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Scanning system for charged and neutral particle beams

  • US 4,442,352 A
  • Filed: 03/09/1982
  • Issued: 04/10/1984
  • Est. Priority Date: 05/17/1979
  • Status: Expired due to Term
First Claim
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1. A method of irradiating a confined volume of material normally located at a substantial depth below a surface with a beam of high energy particles, comprising the steps of electromagnetically scanning the beam in a first plane such that the scanned particles emanate from a first center of divergence;

  • forming an image of the first center of divergence of the scanned beam by electromagnetically bending the beam through a spatial angle; and

    electromagnetically scanning the electromagnetically bent beam in a second plane perpendicular to the first plane with the so-scanned particles emanating from a second center of divergence, and with the second center of divergence being disposed so as to generally coincide with the image of the first center of divergence.

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