Pressure sensors
First Claim
1. A pressure sensing transducer comprising;
- support means adapted for connection with a source of pressure for sensing a pressure parameter, said support means including a cylindrically shaped base member with a central connecting portion;
first cylindrically shaped, horizontally disposed diaphragm means;
means attaching said first diaphragm means to said annular base member;
flange means disposed intermediate of said first diaphragm means for providing a heat dissemination point;
first means supporting an upwardly facing first annular capacitor plate;
means for mounting said first supporting means on a central vertical axis of said first horizontal diaphragm means;
second means supporting an upwardly facing second annular capacitor plate;
means for mounting said second supporting means on said flange means including a horizontal diaphragm means;
thermal compensator means supporting a cylindrical, ceramic base member;
a first upper annular capacitor plate on said ceramic base member in facing relationship to said first annular capacitor plate;
a second upper annular capacitor plate on said ceramic base member in facing relationship to said second annular capacitor plate; and
said thermal compensator means providing a change in spacing between the upper and lower capacitor plates as a function of temperature in relation to capacitance.
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Accused Products
Abstract
A capacitance type pressure transducer for pressure measurements for accurate pressurements under differing temperature and pressure conditions having a mechanical construction wherein the displacement characteristics of the transducer as a function of temperature are equated to a compensating change in capacitance as a function of temperature so that changes in temperature do not change the accuracy of the transducer response; a mechanical configuration of the transducer to provide equivalent thermal pathways in the transducer to equalize transient temperature effects upon the transducer and a mechanical design to provide a structural capacitance relationship basically independent of gravitational effects due to positional location of the transducer.
94 Citations
21 Claims
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1. A pressure sensing transducer comprising;
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support means adapted for connection with a source of pressure for sensing a pressure parameter, said support means including a cylindrically shaped base member with a central connecting portion; first cylindrically shaped, horizontally disposed diaphragm means; means attaching said first diaphragm means to said annular base member; flange means disposed intermediate of said first diaphragm means for providing a heat dissemination point; first means supporting an upwardly facing first annular capacitor plate; means for mounting said first supporting means on a central vertical axis of said first horizontal diaphragm means; second means supporting an upwardly facing second annular capacitor plate; means for mounting said second supporting means on said flange means including a horizontal diaphragm means; thermal compensator means supporting a cylindrical, ceramic base member; a first upper annular capacitor plate on said ceramic base member in facing relationship to said first annular capacitor plate; a second upper annular capacitor plate on said ceramic base member in facing relationship to said second annular capacitor plate; and said thermal compensator means providing a change in spacing between the upper and lower capacitor plates as a function of temperature in relation to capacitance. - View Dependent Claims (2, 3, 4)
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5. A capacitor device for use in measuring pressure comprising:
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first, upper and lower capacitor plate means spaced from one another in a fixed spacial relationship with respect to a central axis; second, upper and lower capacitance plate means spaced from one another in a variable spacial relationship with respect to a central axis; said device having first support means for commonly supporting said first upper and lower capacitor plate means in said fixed spacial relationship and for supporting one of said second capacitance plate means, said first support means being displaceable in a direction aligned with a central axis of said first support means in response to pressure; and said device having second support means for supporting the other of said second capacitance plate means in a variable spacial relationship with respect to said one of said second capacitance plate means where said variable spacial relationship is a function of displacement of said first support means. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13)
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14. A capacitor device for use in measuring pressure comprising:
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housing means defining an enclosed pressure chamber wherein one wall of said chamber is a cylindrically shaped displaceable diaphragm having a central axis, first support means attached to said one wall and aligned with said central axis, said first support means including an upper support member, at least two annular capacitor plate means disposed concentrically on said upper support member with respect to said central axis, said first support means including a lower support member disposed between said upper support member and said one wall, annular capacitor plate means disposed on said lower support member in a capacitance relationship to one of said annular capacitor plate means on said upper support member to define a reference capacitor means, second support means attached to said housing means, said second support means including a second support member disposed between said upper support member and said one wall, annular capacitor plate means disposed on said second support member in a relationship to the other of said capacitor plate means on said upper support member to define a measurement capacitor means. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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Specification