Device for measuring local electric conductivity of low-temperature plasma
First Claim
1. A device for measuring local electric conductivity of plasma, comprising:
- a probe;
said probe having a casing and a working end;
an inductive sensor provided at said working end of said probe;
a drive mechanism of said probe which is kinematically coupled to the probe;
a measuring oscillator accommodated in said casing of said probe;
a detector having an input and an output, said detector being accommodated in said casing of said probe;
said inductive sensor, measuring oscillator, and detector being electrically connected into a series circuit;
an optoelectronic converter having two inputs and an output;
a power supply unit of said optoelectronic converter coupled to one of said inputs of said optoelectronic converter;
a differential stage having two inputs and an output;
a switch having three inputs and an output;
a memory member coupled to one of said inputs of said switch;
the output of said optoelectronic converter being coupled to an input of said switch and an input of said differential stage;
a second input of said optoelectronic converter being coupled to said output of said detector;
the second input of said inputs of said differential stage being coupled to said inputs of said switch and memory member;
a calibrating means for calibrating said inductive sensor;
an electropneumatic control unit kinematically coupled to said drive mechanism of said probe and to said means for calibrating the inductive sensor;
a unit for feeding commands for performing measurement and calibration;
said unit for feeding commands having outputs;
a unit for measurement recording having inputs;
said outputs of said unit for feeding commands being coupled to the input of said electropneumatic control unit, to one of said inputs of said measurement recording unit, and to said third input of said switch, respectively;
said output of said differential stage being coupled to the other of said inputs of said measurement recording unit.
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Accused Products
Abstract
A device for measuring local electric conductivity of plasma, comprising a probe, which is kinematically coupled to a drive mechanism and has a series circuit including an inductive sensor, a measuring oscillator, and a detector having one output coupled, via an optoelectronic converter, to a differential stage having a switch and a memory member. An output of the differential stage is coupled to one input of a measurement recording unit having another input coupled to a unit for feeding commands which is electrically coupled to an electropneumatic control unit accommodating air valves of drive mechanisms of the probe and calibration crystal, the air valve being coupled to pneumatic cylinders of the drive mechanisms by means of flexible bases made of an insulating material.
13 Citations
10 Claims
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1. A device for measuring local electric conductivity of plasma, comprising:
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a probe; said probe having a casing and a working end; an inductive sensor provided at said working end of said probe; a drive mechanism of said probe which is kinematically coupled to the probe; a measuring oscillator accommodated in said casing of said probe; a detector having an input and an output, said detector being accommodated in said casing of said probe; said inductive sensor, measuring oscillator, and detector being electrically connected into a series circuit; an optoelectronic converter having two inputs and an output; a power supply unit of said optoelectronic converter coupled to one of said inputs of said optoelectronic converter; a differential stage having two inputs and an output; a switch having three inputs and an output; a memory member coupled to one of said inputs of said switch; the output of said optoelectronic converter being coupled to an input of said switch and an input of said differential stage; a second input of said optoelectronic converter being coupled to said output of said detector; the second input of said inputs of said differential stage being coupled to said inputs of said switch and memory member; a calibrating means for calibrating said inductive sensor; an electropneumatic control unit kinematically coupled to said drive mechanism of said probe and to said means for calibrating the inductive sensor; a unit for feeding commands for performing measurement and calibration; said unit for feeding commands having outputs; a unit for measurement recording having inputs; said outputs of said unit for feeding commands being coupled to the input of said electropneumatic control unit, to one of said inputs of said measurement recording unit, and to said third input of said switch, respectively; said output of said differential stage being coupled to the other of said inputs of said measurement recording unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification