Encoder
First Claim
1. An interpolation encoder comprising a sensor array having a plurality of sensor elements continuously arranged in an array, a code plate which has periodic lattice patterns including lattice pattern information "1" and "0" alternately and which is arranged in opposition to said sensor array, and an arithmetic unit for processing data detected by said sensor array from said lattice patterns of said code plate, characterized in that;
- said lattice patterns are formed by inclined lattice patterns whose arrangement is inclined with respect to the arrangement of said sensor elements of said sensor array for providing detection sensitivity in two-dimensions for said sensor array,whereby the number of the lattice patterns within a predetermined length of said code plate is slightly different from the number of said sensor elements of said sensor array within a length corresponding to said predetermined length so that a vernier relationship is established between the lattice patterns of said code plate and said sensor array, andsaid arithemtic unit is provided with means for obtaining an intersected position of an output envelope of even-numbered elements and an output envelope of odd-numbered elements of said sensor array for obtaining an interpolated value within the width of the sensor element.
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Accused Products
Abstract
An interpolation encoder comprising a sensor array, a code plate arranged in opposition to the sensor array and having a plurality of groups of lattice patterns, and an arithmetic unit for processing data of the code plate detected by the sensor array. The lattice patterns of at least one of the groups are inclined.
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Citations
21 Claims
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1. An interpolation encoder comprising a sensor array having a plurality of sensor elements continuously arranged in an array, a code plate which has periodic lattice patterns including lattice pattern information "1" and "0" alternately and which is arranged in opposition to said sensor array, and an arithmetic unit for processing data detected by said sensor array from said lattice patterns of said code plate, characterized in that;
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said lattice patterns are formed by inclined lattice patterns whose arrangement is inclined with respect to the arrangement of said sensor elements of said sensor array for providing detection sensitivity in two-dimensions for said sensor array, whereby the number of the lattice patterns within a predetermined length of said code plate is slightly different from the number of said sensor elements of said sensor array within a length corresponding to said predetermined length so that a vernier relationship is established between the lattice patterns of said code plate and said sensor array, and said arithemtic unit is provided with means for obtaining an intersected position of an output envelope of even-numbered elements and an output envelope of odd-numbered elements of said sensor array for obtaining an interpolated value within the width of the sensor element. - View Dependent Claims (2, 3, 4, 5)
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6. An encoder for measuring a two-dimensional displacement which comprises a code plate having a plurality of blocks, each of said blocks having address data representing an address of said block and having interpolation patterns comprising periodic lattice patterns including lattice pattern information "1" and "0" alternately, a sensor array having a plurality of sensor elements continuously arranged in an array, and an arithmetic unit for processing data detected by said sensor array from said code plate, characterized in that;
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said lattice patterns are formed by lattice patterns whose arrangement is inclined with respect to the arrangement of said sensor elements of said sensor array, whereby the number of lattice patterns within a predetermined length of said code plate is slightly different from the number of said sensor elements of said sensor array within a length corresponding to said predetermined length so that a vernier relationship is established between the lattice patterns of said code plate and said sensor array, and said arithmetic unit is provided with means for obtaining an intersected position of an output envelope of even-numbered elements and an output envelope of odd-numbered elements of said sensor array for obtaining an interpolated value within the width of the sensor element, whereby the displacement of said code plate in the longitudinal direction of said sensor array and in the direction perpendicular thereto can be detected independently with high precision. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An incremental encoder for measuring a two-dimensional displacement which comprises a code plate having interpolation patterns comprising periodic lattice patterns including lattice pattern information "1" and "0" alternately, a sensor array having a plurality of sensor elements continuously arranged in an array, and an arithmetic unit for processing data detected by said sensor array from said code plate, characterized in that;
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said code plate has a reference pattern, fine reading patterns, and interpolation patterns, the arrangements of said fine reading patterns and said interpolation patterns respectively are inclined with respect to an arrangement of said sensor elements of said sensor array, said lattice patterns are formed by lattice patterns whose arrangement is inclined with respect to the arrangement of said sensor elements of said sensor array, whereby the number of lattice predetermined length of said code plate is slightly different from the number of said sensor elements of said sensor array within a length corresponding to said predetermined length so that a vernier relationship is established between the lattice patterns of said code plate and said sensor array, and said arithmetic unit is provided with means for obtaining an intersected position of an output envelope of even-numbered elements and an output envelope of odd-numbered elements of said sensor array for obtaining an interpolated value within the width of the sensor element, so that displacement of said code plate in the longitudinal direction of said sensor array and in the direction perpendiculr thereto may be detected independently with high precision. - View Dependent Claims (19, 20, 21)
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Specification