the point of interest with inspection energy whereby the action of said combined energies generates a detectable acoustic wave, and sensing the acoustic wave radiated at said point of interest to form a representative signal.
Specification