Precision specular proximity detector and article handing apparatus employing same

• US 4,458,152 A
• Filed: 05/10/1982
• Issued: 07/03/1984
• Est. Priority Date: 05/10/1982
• Status: Expired due to Fees

• Current Assignee: Cybeq Systems, Inc.
• Original Assignee: Siltec Corporation
• Inventors: Bonora, Anthony C.
• Primary Examiner(s): Howell, Janice A.
• Assistant Examiner(s): Hannaher, Constantine
• Application Number:
  US06/376,299
• Time in Patent Office: 785 Days
• Field of Search: 250/353, 250/221, 250/357.1, 250/358.1, 250/359.1, 250/571, 356/429, 350/433, 414/331
• US Class Current: 250/353
• CPC Class Codes: B65H 7/14 by photoelectric feelers or detectors
• CPC Class Codes: G01P 13/00 Indicating or recording presence, absence, or direction, of movement electric switches H01H; counting moving objects G06M7/00
• CPC Class Codes: H01L 21/67265 of substrates stored in a container, a magazine, a carrier, a boat or the like
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers
• CPC Class Codes: Y10S 414/137 including means for charging or discharging wafer cassette

Abstract

Infrared radiation is focused to a line at a site at which a semiconductor wafer is expected to appear when a wafer is transferred with, i.e., loaded onto or unloaded from, a semiconductor wafer conveyor. A cylindrical lens of selected focal length is positioned to receive and focus to a line at an image plane radiation reflected by a wafer arriving at the site. An apertured stop defines an opening at the image plane to pass reflected radiation to an infrared sensor positioned on the side of the stop opposite the cylindrical lens.

Claims

1. A specular proximity detecor comprising:

means for directing radiation along an incidence path to a line substantially free of optical diffusion extending for a length transverse to said incidence path at a selected location along said incidence path;

a radiation sensor; and

a first converging line-focusing optical element disposed along a reflection path to intercept radiation reflected from the selected location and direct it to the radiation sensor, the first converging line-focusing optical element positioned along the reflection path relative to the selected location and the radiation sensor to direct a greater amount of radiation to said radiation sensor when such radiation is reflected from said selected location that when reflected from locations away from said selected location.

2. The detector of claim 1 wherein the first converging line-focusing optical element is positioned relative to the selected location to focus radiation reflected thereform at an image plane between said first converging line-focusing optical element and the radiation sensor, and further comprising a stop positioned between the first converging line-focusing optical element and the radiation sensor to pass reflected radiation from said first converging line-focusing optical element to said radiation sensor that is focused from the selected location to the image plane while preventing passage of radiation reflected from locations other than said selected location.

3. The detector of claim 1 or claim 2 wherein the first converging line-focusing optical element has a selected focal length and is positioned a distance from the selected location greater than the focal length.

4. The detector of claim 1 or claim 2 further comprising means responsive to the radiation sensor for generating a signal indicative of radiation reflected from an object at the selected location.

5. The detector of claim 1 further comprising a first converging point-focusing optical element positioned between the first converging line-focusing optical element and the radiation sensor for directing to said radiation sensor radiation reflected from the selected location.

6. The detector of claim 5 further comprising a stop positioned between the first converging line-focusing optical element and the first converging point-focusing optical element to pass reflected radiation from said first converging line-focusing optical element to said first converging point-focusing optical element that is focused from the selected location to the image plane while preventing passage of radiation reflected from locations other than said selected location.

7. The detector of claim 5 or claim 6 wherein the first converging line-focusing optical element is a cylindrical lens, and the first converging point-focusing optical element is a spherical lens.

8. The detector of claim 1 wherein said means for directing radiation along an incidence path comprises:

a radiation emitter; and

a second converging line-focusing optical element having a selected focal point, disposed to receive radiation from the radiation emitter and focus it along the line at the selected location, said radiation emitter and said second converging line-focusing optical element together defining an incidence path extending to the selected location, said incidence path being substantially free of optically diffusive elements.

9. The detector of claim 8 further comprising means responsive to the radiation sensor for generating a signal indicative of radiation reflected from an object at the selected location.

10. The detector of claim 8 wherein the first converging line-focusing optical element is positioned relative to the selected location to focus radiation reflected therefrom at an image plane between said first converging line-focusing optical element and the radiation sensor, and further comprising a first converging point-focusing optical element positioned between the first converging line-focusing optical element and the radiation sensor for directing to said radiation sensor radiation reflected from the selected location and focusing at the image plane.

