Isolation for high density integrated circuits

• US 4,454,647 A
• Filed: 08/27/1981
• Issued: 06/19/1984
• Est. Priority Date: 08/27/1981
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Mauer, John L. IV, Joy, Richard C., Kemlage, Bernard M.
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): Hey, David A.
• Application Number:
  US06/296,933
• Time in Patent Office: 1,027 Days
• Field of Search: 29/576 W, 29/571, 29/576 E, 29/577, 29/578, 29/580, 148/1.5, 148/175, 148/187, 156/643, 156/648, 357/48, 357/49, 357/50, 357/34, 357/22, 357/41, 357/59
• US Class Current: 438/361
• CPC Class Codes: H01L 21/743 Making of internal connections, substrate contacts
• CPC Class Codes: H01L 21/76202 using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO H01L21/76235 takes precedence; together with vertical isolation, e.g. LOCOS in a SOI substrate, H01L21/76264
• CPC Class Codes: H01L 21/763 Polycrystalline semiconductor regions H01L21/76264 takes precedence

Abstract

An integrated circuit structure having substrate contacts formed as a part of the isolation structure and the method to form such structure is described. The integrated circuit structure is composed of a monocrystalline silicon body having a pattern of dielectric isolation surrounding regions of the monocrystalline silicon in the body. The dielectric isolation pattern includes a recessed dielectric portion at and just below the surface of the integrated circuit and a deep portion which extends through the recessed dielectric portion and extends further into the monocrystalline silicon body than the recessed portion. A highly doped polycrystalline silicon substrate contact is located within the deep portion of the pattern of isolation. The substrate contact extends from the surface of the pattern of isolation down to the bottom of the deep portion of the isolation where the contact electrically connects to the silicon body. Any of a variety of integrated circuit device structures may be incorporated within the monocrystalline silicon regions. These devices include bipolar transistors, field effect transistors, capacitors, diodes, resistors and the like.

Claims

1. Method for forming a recessed isolation structure for an integrated circuit structure having substrate contacts comprising:

forming a first masking layer over a major surface of a monocrystalline silicon substrate;

opening a pattern in said first masking layer to said major surface wherein said isolation structure is desired;

oxidizing the exposed monocrystalline substrate to produce said recessed isolation structure;

removing said first masking layer;

forming a second masking layer over said major surface;

opening a pattern in said second masking layer in the recessed isolation structure wherein said substrate contacts are to be formed;

forming through said opening a pattern of trenches having substantially vertical sidewalls through the said recessed isolation structure and into the said monocrystalline silicon thereunder;

forming an insulating layer upon the surfaces of said trenches;

removing said insulating layer from the bottom surfaces of said trenches;

depositing a layer of polycrystalline silicon over said substrate to fill said trenches; and

planarizing said major surface of said substrate by an etching process which substantially removes said layer of polycrystalline silicon except from said trenches.

2. The method of claim 1 wherein prior to said oxidizing the said exposed substrate is etched so that when said oxidizing is completed the top surface of the formed silicon dioxide will be substantially planar with the said major surface of said silicon substrates.

3. The method of claim 1 wherein said first masking layer is composed of silicon oxynitride.

4. The method of claim 1 and further comprising removing said second masking layer and forming the desired active and passive devices in said monocrystalline silicon substrate between said recessed isolation structure.

5. The method of claim 4 wherein said devices form a bipolar integrated circuit structure, said monocrystalline substrate includes a base silicon layer and an epitaxial layer thereover and there is provided a subcollector layer overlapping said base silicon layer and said epitaxial layer.

6. The method of claim 1 wherein the said pattern of trenches are formed by reactive ion etching.

7. The method of claim 1 wherein said insulating layer is silicon dioxide and said insulating layer is formed by thermal oxidation.

8. The method of claim 7 wherein said insulating layer is removed from the said bottom surfaces by anisotropic etching using a reactive ion etching process.

9. The method of claim 5 wherein said base region is P, said subcollector is N+, said polycrystalline silicon is P+ and said bipolar integrated circuit structure contains NPN transistors.

10. The method of claim 1 wherein said planarization is accomplished by preferentially etching said polycrystalline silicon in a reactive ion etching ambient.

11. The method of claim 1 wherein said recessed isolation structure surface portion is greater than about 1.5 um in width and less than 1.5 μ

m in depth and the trench portion is less than about 5 μ

m in width and ≢

μ

m in depth below said major surface.