Reduced vacuum cryopump

• US 4,449,373 A
• Filed: 02/28/1983
• Issued: 05/22/1984
• Est. Priority Date: 02/28/1983
• Status: Expired due to Term

• Current Assignee: Helix Technology Corporation (Azenta, Inc.)
• Original Assignee: Helix Technology Corporation (Azenta, Inc.)
• Inventors: Bartlett, Allen J., Peterson, John F.
• Primary Examiner(s): Capossela, Ronald C.
• Application Number:
  US06/470,914
• Time in Patent Office: 449 Days
• Field of Search: 62/55.5, 62/100, 62/268, 417/901, 55/269
• US Class Current: 62/55.5
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: Y10S 417/901 Cryogenic pumps

Abstract

A cryopump 20 for differentially pumping water vapor and inert gases from a work space comprising a two stage refrigerator 45 in which a radiation shield 32 substantially encloses a second stage cryopanel 40. The radiation shield 32 incorporates a baffle plate 34 which condenses higher condensing temperature gases and restricts passage of low condensing temperature gases through orifices 36 to the second stage cryopanel 40. Backside pumping ports 38 provide a flow path to the second stage refrigerator for residual gases within the cryopump 20. This creates a high vacuum within the cryopump and allows it to operate at maximum efficiency.

Claims

1. A cryopump for differentially pumping water vapor and inert gases comprising:

a. a cryopump housing incorporating a pumping port for attachment to a work chamber;

b. a refrigerator within said housing having first and second stages;

c. a second stage cryopanel mounted directly to a low temperature heat sink on the second stage;

d. a radiation shield partially enclosing the second stage cryopanel, and in thermal contact with a higher temperature heat sink on the first stage;

e. a frontal inlet orifice plate extending across the pumping port and in thermal communication with the radiation shield, so as to act as part of the radiation shield, the orifice plate restricting flow of low condensing temperature gas from the work chamber to the second stage cryopanel in order to allow a moderate pressure of low condensing temperature gas in the work chamber while condensing higher condensing temperature gases; and

f. a gas flow path provided through the radiation shield at a position removed from the pumping port such that the radiation shield is surrounded by a vacuum at a lower pressure than the work chamber.

2. The cryopump of claim 1 further comprising a small port in the base of the radiation shield, for increasing vacuum in the cryopump housing in areas removed from the pumping port and thereby reducing heat transfer between the housing and the radiation shield.

3. The cryopump of claim 2 further comprising a baffle adjacent to the small port in the radiation shield to prevent heating of the second stage array from the cryopump housing.

4. The cryopump of claim 1 further comprising a seal positioned between the radiation shield and the cryopump housing.

5. A cryopump for reduced vacuum work chambers comprising:

a. a refrigerator housing incorporating a pumping port for attachment to a work chamber;

b. a refrigerator within said housing having first and second axial stages;

c. a second stage cryopanel mounted directly to a low temperature heat sink on the second stage;

d. a radiation shield partially enclosing the second stage cryopanel, and in thermal contact with a higher temperature heat sink on the first stage;

e. a frontal orifice plate extending across the pumping port and in thermal communication with the radiation shield, so as to act as part of the radiation shield;

f. several orifice holes of 0.25 to 0.75 inch diameter in said orifice plate to allow for restricted passage of low temperature boiling point gases to the second stage cryopanel while encouraging condensation of higher boiling point gases about the plate; and

g. several small ports in the radiation shield for reducing pressure in the cryopump housing in areas removed from the pumping port in order to reduce heat transfer between the housing and the radiation shield.

6. A high pressure cryopump that provides maximum water vapor pumping speed while limiting inert gas pumping speed comprising:

a. a cryopump housing incorporating a pumping port for attachment to a work chamber;

b. a refrigerator within said housing having a first and second axial stage;

c. a second stage cryopanel mounted directly to a low temperature heat sink on the second stage;

d. a radiation shield enclosing the second stage cryopanel in thermal contact with a higher temperature heat sink on the first stage, part of the radiation shield'"'"'s outer surface being held less than 3/16 of an inch from the inner surface of the housing so as to form a small passage between the two components that restricts gas flow;

e. a frontal throttle plate extending across the pumping port and incorporated into the radiation shield, in thermal communication with the first stage heat sink; and

f. backside ports located in the radiation shield provided to remove gases from the large internal volume of the cryopump without substantially affecting the working space.

7. A method of establishing a moderate pressure of inert gas in a work chamber with a cryopump comprising the steps of:

a. introducing an inert low condensing temperature gas into the work chamber;

b. selectively removing higher condensing temperature gases from a work environment through the use of a cold orifice incorporated into a cryopump radiation shield;

c. shielding lowest temperature cryopump components from direct thermal contact with the moderate vacuum inert gas environment; and

d. evacuating a volume about the cryopump to a higher vacuum than the work environment so as to minimize heat transfer between cryopump components through the use of a secondary differential pumping port positioned in said radiation shield.

8. A method of establishing a moderate pressure of inert gas in a work chamber as recited in claim 7 further comprising the step of controlling the flow of inert gas into the work chamber in order to vary the work environment.