Acoustic microscope using line-focus acoustic beam

• US 4,459,852 A
• Filed: 07/06/1982
• Issued: 07/17/1984
• Est. Priority Date: 07/08/1981
• Status: Expired due to Term

• Current Assignee: Junichi Kushibiki, Noriyoshi Chubachi
• Original Assignee: Junichi Kushibiki, Noriyoshi Chubachi
• Inventors: Kushibiki, Junichi, Chubachi, Noriyoshi
• Primary Examiner(s): Birmiel, Howard A.
• Application Number:
  US06/395,711
• Time in Patent Office: 742 Days
• Field of Search: 73/606, 73/642
• US Class Current: 73/606
• CPC Class Codes: G01H 3/125 for representing acoustic field distribution using optical means G01H9/002; sonar systems for imaging G01S7/56, G01S15/89; acoustic holography G03H3/00
• CPC Class Codes: G01N 29/06 Visualisation of the interior, e.g. acoustic microscopy medical or veterinary diagnosis using sonic waves A61B8/00; representation of acoustic wave distribution G01H3/125, G01H9/002; short-range imaging systems using reflection of acoustic waves G01S15/8906
• CPC Class Codes: G10K 11/26 Sound-focusing or directing, e.g. scanning

Abstract

An acoustic microscope using a line-focus acoustic beam is disclosed. The line-focus acoustic beam is generated by an acoustic transducer head having an acoustic transducer electrode applied on a flat end surface of a sapphire rod, in the opposite end surface is formed a cylindrical concave surface. The acoustic transducer head is arranged fixedly above a mechanical stage on which a specimen is placed. The mechanical stage is movable in a Z axis, i.e. an axis of the line-focus acoustic beam and is also rotatable about the Z axis. By moving the stage in the Z-axis, a V(z) curve is obtained and a phase velocity of a leaky surface-acoustic wave is calculated from a repetition period of the V(z) curve. Then the V(z) curve measurement is repeated while the stage is rotated, and it is possible to obtain anisotropies of the specimen expressed by a relation between the rotational angle and the phase velocity of the leaky surface-acoustic wave.

Claims

1. An acoustic microscope for detecting acoustic properties of a specimen comprising:

an acoustic transducer head for propagating an acoustic beam toward a specimen and which is linearly focussed in a direction perpendicular to the direction of propagation of the acoustic beam;

means for moving the acoustic transducer head relative to a specimen in the direction of propagation of the acoustic beam; and

means for rotating the acoustic transducer head relative to a specimen about an axis which is parallel with the direction of propagation of the acoustic beam.

2. An acoustic microscope according to claim 1, wherein said axis of rotation is made coincident with the direction of propagation of the acoustic beam.

3. An acoustic microscope according to claim 2, wherein said moving and rotating means comprise a mechanical stage which is movable in the direction of propagation of the acoustic beam and rotatable about the parallel axis, while said acoustic transducer head is fixed.

4. An acoustic microscope according to claim 1, wherein said acoustic transducer head comprises a solid state acoustic field medium having a flat end surface and at least one cylindrical concave surface formed in the opposite end surface, and at least one electroacoustic transducer element applied on said flat end surface of the solid state acoustic field medium.

5. An acoustic microscope according to claim 4, wherein said acoustic transducer head is so constructed that a half-width of the acoustic beam as viewed in said one direction is substantially equal to one wavelength of the acoustic beam.

6. An acoustic microscope according to claim 4, wherein an anti-reflection coating is applied onto said opposite end surface of the solid state acoustic field medium in which surface said cylindrical concave surface is formed.

7. An acoustic microscope according to claims 4, 5 or 6, wherein said solid state acoustic field medium is formed by a Z-cut sapphire rod.

8. An acoustic microscope according to claim 7, wherein said electroacoustic transducer element is formed by a ZnO film.

9. An acoustic microscope according to claim 4, wherein a plurality of the acoustic transducer elements are arranged on the flat end surface of the solid state acoustic field medium in such a manner that they make an angle unequal to zero relative to each other and the same number of the cylindrical concave surfaces as that of the transducer elements are formed in the opposite end surface of the solid state acoustic field medium in such a manner that each of them is aligned with the corresponding transducer element.

10. An acoustic microscope according to claim 1, wherein said acoustic transducer head comprises an acoustic transducer element which is applied on a cylindrical concave surface of a substrate.

11. An acoustic microscope according to claim 10, wherein said substrate is made of a semicylindrical body.

12. An acoustic microscope according to claim 1, wherein said acoustic transducer head comprises an acoustic transducer element applied on a cylindrical convex surface of a substrate made of acoustic field material.

13. An acoustic microscope according to claim 12, wherein said substrate is formed by a semicylindrical body.

14. An acoustic microscope for detecting acoustic properties of a specimen comprising:

an acoustic transducer head for propagating an acoustic beam toward a specimen and which is linearly focussed in a direction perpendicular to the direction of propagation;

said acoustic transducer head comprising a solid state acoustic field medium having a flat end surface and an opposite surface, a plurality of electroacoustic transducer elements arranged on said flat end surface in such a manner as to form angles relative to one another which do not equal zero, and a plurality of cylindrical concave surfaces equal in number to the number of said plurality of transducer elements and formed in said opposite surface in such a manner that each transducer element is aligned with a respective one of said concave surfaces.