Defect detecting method and apparatus
First Claim
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1. A defect detecting method comprising the steps of:
- (a) receiving light from an object under inspection, to form an image thereof;
(b) dividing said image into a plurality of picture elements;
(c) storing signals of said picture elements in relation to the positions of the corresponding segments of said image;
(d) imaginarily dividing said image into a plurality of regions;
(e) accumulating said picture element signals for each region;
(f) comparing the results of said accumulations of the regions proximate to each other; and
(g) detecting a defect in said object in accordance with the result of said comparison.
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Abstract
In a defect detecting method and apparatus, the image of an object under inspection is formed, the signals of picture elements forming the image is stored, the picture elements signals are accumulated for each of the regions which form parts of the image, the results of the accumulations for regions proximate to each other are compared, and a defect is detected from the result of the comparison.
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Citations
11 Claims
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1. A defect detecting method comprising the steps of:
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(a) receiving light from an object under inspection, to form an image thereof; (b) dividing said image into a plurality of picture elements; (c) storing signals of said picture elements in relation to the positions of the corresponding segments of said image; (d) imaginarily dividing said image into a plurality of regions; (e) accumulating said picture element signals for each region; (f) comparing the results of said accumulations of the regions proximate to each other; and (g) detecting a defect in said object in accordance with the result of said comparison. - View Dependent Claims (2, 3)
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4. A defect detecting method comprising the steps of:
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(a) receiving light from an object under inspection, to form an image thereof; (b) dividing said image into a plurality of picture elements; (c) storing the signals of the picture elements in relation to the positions of the corresponding segments of said image; (d) reading the signals of said picture elements in the order in which the corresponding segments in the central area of said image are traversed by a substantially spiral line which is imaginarily drawn on said image; (e) detecting a defect in said object in accrdance with the mutual relationship between the signal of one of the picture elements and the signal of another picture element read out a little before the reading of the signal of said one of the picture elements; (f) imaginarily dividing the peripheral part of said image into a plurality of regions; (g) accumulating the signals of said picture elements for each region; (h) comparing the results of said accumulations of regions proximate to each other; and (i) detecting a defect in said object in accordance with the result of said comparison. - View Dependent Claims (5, 6, 7)
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8. A defect detecting apparatus comprising:
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(a) means for receiving light from an object under inspection, to form an image thereof; (b) means for storing signals of picture elements forming said image in relation to the positions of the corresponding segments of said image; (c) means for accumulating said picture element signals for each one of the regions which respectively form parts of said image; (d) means for comparing the results of said accumulations of regions proximate to each other; and (e) means for detecting a defect in said object under inspection in accordance with the result of said comparison. - View Dependent Claims (9, 10, 11)
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Specification