Fabrication of solid state electronic devices using fluorescent imaging of surface temperature profiles
First Claim
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1. A method for fabricating a solid state electronic device, comprising the steps of:
- forming a layer of fluorescent material on a surface of a partially or fully completed solid state electronic device, the fluorescence of said material varying as the temperature of the underlying device varies;
exposing said material to energy which causes said material to fluoresce;
monitoring the fluorescence of said material while the solid state electronic device is contacted with a voltage and/or current source; and
accepting, rejecting, or further processing said device in response to the monitored fluorescence.
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Abstract
Solid state electronic devices are optically monitored during fabrication to detect hot spots which are indicative of faulty operation. The surface temperatures of such a device are measured by applying a fluorescent material to the device, and subsequently monitoring the temperature dependent fluorescence of the material, which is reflective of the temperature of the underlying device. Devices are accepted, rejected, or further processed in response to the monitored fluorescence.
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Citations
36 Claims
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1. A method for fabricating a solid state electronic device, comprising the steps of:
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forming a layer of fluorescent material on a surface of a partially or fully completed solid state electronic device, the fluorescence of said material varying as the temperature of the underlying device varies; exposing said material to energy which causes said material to fluoresce; monitoring the fluorescence of said material while the solid state electronic device is contacted with a voltage and/or current source; and accepting, rejecting, or further processing said device in response to the monitored fluorescence. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 31, 32, 33, 34, 35, 36)
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30. The method of clainm 29 wherein said material comprises Rhodamine B distributed in polyethyleneimine.
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