Recognition method and apparatus

• US 4,450,579 A
• Filed: 06/10/1981
• Issued: 05/22/1984
• Est. Priority Date: 06/10/1980
• Status: Expired due to Term

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Nakashima, Masato, Koezuka, Tetsuo, Inagaki, Takefumi
• Primary Examiner(s): Boudreau, Leo H.
• Application Number:
  US06/272,368
• Time in Patent Office: 1,077 Days
• Field of Search: 382/8, 382/38, 382/48, 382/50, 382/25, 382/44, 358/101, 358/107, 358/106, 364/488-491, 356/373, 356/375, 356/399
• US Class Current: 382/151
• CPC Class Codes: H01L 21/681 using optical controlling means

Abstract

A recognition apparatus comprising an image sensor sensing an image of a pad pattern on an IC chip pattern, a pre-treatment circuit for converting the outputs of the image sensor into binary-coded signals in accordance with at least two slice levels, and a pattern detecting section for detecting the position and inclination of the pad pattern based on the images of the pad and chip patterns corresponding to the data stored in a memory; that is, the binary-coded signals generated in accordance with two slice levels. Two image sensors may be used for sensing the chip and pad data respectively.

Claims

1. A method for recognizing a position of an object having an absolute position and orientation and having a surface and a pattern thereon, and for recognizing a desired portion of the pattern, said method comprising the steps of:

(a) sensing an image within a predetermined area of the object and forming a first and a second resolution image signal corresponding to the object and pattern respectively;

(b) detecting the position of the object in accordance with the first resolution image signal;

(c) receiving data representing a positional relation between the object and the pattern;

(d) determining a predetermined area of the object in accordance with the data representing the positional relation between the object and the pattern;

(e) detecting the position of the desired portion of the pattern in accordance with the second resolution image signal within the predetermined area, wherein the first resolution is lower than the second resolution.

4. An apparatus according to claim 1, wherein said object has corners and said pattern detecting section comprises means for scanning said binary-coded signals in a slantwise manner to detect a binary-coded signal corresponding to one corner of the object, thereby detecting the position of one of said corners of the object, and wherein said predetermined area of the object is further determined in accordance with the binary-coded signal corresponding to said one of said corners.

5. An apparatus according to claim 4, wherein said pattern detecting section further comprises means for scanning said binary-coded signals corresponding to the sensed image of the object along a vertical line passing a point at a predetermined distance from the location of said one of said corners of the object and along a horizontal line passing a point at a predetermined distance from the location of the one of said corners of the object, thereby detecting the orientation of the object.

6. An apparatus according to claim 1, wherein said object has corners and said pattern detecting section comprises means for scanning, in a grid like manner, said binary-coded signals along two parallel lines and along another two prallel lines which intersect with said two parallel lines at right angles to detect a binary-coded signal corresponding to one corner of the object, and wherein said predetermined area of the object is further determined in accordance with the binary-coded signal corresponding to said one of said corners.

7. An apparatus according to claim 1, wherein said patterning detecting section comprises means for scanning said binary-coded signals corresponding to the sensed image of the pattern along an x-axis and y-axis to generate x-axis projection data and y-axis projection data, each of said x-axis and y-axis projection data comprises rows of bits each having a length in accordance with a corresponding portion of said pattern, and wherein said pattern detecting section further comprises means for scanning said rows of bits for a row having a length equal to a predetermined width of the pattern, and for detecting the middle point of the row of the pattern, whereby the width of the pattern and the center of the pattern are detected.

8. An apparatus according to claim 1, wherein the first binary-coded signal has a lower frequency than the second binary-coded signal.

2. A method for recognizing and sensing an object having corners and a surface with a pattern formed thereon, said method comprising:

(a) defining a field of view having a center line;

(b) defining a view surface within the field of view and including the object;

(c) providing image signals responsive to the object and the view surface;

(d) converting the image signals into digital data in accordance with a first and a second conversion signal level;

(e) storing the digital data in respective storage locations of a memory;

(f) providing the digital data stored in the respective ones of the storage locations in a specified sequence;

(g) detecting a first predetermined data of the digital data corresponding to a respective one of the corners of the object;

(h) detecting a second predetermined data of digital data corresponding to the pattern;

(i) generating a projection pattern corresponding to a predetermined portion of the digital data corresponding to the pattern;

(j) detecting the storage locations storing the center signal of the projection pattern signals.

3. A recognition apparatus for sensing an object having a pattern thereon and for sensing a desired portion of the pattern, said apparatus being operatively connected to receive data representing a positional relation between the object and the pattern, the object having an absolute position and an orientation, and comprising:

an image sensing section having outputs, for sensing an image of said pattern on said object and for generating, as outputs, image signals corresponding to said object, said pattern, and an area adjacent to said object;

a pre-treatment circuit operatively connected to said image sensing section and to receive two slice levels, for converting the outputs of the image sensing section into a first binary-coded signal corresponding to the object, accordance with a first slice level, and for converting the outputs of the image sensing section into a second binary-coded signal corresponding to the pattern, in accordance with a second slice level;

a pattern detecting section operatively connected to said pre-treatment circuit, for detecting the absolute position and orientation of the object in accordance with said first binary-coded signal, for determining a predetermined area of the object in accordance with the data representing the positional relation between the object and the pattern, and for detecting the desired portion of the pattern within said predetermined area in accordance with said second binary-coded signal.

