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Defect detecting method and apparatus

  • US 4,454,542 A
  • Filed: 07/23/1982
  • Issued: 06/12/1984
  • Est. Priority Date: 07/30/1981
  • Status: Expired due to Term
First Claim
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1. A defect detecting method comprising the steps of:

  • (a) receiving light from an object under inspection, to form an image thereof;

    (b) dividing said image into a plurality of picture elements;

    (c) storing signals of said picture elements in relation to the positions of the corresponding segments of said image;

    (d) imaginarily dividing said image into a plurality of regions;

    (e) accumulating said picture element signals for each region;

    (f) comparing the results of said accumulations of the regions proximate to each other; and

    (g) detecting a defect in said object in accordance with the result of said comparison.

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