Beam alignment tool and method
First Claim
1. A tool for checking alignment between a beam of radiant energy and a structure comprising:
- (a) target support means for holding a target in the path of the beam so that the beam will impinge on a surface of the target and thereby form a beam image;
(b) a reticle opaque to the radiant energy of the beam; and
(c) reticle positioning means for holding the reticle in the path of the beam in front of the target in predetermined alignment with the structure so that the reticle will cast a shadow on the target within the beam image, the shadow and the outline of the beam image being in a first positional relationship when the beam is in the desired alignment with the structure, such positional relationship being altered by deviation of the beam from such desired alignment.
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Accused Products
Abstract
A method and apparatus for adjusting the alignment of a beam of radiant energy relative to a structure. A target is placed in the path of the beam, with an opaque reticle disposed in front of the target in the path of the beam in predetermined alignment with the structure. The beam impinges on the target to form a beam image and the reticle casts a shadow within the beam image. The positional relationship between the shadow and the outline of the beam image will be altered by any misalignment between the beam and the structure. The target is preferably chosen so that it will be permanently altered by the radiant energy of the beam, and the positional relationship between the shadow and the outline is preferably observed after exposure of the target to the beam.
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Citations
17 Claims
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1. A tool for checking alignment between a beam of radiant energy and a structure comprising:
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(a) target support means for holding a target in the path of the beam so that the beam will impinge on a surface of the target and thereby form a beam image; (b) a reticle opaque to the radiant energy of the beam; and (c) reticle positioning means for holding the reticle in the path of the beam in front of the target in predetermined alignment with the structure so that the reticle will cast a shadow on the target within the beam image, the shadow and the outline of the beam image being in a first positional relationship when the beam is in the desired alignment with the structure, such positional relationship being altered by deviation of the beam from such desired alignment. - View Dependent Claims (2, 3, 4)
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5. A method of checking the alignment between a beam of radiant energy and a structure comprising steps of:
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(a) positioning a target in the path of the beam and exposing the target to the beam so that the beam will impinge on a front surface of the target and form a beam image thereon; (b) positioning a reticle which is opaque to the radiant energy of the beam in front of the target in the path of the beam in predetermined alignment with the structure so that the reticle will cast a shadow on the target within the beam image during the exposure of the target to the beam, the shadow and the outline of the beam image being in a first positional relationship when the beam is in the desired alignment with the structure, such positional relationship being altered by deviation of the beam from such desired alignment; and (c) detecting the positional relationship between the shadow cast by the reticle and the outline of the beam image. - View Dependent Claims (6, 7, 16)
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8. A method of checking the alignment between a beam of radiant energy and a structure comprising steps of:
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(a) positioning a target in the path of the beam and exposing the target to the beam so that the beam will impinge on a front surface of the target and form a beam image thereon; (b) positioning a reticle which includes a pair of perpendicular intersecting linearly extensive elements and which is opaque to the radiant energy of the beam in front of the target in the path of the beam in predetermined alignment with the structure so that the reticle will cast a shadow which includes a pair of perpendicular shadow lines on the target within the beam image during the exposure of the target to the beam; and (c) detecting the positional relationship between the shadow cast by the reticle and the outline of the beam image by measuring the distances from the point of intersection of the shadow lines to the edge of the beam image along each of the shadow lines. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A tool for checking alignment between a beam of radiant energy and a structure comprising:
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(a) a target support means for holding a target in the path of the beam so that the beam will impinge on a surface of the target and thereby form a beam image; (b) a reticle opaque to the radiant energy of the beam; and (c) reticle positioning means for holding the reticle in the path of the beam in front of the target in predetermined alignment with the structure so that the reticle will cast a shadow on the target, the shadow and the outline of the beam image being in a first positional relationship when the beam is in the desired alignment with the structure, such positional relationship being altered by deviation of the beam from such desired alignment.
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15. A method for checking the alignment between a beam of radiant energy and a structure comprising steps of:
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(a) positioning a target in the path of the beam and exposing the target to the beam so that the beam will impinge on a front surface of the target and form a beam image thereon; (b) positioning a reticle which is opaque to the radiant energy of the beam in front of the target in the path of the beam in predetermined alignment with the structure so that the reticle will cast a shadow on the target during the exposure of the target to the beam, the shadow and the outline of the beam image being in a first positional relationship when the beam is in the desired alignment with the structure, such positional relationship being altered by deviation of the beam from such desired alignment; and (c) detecting the positional relationship between the shadow cast by the reticle and the outline of the beam image. - View Dependent Claims (17)
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Specification