9. A recognition apparatus for sensing an object having a pattern thereon and for sensing a desired portion of the pattern, comprising an image sensing section having outputs, for sensing an image of said pattern on said object and for generating, as outputs, image signals corresponding to said object, said pattern, and an area adjacent to said object;

a pre-treatment circuit operatively connected to said image sensing section and to receive at least two slice levels, for converting the outputs of the image sensing section into binary-coded signals; and

a pattern detecting section operatively connected to said pre-treatment circuit, for detecting the position of the pattern in accordance with the binary-coded signals generated by the pre-treatment circuit,

said image sensing section comprises a first optical system for sensing an image of the object and a second optical system for sensing an image of the pattern.

10. An apparatus according to claim 9, wherein said image sensing section comprises a first optical system providing output data, for sensing a image of the object, and a second optical system providing output data, for sensing an image of the pattern.

11. An apparatus according to claim 10, wherein said object comprises a semiconductor device including a substrate having a rough surface, and said first optical system comprises a diaphragm.

12. An apparatus according to claim 10, wherein said object comprises a semiconductor device, having a wiring pattern, and said second optical system senses the wiring pattern, and the position of the wiring pattern is detected by said pattern detecting section, in accordance with the output data provided by said first optical system and corresponding to the position of the device.

13. An apparatus according to claim 10, further comprising a two-dimensional memory device operatively connected to said pre-treatment circuit,

wherein said object comprises a semiconductor device having a wiring pattern, said second optical system generates image signals corresponding to the wiring pattern, said pretreatment circuit stores said image signals in said two-dimensional memory device, and wherein the pattern detection section comprises means for scanning said image signals stored in the two-dimensional memory device along an X and Y direction, and for detecting the edges of the wiring pattern and the position of the wiring pattern.

14. An apparatus according to claim 10, wherein said first and second optical systems comprise a single image sensing device having magnification powers, and which senses two images of said object in accordance with respective ones of said magnification powers.

15. An apparatus according to claim 10, wherein said first and second optical systems comprise a single image sensing device having electrically selectable magnification powers, and which senses two images of said object in accordance with respective ones of said electrically selectable magnification powers.

16. An apparatus according to claim 10, wherein said first and second optical systems comprise a single image sensing device having a plurality of optical magnifying powers, and which optically senses a plurality of images in accordance with respective ones of said optical magnifying powers.

17. A recognition apparatus for sensing an object and a pattern thereon, the object having corners and a surface, said apparatus comprising:

an image sensing means having a field of view with a center line, for sensing a view surface defined by said field of view and including said object, and for providing image signals in accordance with said object and said view surface;

A/D conversion means, operatively connected to said image sensing means, for converting said image signals into digital data in accordance with a first and a second conversion signal level and for providing said digital data as an output;

a bus line;

memory means having a specified number of storage locations, operatively connected to said A/D conversion means and to said bus line, for storing said digital data in respective ones of said storage locations;

reading means, operatively connected to said bus line and to receive memory address signals, for accessing respective ones of said storage locations in accordance with said memory address signals, and for providing said digital data stored in said respective ones of said storage locations as an output;

corner detecting means, operatively connected to said bus line, for accessing respective ones of said storage locations in accordance with a specified sequence, for detecting a first predetermined data of said digital data, corresponding to respective ones of said corners, and for providing a corner detect signal indicating said respective one of said storage locations storing digital data corresponding to said first predetermined data;

image correcting means, operatively connected to said bus line for accessing respective ones of said storage locations, for detecting a second predetermined data of said digital data corresponding to said pattern, and for providing a correction signal indicating said respective one of said storage locations storing said second predetermined data;

projection pattern generating means, operatively connected to said bus line, for accessing respective ones of said storage locations, for generating projection pattern signals corresponding to a predetermined portion of said digital data corresponding to said pattern, and for storing said projection pattern signals in respective storage locations of said memory means;

center point detection means, operatively connected to said bus line, for accessing said projection pattern signals and for generating a center point signal indicating the storage location storing the center signal of said projection pattern signal;

control means, operatively connected to said bus line, for providing address signals and control signals, and for storing said digital data into said memory means.

18. A recognition apparatus according to claim 17, wherein said reading means comprises:

first means operatively connected to said control means for receiving said address signals and one of said control signals;

second means operatively connected to said first means, for providing a first portion of said address signals to said memory means;

gate means, operatively connected to receive a second part of said address signals, for receiving digital data specified by said first part of said address signals and for providing as said output, a portion of said received digital data specified by said second portion of said address signals.

