Surface relief measuring equipment

• US 4,433,386 A
• Filed: 12/08/1980
• Issued: 02/21/1984
• Est. Priority Date: 10/01/1980
• Status: Expired due to Term

• Current Assignee: Nortel Networks Limited (Nortel Networks Corporation)
• Original Assignee: Northern Telecom Limited (Nortel Networks Corporation)
• Inventors: Este, Grantley O.
• Primary Examiner(s): Chin, Gary
• Application Number:
  US06/214,221
• Time in Patent Office: 1,170 Days
• Field of Search: 364/559, 364/560, 364/563, 324/229-231, 73/105, 235/92 DN, 235/92 MT, 377/19, 377/24
• US Class Current: 702/170
• CPC Class Codes: G01B 7/066 for measuring thickness of coating apparatus or processes for the manufacture of piezoelectric or electrostrictive resonators for obtaining desired frequency H03H3/04

Abstract

Surface relief analyzing equipment comprises a turntable and an audio frequency pick-up including a stylus. A substrate bearing the surface relief is rotated on the turntable at a fixed frequency and and analogue electrical signal produced at a pick-up transducer is passed through an a-d converter. Digital data is processed to produce an input to a display for registering a pictorial representation of the surface relief.

Claims

1. Apparatus for measuring the thickness of a coating comprising:

a turntable for supporting and rotating a flat substrate bearing a regularly sectored coating pattern, wherein in use, the centers of the coating pattern and the turntable are substantially coincident;

tracking means for bearing on a top surface of the patterned substrate, the tracking means vertically moveable in a direction perpendicular to the substrate;

means for moving the tracking means radially of the turntable;

a transducer operably connected to the tracking means for generating an electrical signal in response to vertical movement thereof;

a band pass filter for passing a component of the transducer electrical output at a frequency corresponding to the frequency of traversal of the pattern sectors by the tracking means;

and means for measuring amplitude of the filtered signal to provide an indication of coating thickness.

2. Apparatus as claimed in claim 1 in which the transducer and the tracking means are mounted on an arm spaced from the upper surface of the turntable.

3. Apparatus as claimed in claim 2 in which the tracking means is a mechanical stylus.

4. Apparatus as claimed in claim 3 further comprising a motor for driving the stylus along the arm.

5. Apparatus as claimed in claim 1 in which the means for measuring amplitude includes an analog-to-digital converter for digitizing an output signal from the band pass filter an output from the analog-to-digital converter forming one input to a data processing means.

6. Apparatus as claimed in claim 5, further comprising a phase locked loop having an input from the band pass filter, the phase locked loop operable to generate a timing signal which timing signal is taken to the data processing means to compensate for any deviation of the digitized signal output of the analog-to-digital converter from a preset phase.

7. Apparatus as claimed in claim 5 further comprising position monitoring means for monitoring the position at which the tracking means bears on the top surface of the patterned substrate, the data processing means having a second input representing said position.

8. A method of measuring the thickness of a coating deposited on a surface by a coating process, the method comprising using said process to deposit onto a test substrate a regularly sectored coating pattern;

supporting the test substrate on a turntable with a center of the coating pattern substantially coincident with a center of the turntable;

bringing a tracking means to bear on a top surface of the patterned substrate, the tracking means being vertically moveable perpendicular to the substrate;

rotating the turntable;

simultaneously moving the tracking means progressively radially of the turntable;

obtaining from a transducer operably connected to the tracking means an electrical signal corresponding to relative vertical movement produced in the tracking means by passage of the rotating regularly sectored coating pattern thereby;

filtering the electrical signal to pass a component of the transducer electrical output at a frequency corresponding to the frequency of traversal of the patterned sectors by the tracking means;

and measuring the amplitude of an output signal from the filter to provide an indication of the coating thickness.