Gas detection device and method for detecting gas

• US 4,457,161 A
• Filed: 04/07/1981
• Issued: 07/03/1984
• Est. Priority Date: 10/09/1980
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Ikegami, Akira, Sato, Nobuo, Iwanaga, Shoichi, Arima, Hideo, Noro, Takanobu, Isogai, Tokio
• Primary Examiner(s): Kreitman, Stephen A.
• Assistant Examiner(s): Chapman, Jr., John E.
• Application Number:
  US06/366,304
• Time in Patent Office: 1,183 Days
• Field of Search: 73/23, 73/27 R, 324/71.5, 340/634, 422/98, 338/34
• US Class Current: 73/31.05
• CPC Class Codes: G01N 27/12 of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid , for detecting components in the fluid
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array

Abstract

A gas detection device and a method for detecting a gas where gas information including concentrations of gas components in a mixed gas, concentration, presence of specific gas components and the like is detected by measuring, e.g., the output voltages of a plurality of gas sensors having different gas selectivities. The gas selectivities, as a characteristic constant of the specific gas sensor, was previously determined. The measured output voltages and gas selectivities are then used for solving plural simultaneous equations for gas concentrations.

Claims

1. A gas detection device for detecting concentration of any one of predetermined different gases in a gas mixture, said device comprising a substrate, a plurality of gas adsorbing sensors formed on said substrate, each of said sensors having different gas selectivities to the gases in the gas mixture, the number of said sensors being equal to the number of the different gases to be detected, at least two sensors being sensitive to at least two gases but having different sensitivities to said at least two gases, and each of said sensors adapted to provide an output having one or more output components, each component having a dimension of electrical conductivity and being proportional to the concentration of one of said different gases within a predetermined range of temperature of the sensor, said output of each sensor being the sum of said one or more output components, and means for computing the gas concentration of said any one of predetermined different gases using the outputs of said sensors produced at a temperature within said range.

2. The gas detection device according to claim 1, wherein the gas selectivities of the gas sensors to the known gas components are effected by utilizing different kinds of gas sensor materials for the different gas sensors.

3. The gas detection device according to claim 1, wherein the gas selectivities of the gas sensors to the known gas components are effected by using different conditions for fabricating gas sensor materials for the different gas sensors.

4. The gas detection device according to claim 1, wherein the gas selectivities of the gas sensors to the known gas components are effected partly by using different kinds of gas sensor materials for the different gas sensors and partly by using different conditions for fabricating gas sensor materials for the different gas sensors.

5. The gas detection device according to claim 1, further comprising a heater for heating the gas sensors to their operating temperature, and wherein the heater is a sheet form heater.

6. The gas detection device according to claim 5, wherein the heater is provided on one side of said substrate and the gas sensors are provided on the other side.

7. The gas detection device according to claim 6, wherein the heater includes means for heating and maintaining the gas sensors at 400°

-450°

C.

8. The gas detection device according to claim 1, wherein the gas sensors are arranged in a matrix configuration.

9. The gas detection device according to claim 8, wherein output terminals of the gas sensors in the matrix configuration are in a structure in which one of the output terminals of each gas sensor belonging to a line group of the matrix configuration is connected to a common electrode, and other output terminals of the gas sensors are open, and are scanned, thereby providing said output individually.

10. The gas detection device according to claim 8, wherein output terminals of the gas sensors in the matrix configuration are in a structure in which one of the output terminals of each gas sensor belonging to a line group of the matrix configuration is connected to a common electrode, and the other output terminals of gas sensors belonging to a row group of the matrix configuration are connected to another common electrode, thereby providing said output by selecting a common electrode to the line group and a common electrode to the row group.

11. The gas detection device according to claim 5, wherein the heater and gas sensors are provided on one side of said substrate, said heater being separated from said gas sensors by an electrically insulating layer.

12. The gas detection device according to claim 11, wherein the heater includes means to heat and maintain said gas sensors at 400°

-450°

C.

13. The gas detection device according to claim 12, wherein the gas sensors are arranged in a matrix configuration.

14. The gas detection device according to claim 13, wherein output terminals of the gas sensors in the matrix configuration are in a structure in which one of the output terminals of each gas sensor belonging to a line group of the matrix configuration is connected to a common electrode, and other output terminals of the gas sensors are open, and are scanned, thereby providing output individually.

15. The gas detection device according to claim 13, wherein output terminals of the gas sensors in the matrix configuration are in a structure in which one of the output terminals of each gas sensor belonging to a line group of the matrix configuration is connected to a common electrode, and the other output terminals of gas sensors belonging to a row group of the matrix configuration are connected to another common electrode, thereby providing said output by selecting a common electrode to the line group and a common electrode to the row group.

16. The gas detection device according to claim 1, wherein said output provided by each of said sensors and used in the computing means is an output voltage of each sensor.

17. The gas detection device according to claim 16, wherein said means for computing comprises means for solving n simultaneous equations as follows:

##EQU2## wherein Pi=detected output voltage generated by total gas components from sensor i;

m=number of gas sensors;

n=number of gas components in a sample gas;

Xj=concentration of specific gas component j; and

α

ij=sensitivity of sensor i to specific gas component j, a constant value.

18. A method for detecting concentration of any one of predetermined different gases in a gas mixture, utilizing a plurality of gas adsorbing sensors equal in number to the number of the different gases to be detected, each of the gas sensors having a different gas selectivity, at least two sensors being sensitive to at least two gas components but having different sensitivities to said at least two gas components, which comprises detecting an output voltage of each of the individual gas sensors having different gas selectivities, and computing the concentration of any one of the predetermined different gases from the detected output voltages by solving the n simultaneous equations:

##EQU3## wherein Pi;

detected output voltages generated by total gas components from sensor i,

m;

number of gas sensors,

n;

number of gas components in a sample gas,

Xj;

concentration of specific gas component j,

α

ij;

sensitivity of sensor i to specific gas component j, a constant value.

19. The method according to claim 18, wherein the presence of a specific gas component is indicated by a buzzer alarm.

20. The method according to claim 18, wherein the ratios of a plurality of specific gas components are computed.

21. The method according to claim 18, wherein the gas concentration is displayed by a display device.