11. The detector of claim 10 further comprising a stop positioned between the first converging line-focusing optical element and the first converging point-focusing optical element to pass reflected radiation from said first converging line-focusing optical element to said first converging point-focusing optical element that is focused from the selected location to the image plane while preventing passage of radiation reflected from locations other than said selected location.

12. A semiconductor wafer handling apparatus comprising:

a semiconductor wafer conveyor;

means for transferring semiconductor wafers with respect to the semiconductor wafer conveyor at a selected location relative to said conveyor;

means for forming a focused line of radiation at the selected location for reflection therefrom when a semiconductor wafer is positioned at said selected location for transfer with the semiconductor wafer conveyor;

means for receiving reflected radiation and focusing same to a line; and

means for sensing radiation disposed to receive the reflected and line focused radiation and generate an indication of radiation reflected from the selected location.

13. The apparatus of claim 12 wherein the radiation sensing means is coupled to control the transferring means and the semiconductor wafer conveyor in accordance with the sensed reflected radiation.

14. The apparatus of claim 13 wherein the transferring means includes a magazine for storing a plurality of semiconductor wafers, said magazine is positionable relative to the semiconductor wafer conveyor for transferring semiconductor wafers with respect thereto, the semiconductor wafer conveyor is controllable for selective conveyance of semiconductor wafers, and the radiation sensing means is coupled to the positionable magazine and controllable semiconductor wafter conveyor for controlling the positioning of said magazine and selective conveyance by said semiconductor wafer conveyor in accordance with the sensed reflected radiation.

15. The apparatus of claim 12 wherein the transferring means is located at one end of the semiconductor wafer conveyor for transferring semiconductor wafers with respect thereto, and the selected location of the focused line of radiation is adjusted said one end of the semiconductor wafer conveyor.

16. A specular proximity detector of integral construction comprising:

a housing defining opposite first and second sides and a third side joining said first and second opposite sides;

first and second converging cylindrical lenses each having a longitudinal axis, said cylindrical lenses mounted adjacent to each other within the housing proximate the third side thereof with their longitudinal axes parallel and extending in the direction of the opposite first and second sides;

the third side of the housing defining an opening exposing the cylindrical lenses to the exterior of said housing, the opening extending a first distance between the opposite first and second sides of the housing to expose a length of the cylindrical lenses and a second distance in the direction between the longitudinal axes of the cylindrical lenses less than the distance separating said longitudinal axes;

a radiation emitter mounted within the housing at a side of the second converging cylindrical lense opposite the opening defined by the third side of the housing to direct radiation towards said second converging cylindrical lens generally in the direction of a radiation incidence path extending through the longitudinal axis of said second converging cylindrical lens, said opening defined by the third side of the housing and a point exterior to the housing at which emitted radiation is focused in a substantially diffusion free manner to a line by said second converging cylindrical lens; and

a radiation sensor mounted within the housing at a side of the first converging cylindrical lens opposite the opening defined by the third side of the housing to receive radiation reflected from the point exterior to the housing generally in the direction of a radiation reflection path extending through said opening defined by the third side of the housing and the longitudinal axis of said first converging cylindrical lens.

17. The detector of claim 16 wherein the first converging cylindrical lens and the radiation sensor are mounted within the housing spaced from each other, the first converging cylindrical lens is positioned relative to the selected location to focus radiation reflected therefrom at an image plane between said first converging cylindrical lens and the radiation sensor, and further comprising a stop mounted within the housing between the first converging cylindrical lens and the radiation sensor to pass reflected radiation from said first converging cylindrical lens to said radiation sensor that is focused from the selected location to the image plane while preventing passage of radiation reflected from locations other than said selected location.

18. The detector of claim 16 or claim 17 further comprising a first converging spherical lens mounted within the housing between the first converging cylindrical lens and the radiation sensor for directing said radiation sensor radiation reflected from the selected location and focused at the image plane.

19. The detector of claim 18 wherein the first converging cylindrical lens has a diameter and a focal length less than those of the second converging cylindrical lens.

20. The detector of claim 18 further comprising a second converging spherical lens mounted within the housing between the radiation emitter and the second converging cylindrical lens to receive radiation from said radiation emitter and direct it to said second converging cylindrical lens.

21. The detector of claim 16 wherein the housing is a solid body defining spaces therein for retaining the first and second converging cylindrical lenses, the radiation emitter and the radiation sensor, the spaces for retaining the radiation emitter and the radiation sensor opening to the exterior of the solid body to provide access for electrical connection to said radiation emitter and said radiation sensor.