Surface acoustic wave interferometer

• US 4,467,235 A
• Filed: 03/12/1982
• Issued: 08/21/1984
• Est. Priority Date: 03/12/1982
• Status: Expired due to Fees

• Current Assignee: Rockwell International Corporation
• Original Assignee: Rockwell International Corporation
• Inventors: Staples, Edward J., De Wames, Roger E.
• Primary Examiner(s): Miller, J. D.
• Assistant Examiner(s): REBSCH, DONALD
• Application Number:
  US06/357,398
• Time in Patent Office: 893 Days
• Field of Search: 310/313 D, 310/313 B, 310/329, 333/151, 333/153, 333/195, 73/517 R, 331/155
• US Class Current: 310/313.00D
• CPC Class Codes: G01H 13/00 Measuring resonant frequency
• CPC Class Codes: G01L 1/165 with acoustic surface waves
• CPC Class Codes: G01P 15/0975 by acoustic surface wave resonators or delay lines

Abstract

Disclosed is a surface acoustic wave interferometer, including a substrate on which are disposed a first reflector and a second reflector so as to define a multimode resonant cavity therebetween. A third reflector is positioned on the substrate so that a single mode resonant cavity is defined between the second and third reflectors. An input transducer generates surface acoustic waves in the single mode cavity, while an output transducer detects the interference between surface acoustic waves in the multimode and single mode cavities. A base is rigidly affixed to the substrate in the region of the single mode cavity so that a force applied to the substrate will alter the surface acoustic wave propagation characteristics within the multimode cavity.

Claims

1. A surface acoustic wave interferometer, comprising:

a substrate;

a first reflector and a second reflector disposed on said substrate to define a multimode resonant cavity therebetween;

a third reflector disposed on said substrate, said second and third reflectors defining therebetween a single mode resonant cavity aligned with said multimode cavity;

an input transducer disposed on said substrate for generating surface acousitc waves in said single mode cavity; and

an output transducer disposed on said substrate for detecting the interference between surface acoustic waves in said single mode cavity and in said multimode cavity.

2. The interferometer of claim 1, wherein said input transducer is located in said single mode cavity and said output transducer is located in said multimode cavity.

3. The interferometer of claim 1, wherein said second reflector is partially reflecting, thereby transmitting a substantial portion of the surface acoustic wave energy incident thereon.

4. The interferometer of claim 1, wherein said substrate further comprises a piezoelectric substrate.

5. The interferometer of claim 4, wherein such reflectors further comprise surface wave grating reflectors and said transducers further comprise interdigital transducers.

6. A surface acoustic wave interferometer, comprising:

a piezoelectric substrate;

a first surface wave grating reflector and a second surface wave grating reflector disposed on said substrate to define a multimode resonant cavity therebetween;

a third surface wave grating reflector disposed on said substrate, said second and third reflectors defining therebetween a single mode resonant cavity aligned with said multimode cavity;

an input interdigital transducer disposed on said substrate in said single mode cavity for generating surface acoustic waves in said single mode cavity; and

an output interdigital transducer disposed on said substrate in said multimode cavity for detecting the interference between surface acoustic waves in said single mode cavity and in said multimode cavity.

7. A surface acoustic wave interferometer, comprising:

a substrate;

a first reflector and a second reflector disposed on said substrate to define a multimode resonant cavity therebetween;

a third reflector disposed on said substrate, said second and third reflectors defining therebetween a single mode resonant cavity aligned with said multimode cavity;

an input transducer disposed on said substrate for generating surface acoustic waves in said single mode cavity;

an output transducer disposed on said substrate for detecting the interference between surface acoustic waves in said single mode cavity and in said multimode cavity; and

a base rigidly affixed to said substrate in the region of said single mode cavity such that a force applied to said substrate will alter the surface acoustic wave propagation characteristics within said multimode cavity.

8. The transducer of claim 7, wherein said substrate is mounted on said base as a cantilever beam and further comprising a proof mass attached to said substrate.