Magnetron cathode sputtering apparatus

• US 4,466,877 A
• Filed: 10/11/1983
• Issued: 08/21/1984
• Est. Priority Date: 10/11/1983
• Status: Expired due to Term

• Current Assignee: Applied Films Corp. (Applied Materials Incorporated)
• Original Assignee: Shatterproof Glass Corp.
• Inventors: McKelvey, Harold E.
• Primary Examiner(s): Demers, Arthur P.
• Application Number:
  US06/540,363
• Time in Patent Office: 315 Days
• Field of Search: 204/298, 204/192 R, 204/192 C
• US Class Current: 204/298.23
• CPC Class Codes: H01J 37/3405 Magnetron sputtering

Abstract

A magnetron cathode sputtering apparatus including a pair of rotary cylindrical sputtering targets mounted in spaced parallel relation in an evacuable coating chamber and separate magnetic means located within said targets, the magnetic means being oriented relative to one another such that the material sputtered therefrom will be directed inwardly and downwardly at an acute angle whereby the sputtered material from the two targets will be focused upon the substrates.

Claims

1. Magnetron cathode sputtering apparatus, comprising a pair of elongated rotatable sputtering targets mounted in horizontally spaced parallel relation in an evacuable coating chamber for sputter-coating substrates also located in said chamber beneath said targets, and separate magnetic means located in said targets, said magnetic means being disposed at an angle to one another to focus the material sputtered from said targets upon said substrates.

2. Magnetron cathode sputtering apparatus as claimed in claim 1, in which said magnetic means are oriented such that the sputtered material therefrom is directed inwardly and downwardly upon said substrates.

3. Magnetron cathode sputtering apparatus as claimed in claim 1, including means for changing the angle of said magnetic means to vary the focus of the sputtered material upon the substrates.

4. Magnetron cathode sputtering apparatus as claimed in claim 2, including means for adjusting the orientation of said magnetic means to vary the concentration of the sputtered material upon the substrates.

5. Magnetron cathode sputtering apparatus as claimed in claim 1, including means for rotating said sputtering targets, and means for maintaining said magnetic means stationery.

6. Magnetron cathode sputtering apparatus as claimed in claim 3, including means for rotating said sputtering targets, and means for maintaining said magnetic means stationery.

7. Magnetron cathode sputtering apparatus as claimed in claim 1, including means for individually changing the angle of said magnetic means, and means for locking said magnetic means in adjusted postion.

8. Magnetron cathode sputtering apparatus as claimed in claim 2, including means for rotating said sputtering targets, and means for maintaining said magnetic means stationery.

9. Magnetron cathode sputtering apparatus as claimed in claim 1, in which said sputtering targets comprise elongated, cylindrical tubular members having a coating of the material to be sputtered applied thereto, and in which said magnetic means are located in said tubular members.

10. Magnetron cathode sputtering apparatus as claimed in claim 9, in which said magnetic means comprise permanent magnets.

11. Magnetron cathode sputtering apparatus as claimed in claim 10, including means for rotating said tubular members, and means for maintaining said permanent magnets stationery.

12. Magnetron cathode sputtering apparatus as claimed in claim 11, including means for adjusting the angle of said permanent magnets, and means for locking said magnets in adjusted position.

13. Magnetron cathode sputtering apparatus as claimed in claim 10, including a coolant conduit mounted lengthwise in each tubular member, in which the permanent magnets extend lengthwise of the tubular members and are supported thereby, and means for individually rotating said conduits about their longitudinal axes to vary the angle of the permanent magnets.

14. Magnetron cathode sputtering apparatus as claimed in claim 13, including means for rotating said tubular members, and means for maintaining said conduits stationery.