Apparatus and methods for measuring the optical thickness and index of refraction of thin, optical membranes

• US 4,453,828 A
• Filed: 12/02/1981
• Issued: 06/12/1984
• Est. Priority Date: 12/02/1981
• Status: Expired due to Fees

• Current Assignee: Advanced Semiconductor Products Incorporated
• Original Assignee: Advanced Semiconductor Products Incorporated
• Inventors: Winn, Ray, Hershel, Ronald S.
• Primary Examiner(s): ROSENBERGER, RICHARD A
• Application Number:
  US06/326,488
• Time in Patent Office: 923 Days
• Field of Search: 356/357, 356/381, 356/382
• US Class Current: 356/504
• CPC Class Codes: G01B 11/06 for measuring thickness ; e.g. of sheet material thickness measurement by thermal means G01B21/085
• CPC Class Codes: G01N 21/41 Refractivity; Phase-affecting properties, e.g. optical path length G01N21/21 takes precedence

Abstract

A method for measuring accurately the optical thickness and index of refraction of thin, optical membranes includes directing light onto the membrane at one or more known angles of incidence, finding at least one angle of incidence, called a null angle, where the membrane reflects substantially none of the incident light, then calculating the optical thickness of the membrane, its index of refraction, or both, from one or more such null angles. Apparatus for this purpose includes means for directing a light beam onto thin, optical membranes, means for varying the angle of incidence of a light beam upon the membrane, and means for detecting the angles of incidence of the light beam on the membrane, including the null angles.

Claims

1. A method comprising directing light onto a thin, optical membrane at one or more known angles of incidence, said membrane having a thickness in the range of about 0.5 to about 10 micrometers, said membrane being capable of being edge-supported;

finding two consecutive null angles of incidence for said membrane;

calculating the thickness t of said membrane from the expression;

t√

(sin I2)² -(sin I1)² =(λ

/2)√

k-1, where I2 and I1, are said two consecutive null angles of incidence for said membrane, λ

is the wavelength of the incident light, and k is an assumed, even integer value, in quarter wavelengths of light, for the optical thickness of said membrane;

then calculating the index of refraction N of said membrane from the calculated value of t and the assumed value of k in the expression;

Nt=k(λ

/4), where N is equal to the square root of the expression N² -(sin I)², I is I1 or I2, and N is the index of refraction for said membrane.

2. A method comprising directing light onto a thin, optical membrane at one or more known angles of incidence, said membrane having a thickness in the range of about 0.5 to about 10 micrometers, said membrane being capable of being edge-supported;

finding two consecutive null angles of incidence for said membrane;

calculating the thickness t of said membrane from the expression;

t√

(sin I2)² -(sin I1)² =(λ

/2)√

k-1, where I2 and I1 are said two consecutive null angles of incidence for said membrane, λ

is the wavelength of the incident light, and k is an assumed, even integer value, in quarter wavelengths of light, for the optical thickness of said membrane;

then calculating the index of refraction N of said membrane from the calculated value of t and the assumed value of k in the expression Nt=k(λ

/4), where N is equal to the square root of the expression N² -(sin I)², I is I1 or I2 and N is the index of refraction for said membrane;

then directing light onto another thin, optical membrane having a thickness in the range of about 0.5 to about 10 micrometers, and being capable of being edge-supported, at a null angle of incidence for said other membrane; and

then calculating the thickness t of said other membrane from the expression Nt=kλ

/4 where λ

is the wavelength of the incident light;

k is said assumed, even integer value, in quarter wavelengths of light, for the optical thickness of said membrane;

N is equal to the square root of the expression N² -(sin I)² ; and

N is said calculated value of the index of refraction of said membrane, and most closely approximates the nominal value of the index of refraction for said membrane.

3. A method comprising directing light onto a thin, optical membrane at one or more known angles of incidence, said membrane having a thickness in the range of about 0.5 to about 10 micrometers, said membrane being capable of being edge-supported;

finding two consecutive null angles of incidence for said membrane;

calculating the thickness t of said membrane from the expression;

t√

(sin I2)² -(sin I1)² =(λ

/2)√

k-1, where I2 and I1 are said two consecutive null angles of incidence for said membrane, λ

is the wavelength of the incident light, and k is an assumed, even integer value, in quarter wavelengths of light, for the optical thickness of said membrane s;

then calculating the index of refraction N of said membrane from the calculated value of t and the assumed value of k in the expression Nt=k(λ

/4), where N is equal to the square root of the expression N² -(sin I)², I is I1 or I2, and N is the index of refraction for said membrane;

then directing light onto another thin, optical membrane having a thickness in the range of about 0.5 to about 10 micrometers and being capable of being edge-supported;

finding two consecutive null angles of incidence for said other membrane;

computing the thickness t of said other membrane from the expression (N3-N4)t=λ

/2 where N3=√

N² -(sin I3)² ; and

N4=√

N² -(sin I4)² ;

I3 is the first null angle of incidence for said other membrane;

I4 is the second null angle for said other membrane;

λ

is the wavelength of the incident light striking said other membrane; and

N is said calculated value of the index of refraction of said membrane and most closely approximates the nominal value of the index of refraction for said membrane.