Ion shower apparatus

• US 4,450,031 A
• Filed: 09/08/1983
• Issued: 05/22/1984
• Est. Priority Date: 09/10/1982
• Status: Expired due to Term

• Current Assignee: Nippon Telegraph and Telephone Corporation
• Original Assignee: Nippon Telegraph and Telephone Corporation
• Inventors: Matsuo, Seitaro, Ono, Toshiro
• Primary Examiner(s): Powell, William A.
• Application Number:
  US06/530,424
• Time in Patent Office: 257 Days
• Field of Search: 156/345, 156/643, 156/646, 204/192 R, 204/192 C, 204/192 EC, 204/192 S, 204/192 E, 204/298, 427/38, 427/39, 118/715, 118/728, 118/50.1, 118/50, 118/620
• US Class Current: 156/345.39
• CPC Class Codes: C23C 14/46 by ion beam produced by an external ion source
• CPC Class Codes: C23C 16/513 using plasma jets
• CPC Class Codes: H01J 27/14 Other arc discharge ion sources using an applied magnetic field
• CPC Class Codes: H01J 37/08 Ion sources; Ion guns
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24

Abstract

An ion shower apparatus comprising a plasma formation chamber in which plasma is produced so as to produce ions, a single ion extraction grid disposed in one portion of the plasma formation chamber and for extracting the ions from the plasma formation chamber so as to form an ion beam in the form of shower, a specimen chamber in which the surface of a specimen subjected to etching or deposition or a target subjected to sputtering is irradiated with the ion beam in the form of shower, and a shield grid disposed in the vicinity of the ion extraction grid in the plasma formation chamber and spaced apart from the thickness of the plasma sheath produced over the ion extraction grid, in a manner that the shield grid permits the passage of the plasma therethrough and prevents the electric field produced by the ion extraction grid substantially from extending to the remaining region of the plasma formation chamber. The ion extraction grid is not damaged. An ion beam with a high current is obtained stably.

Claims

1. An ion shower apparatus comprising:

a plasma formation chamber in which a plasma is produced so as to produce ions;

a single ion extraction electrode disposed in one portion of said plasma formation chamber and for extracting said ions from said plasma formation chamber so as to form an ion beam in the form of shower;

a specimen chamber in which the surface of a specimen is irradiated with said ion beam in the form of shower; and

a shield electrode disposed in the vicinity of said ion extraction electrode in said plasma formation chamber and spaced apart from the thickness of the plasma sheath produced over said ion extraction electrode, said shield electrode permitting the passage of said plasma therethrough and preventing the electric field produced by said ion extraction electrode substantially from extending to the remaining region of said plasma formation chamber.

2. An ion shower apparatus as claimed in claim 1, wherein said plasma is produced in said plasma formation chamber by means of discharge using a thermionic cathode.

3. An ion shower apparatus as claimed in claim 1, wherein said plasma is produced in said plasma formation chamber by the electron cyclotron resonance excited by microwave.

4. An ion shower apparatus as claimed in claim 1, wherein said ion extraction electrode is made of carbon or silicon.

5. An ion shower apparatus as claimed in claim 1, wherein an insulating member is provided on the surface of said ion extraction electrode, said surface being on the side of said plasma formation chamber.

6. An ion shower apparatus as claimed in claim 2, wherein an insulating member is provided on the surface of said ion extraction electrode, said surface being on the side of said plasma formation chamber.

7. An ion shower apparatus as claimed in claim 3, wherein an insulating member is provided on the surface of said ion extraction electrode, said surface being on the side of said plasma formation chamber.

8. An ion shower apparatus as claimed in claim 4, wherein an insulating member is provided on the surface of said ion extraction electrode, said surface being on the side of said plasma formation chamber.

9. An ion shower apparatus comprising:

a plasma formation chamber in which a plasma is produced by the electron cyclotron resonance excited by microwave so as to produce ions;

an ion extraction electrode disposed in one portion of said plasma formation chamber and for extracting said ions from said plasma formation chamber so as to form an ion beam in the form of shower;

an insulating member provided on the surface of said ion extraction electrode, said surface being on the side of said plasma formation chamber; and

a specimen formation chamber in which the surface of a specimen is irradiated with said ion beam in the form of shower.