Semiconductor vapor phase growing apparatus

• US 4,430,959 A
• Filed: 01/26/1983
• Issued: 02/14/1984
• Est. Priority Date: 01/28/1982
• Status: Expired

• Current Assignee: Toshiba Kikai Kabushiki Kaisha (Shibaura Machine Co., Ltd.)
• Original Assignee: Toshiba Kikai Kabushiki Kaisha (Shibaura Machine Co., Ltd.)
• Inventors: Ebata, Hitoshi, Matunaga, Shigetugu
• Primary Examiner(s): Page, Thurman K.
• Application Number:
  US06/461,231
• Time in Patent Office: 384 Days
• Field of Search: 118/697, 118/665, 118/666, 118/688, 118/692, 118/693, 118/695, 118/698, 364/472, 364/500
• US Class Current: 118/697
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: C30B 25/16 Controlling or regulating controlling or regulating in general G05
• CPC Class Codes: C30B 25/165 the flow of the reactive gases

Abstract

In apparatus for vapor phase growing N or P type semiconductor layers on semiconductor substrates supported by a rotary support disposed in a reaction furnace, and various types of gases are admitted into the furnace through a pipe line network and valves, there is provided a control device for ON-OFF controlling the valves according to a predetermined program. The control device comprises a memory region for storing a process program group including a group of process programs including informations regarding a time for designating a process of vapor phase growth in the reaction furnace, gases utilized, flow quantity thereof and furnace temperature, and a system program that decodes the program group for producing control signals for the valves.

Claims

1. Semiconductor vapor phase growing apparatus comprising:

a reaction furnace for vapor phase growing a semiconductor on a semiconductor substrate;

means for heating said substrate;

sources of various gases necessary for vapor phase growth;

a pipe line network for interconnecting said reaction furnace and said sources;

valve means connected in said pipe line network for supplying predetermined quantities of said gases to said reaction furnace; and

control means for supplying control signals to said valve means,

said control means including a first memory region for storing a process program group comprising a group of process programs including informations regarding a time for designating a process of vapor phase growth in said reaction furnace, gases utilized, flow quantities thereof and furnace temperature, and a second memory region that stores a system program that decodes said process program group for producing control signals for said valve means.

2. The apparatus according to claim 1 wherein said control means comprises means for displaying contents of said process programs, and key input means whereby the contents of said process program group stored in said first memory region are displayed on said display means with said key input means, and wherein said system program includes a modifying program responsive to an input signal from said key input means, for modifying said process program group.

3. The apparatus according to claim 1 wherein said control means is provided with input means for process program group adapted to be supplied with process program groups stored in external memory medium.

4. The apparatus according to claim 3 wherein said external memory medium comprises a magnetic tape or a magnetic card.

5. The apparatus according to claim 1 which further comprises another reaction furnace, both of said reaction furnaces are provided with induction heating coils for heating said substrates, and wherein said control means includes a transfer switch for alternately connecting said induction heating coils to a common high frequency source.

6. The apparatus according to claim 1 wherein said memory region stores said process program group including data regarding an interval of operation of said reaction furnace.

7. The apparatus according to claim 4 wherein said control means comprises arithmetic operating means which calculates a first interval between starting of a first process program group executed for operating one reaction furnace and termination of said process, and a second interval between starting of a second process program group executed for operating another reaction furnace and termination thereof.

8. The apparatus according to claim 4 further comprising a plurality of starting switches adapted to start first and second reaction furnaces and arithmetic operation means which calculates a first process sequence starting time of said second furnace based on an interval T1 between closure of a starting switch of the first reaction furnace and termination of process program group corresponding thereto, an interval T2 between starting of a second process program corresponding to said second furnace and a heating instruction, and a time T3 at which a starting switch of said second reaction furnace is operated thereby shortening an interval between termination of power supply to the first furnace and start of power supply to said second furnace.

9. The apparatus according to claim 8 wherein said arithmetic operation means comprises a counter set with an execution time of said first process program group regarding said first reaction furnace, means for decrementing content of said counter at each definite time, means for subtracting an execution time of the second process program group regarding said second reaction furnace from the count of said counter to produce a remaining time, and means for issuing an instruction for starting said second process program group when said counter completes counting of said remaining time.

10. The apparatus according to claim 8 which further comprises another counter set with a difference between an interval between starting of the first process program group regarding said first reaction furnace and termination of heating thereof, and an interval between starting of the second process program group regarding the second reaction furnace and issuance of a heating instruction thereto, means for decrementing count of said another counter at each definite time after starting of said first process program group, and means to start execution of said second process program group when the content of said another counter is reduced to zero.

11. The apparatus according to claim 1 wherein said reaction furnace comprises a vertical rotary support for supporting a plurality of semiconductor substrates about a peripheral surface of said support, a transparent sealed casing surrounding said support, incandescent lamps disposed on the outside of said casing for heating said semiconductor substrates and means for introducing reaction gases into said casing for causing vapor phase growth of N or P type semiconductor layers on said semiconductor substrates.