19. A recognition apparatus according to claim 17, wherein said corner detecting means comprises:

first means, operatively connected to said bus line for receiving and storing a first portion of said address signals and a first portion of said control signals;

decoding means, operatively connected to said first means, for initiating said specified sequence in accordance with said first portion of said address signals;

memory address generating means, operatively connected to said decoding means and to said bus line, for providing said memory address signals corresponding to respective ones of said storage locations for storing digital data corresponding to adjacent portions of said view surface along a diagonal line with respect to said center line, and for providing said corner detect signal.

20. A recognition apparatus according to claim 19, wherein said address signals comprise X scanning signals and Y scanning signals, and wherein said memory address gating means comprises:

x scanning signal control means operatively connected to said first means and to said decoding means, for providing a start control signal responsive to said first portion of said control signals and a x scanning control signal indicating respective ones of said adjacent portions of said view surface along a line parallel to said center line;

y scanning signal control means, operatively connected to said first means, to said x scanning signal control means and to said decoding means, for providing an end control signal corresponding to one of said first portion of said control signals being responsive to said first predetermined data corresponding to a respective one of said corners, and for providing a y scanning control signal indicating respective ones of said adjacent portions of said view surface along a line perpendicular to said center line;

x scanning signals and y scanning signals generating means, operatively connected to said first means, to said decoding means, to said x scanning signal control means, and to said y scanning signal control means for providing x scanning signals indicating respective ones of said adjacent portions of said view surface along a diagonal line with respect to said center line in accordance with said x scanning signal and in response to said start control signal, and for providing y scanning signals indicating respective ones of said adjacent portions of said view surface along a diagonal line with respect to said center line in accordance with said x scanning control signal.

21. A recognition apparatus according to claim 17, wherein said address signals comprise x scanning signals and y scanning signals and wherein said image correcting means comprises:

first means, operatively connected to said bus line, for receiving and storing respective ones of said x scanning signals and said y scanning signals, and for receiving a first portion of said control signal;

memory control means, operatively connected to said bus line and to said first means, for accessing said respective ones of said storage locations in response to one of said first portion of said control signals and in accordance with said x scanning signals and y scanning signals, and for providing said digital data stored in said respective ones of said storage locations;

memory address signals generating means, operatively connected between said first means and said memory control means, for providing said memory address signals being responsive to said x scanning signals and said y scanning signals and a second one of said first portion of said control signals, to said memory control means;

correction signal generating means, operatively connected to said first means and to said memory address signal generating means, for providing said correction signal being responsive to said x scanning signals, said y scanning signals and said memory address signal;

digital data checking means, operatively connected between said memory control means and said first means, for providing a third one of said first portion of said control signals in rsponse to detecting said predetermined digital data corresponding to said pattern, and for storing said correction signal in said first means in response to said third one of said first portion of said control signals.

22. A recognition apparatus according to claim 17, wherein said address signals comprise x signals and y signals and said projection pattern generating means comprises:

first means, operatively connected to said bus line, for receiving and storing respective ones of said x scanning signals and said y scanning signals, and for receiving a first portion of said control signals;

first memory control means, operatively connected to said bus line and to said first means, for accessing said respective ones of said storage locations in response to one of said first portion of said control signals and in accordance with said x scanning signals and said y scanning signals, and for providing said digital data stored in said respective ones of said storage locations;

projection pattern signals generating means, operatively connected between said first means and said first memory control means, to receive said x signals and said y signals and to receive a first two of said first portion of said control signals, for generating said projection pattern signals in response to said respective ones of said x signals and said y signals corresponding to respective ones of said storage locations for storing said digital data corresponding to said pattern;

digital data checking means, operatively connected to receive said digital data from said first memory control means, for providing a clock signal responsive to said predetermined portion of said digital data corresponding to said pattern;

second memory control means, operatively connected between said bus line and said projection pattern signals generating means, to receive one of said first two of said first portion of said control signals and said clock signal, for storing in response to said clock signal, said projection pattern signals in respective ones of said storage locations.

23. A recognition apparatus according to claim 17, wherein said address signals include x signals and y signals and said control signals include slice signals indicating adjacent points respectively parallel to and perpendicular to said center line an wherein said center point detecting means comprises:

bus interface means, operatively connected to said bus line, for receiving and storing respective ones of said x signals and said y signals, and for receiving a first portion of said control signals;

first memory control means, operatively connected to receive a first one of said first portion of said control signals, for accessing said respective storage locations storing said projection pattern signals and for providing a first control signal;

projection pattern signal address generating means, operatively connected between said bus interface means and said first memory control means, for generating said respective ones of said address signals corresponding to said respective storage locations storing said projection pattern signals corresponding to adjacent portions of said pattern, in accordance with a first two of said first portion of said control signals and said x signals and said y signals, and in accordance with said slice signals;

centerpoint signal generating means, operatively connected to said projection pattern signal address generating means and to said bus line interface means, for calculating the address signal corresponding to the address of the respective one of said storage locations storing the center one of said projection pattern signals.