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Formation of a multi-nozzle ink jet

  • US 4,455,192 A
  • Filed: 04/05/1982
  • Issued: 06/19/1984
  • Est. Priority Date: 05/07/1981
  • Status: Expired due to Term
First Claim
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1. A method for the formation of a multi-nozzle ink jet, comprising the steps of:

  • masking the surface of a single crystal silicon plate;

    diffusing impurities onto the unmasked regions of said plate to render said unmasked regions resistant to known etching compositions;

    growing a second single crystal silicon plate onto said first single crystal silicon plate;

    masking the surface of said second single crystal silicon plate; and

    diffusing an etching composition onto said masked second single crystal silicon plate, whereby said etching composition creates an opening in said second single crystal silicon plate, and creates a plurality of nozzles in said first single crystal silicon plate.

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