×

High accuracy differential pressure capacitive transducer

  • US 4,458,537 A
  • Filed: 05/11/1981
  • Issued: 07/10/1984
  • Est. Priority Date: 05/11/1981
  • Status: Expired due to Fees
First Claim
Patent Images

1. A capacitive pressure transducer of the type including a diaphragm bearing an electrode and flexing convexly relative to a reference member having an opposed electrode and comprising:

  • thin film dielectric means interposed between the diaphragm and the reference member and including a graduated height layer of non-conductive material of high compressive strength defining a flexure limiting concave barrier for the diaphragm.

View all claims
  • 8 Assignments
Timeline View
Assignment View
    ×
    ×